JPS62224674A - 微結晶炭化珪素膜の製造方法 - Google Patents

微結晶炭化珪素膜の製造方法

Info

Publication number
JPS62224674A
JPS62224674A JP6933686A JP6933686A JPS62224674A JP S62224674 A JPS62224674 A JP S62224674A JP 6933686 A JP6933686 A JP 6933686A JP 6933686 A JP6933686 A JP 6933686A JP S62224674 A JPS62224674 A JP S62224674A
Authority
JP
Japan
Prior art keywords
silicon carbide
carbide film
microcrystalline silicon
gaseous
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6933686A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0465145B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Yoshihisa Fujii
藤井　良久
Akira Suzuki
彰 鈴木
Akitsugu Hatano
晃継 波多野
Masaru Yoshida
勝 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP6933686A priority Critical patent/JPS62224674A/ja
Publication of JPS62224674A publication Critical patent/JPS62224674A/ja
Publication of JPH0465145B2 publication Critical patent/JPH0465145B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP6933686A 1986-03-26 1986-03-26 微結晶炭化珪素膜の製造方法 Granted JPS62224674A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6933686A JPS62224674A (ja) 1986-03-26 1986-03-26 微結晶炭化珪素膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6933686A JPS62224674A (ja) 1986-03-26 1986-03-26 微結晶炭化珪素膜の製造方法

Publications (2)

Publication Number Publication Date
JPS62224674A true JPS62224674A (ja) 1987-10-02
JPH0465145B2 JPH0465145B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-10-19

Family

ID=13399606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6933686A Granted JPS62224674A (ja) 1986-03-26 1986-03-26 微結晶炭化珪素膜の製造方法

Country Status (1)

Country Link
JP (1) JPS62224674A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01119015A (ja) * 1987-10-31 1989-05-11 Nippon Soken Inc 炭化ケイ素半導体膜およびその製造方法
EP0632145A3 (en) * 1993-07-01 1995-03-29 Dow Corning Process for forming coatings based on crystallized silicon carbide.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01119015A (ja) * 1987-10-31 1989-05-11 Nippon Soken Inc 炭化ケイ素半導体膜およびその製造方法
EP0632145A3 (en) * 1993-07-01 1995-03-29 Dow Corning Process for forming coatings based on crystallized silicon carbide.

Also Published As

Publication number Publication date
JPH0465145B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-10-19

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