JPS6222661B2 - - Google Patents
Info
- Publication number
- JPS6222661B2 JPS6222661B2 JP14656579A JP14656579A JPS6222661B2 JP S6222661 B2 JPS6222661 B2 JP S6222661B2 JP 14656579 A JP14656579 A JP 14656579A JP 14656579 A JP14656579 A JP 14656579A JP S6222661 B2 JPS6222661 B2 JP S6222661B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- suction head
- spinner
- coating
- coating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011248 coating agent Substances 0.000 claims description 38
- 238000000576 coating method Methods 0.000 claims description 28
- 238000010438 heat treatment Methods 0.000 claims description 12
- 230000007246 mechanism Effects 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14656579A JPS5670869A (en) | 1979-11-14 | 1979-11-14 | Spinner coating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14656579A JPS5670869A (en) | 1979-11-14 | 1979-11-14 | Spinner coating apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5670869A JPS5670869A (en) | 1981-06-13 |
| JPS6222661B2 true JPS6222661B2 (US20030204162A1-20031030-M00001.png) | 1987-05-19 |
Family
ID=15410543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14656579A Granted JPS5670869A (en) | 1979-11-14 | 1979-11-14 | Spinner coating apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5670869A (US20030204162A1-20031030-M00001.png) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0520469Y2 (US20030204162A1-20031030-M00001.png) * | 1987-01-14 | 1993-05-27 | ||
| JPH0667465B2 (ja) * | 1989-07-07 | 1994-08-31 | 株式会社日立製作所 | 被加工物の処理方法 |
| JP2591360B2 (ja) * | 1991-05-08 | 1997-03-19 | 株式会社日立製作所 | フォトレジストの塗布方法 |
| JP2616748B2 (ja) * | 1995-07-17 | 1997-06-04 | 株式会社日立製作所 | 半導体装置の製造方法 |
-
1979
- 1979-11-14 JP JP14656579A patent/JPS5670869A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5670869A (en) | 1981-06-13 |
