JPS62212605A - 光導波路の作製方法 - Google Patents
光導波路の作製方法Info
- Publication number
- JPS62212605A JPS62212605A JP61054877A JP5487786A JPS62212605A JP S62212605 A JPS62212605 A JP S62212605A JP 61054877 A JP61054877 A JP 61054877A JP 5487786 A JP5487786 A JP 5487786A JP S62212605 A JPS62212605 A JP S62212605A
- Authority
- JP
- Japan
- Prior art keywords
- optical waveguide
- metal
- crystal substrate
- li2b4o7
- metallic layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 30
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000002184 metal Substances 0.000 claims abstract description 34
- 229910052751 metal Inorganic materials 0.000 claims abstract description 34
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 239000013078 crystal Substances 0.000 claims abstract description 29
- 238000000034 method Methods 0.000 claims abstract description 14
- 238000010438 heat treatment Methods 0.000 claims abstract description 10
- 238000009792 diffusion process Methods 0.000 abstract description 9
- 229910011131 Li2B4O7 Inorganic materials 0.000 abstract description 6
- 230000005856 abnormality Effects 0.000 abstract description 4
- 238000005336 cracking Methods 0.000 abstract description 4
- 238000004544 sputter deposition Methods 0.000 abstract description 2
- 239000010409 thin film Substances 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Optical Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61054877A JPS62212605A (ja) | 1986-03-14 | 1986-03-14 | 光導波路の作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61054877A JPS62212605A (ja) | 1986-03-14 | 1986-03-14 | 光導波路の作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62212605A true JPS62212605A (ja) | 1987-09-18 |
| JPH0462643B2 JPH0462643B2 (enExample) | 1992-10-07 |
Family
ID=12982815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61054877A Granted JPS62212605A (ja) | 1986-03-14 | 1986-03-14 | 光導波路の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62212605A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100439960B1 (ko) * | 2002-12-04 | 2004-07-12 | 전자부품연구원 | 열확산법을 이용한리드마그네슘니오베이트-리드티타네이트 광도파로 및 그의제조방법 |
-
1986
- 1986-03-14 JP JP61054877A patent/JPS62212605A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100439960B1 (ko) * | 2002-12-04 | 2004-07-12 | 전자부품연구원 | 열확산법을 이용한리드마그네슘니오베이트-리드티타네이트 광도파로 및 그의제조방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0462643B2 (enExample) | 1992-10-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |