JPS6221180Y2 - - Google Patents
Info
- Publication number
- JPS6221180Y2 JPS6221180Y2 JP19413881U JP19413881U JPS6221180Y2 JP S6221180 Y2 JPS6221180 Y2 JP S6221180Y2 JP 19413881 U JP19413881 U JP 19413881U JP 19413881 U JP19413881 U JP 19413881U JP S6221180 Y2 JPS6221180 Y2 JP S6221180Y2
- Authority
- JP
- Japan
- Prior art keywords
- gate valve
- annular
- valve
- bellows
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012530 fluid Substances 0.000 claims description 21
- 238000003466 welding Methods 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 238000007789 sealing Methods 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
Landscapes
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19413881U JPS58102879U (ja) | 1981-12-30 | 1981-12-30 | 真空用ゲ−トバルブ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19413881U JPS58102879U (ja) | 1981-12-30 | 1981-12-30 | 真空用ゲ−トバルブ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58102879U JPS58102879U (ja) | 1983-07-13 |
| JPS6221180Y2 true JPS6221180Y2 (en, 2012) | 1987-05-29 |
Family
ID=30107466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19413881U Granted JPS58102879U (ja) | 1981-12-30 | 1981-12-30 | 真空用ゲ−トバルブ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58102879U (en, 2012) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4522195B2 (ja) * | 2003-09-01 | 2010-08-11 | 株式会社アルバック | 半導体製造装置用の切換え弁 |
| JP6900348B2 (ja) * | 2018-05-23 | 2021-07-07 | 株式会社鷺宮製作所 | 溶接構造および弁装置 |
| JP7137385B2 (ja) * | 2018-07-17 | 2022-09-14 | 株式会社荏原製作所 | ゲートバルブ |
| JP7324018B2 (ja) * | 2019-03-19 | 2023-08-09 | 株式会社鷺宮製作所 | 溶接構造 |
-
1981
- 1981-12-30 JP JP19413881U patent/JPS58102879U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58102879U (ja) | 1983-07-13 |
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