JPS6220999Y2 - - Google Patents

Info

Publication number
JPS6220999Y2
JPS6220999Y2 JP1980093327U JP9332780U JPS6220999Y2 JP S6220999 Y2 JPS6220999 Y2 JP S6220999Y2 JP 1980093327 U JP1980093327 U JP 1980093327U JP 9332780 U JP9332780 U JP 9332780U JP S6220999 Y2 JPS6220999 Y2 JP S6220999Y2
Authority
JP
Japan
Prior art keywords
heating furnace
substrate
stacked
reaction tube
removal cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980093327U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5717139U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980093327U priority Critical patent/JPS6220999Y2/ja
Publication of JPS5717139U publication Critical patent/JPS5717139U/ja
Application granted granted Critical
Publication of JPS6220999Y2 publication Critical patent/JPS6220999Y2/ja
Expired legal-status Critical Current

Links

JP1980093327U 1980-07-02 1980-07-02 Expired JPS6220999Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980093327U JPS6220999Y2 (enrdf_load_stackoverflow) 1980-07-02 1980-07-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980093327U JPS6220999Y2 (enrdf_load_stackoverflow) 1980-07-02 1980-07-02

Publications (2)

Publication Number Publication Date
JPS5717139U JPS5717139U (enrdf_load_stackoverflow) 1982-01-28
JPS6220999Y2 true JPS6220999Y2 (enrdf_load_stackoverflow) 1987-05-28

Family

ID=29455273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980093327U Expired JPS6220999Y2 (enrdf_load_stackoverflow) 1980-07-02 1980-07-02

Country Status (1)

Country Link
JP (1) JPS6220999Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945219B2 (ja) * 1976-05-17 1984-11-05 株式会社日立製作所 ウェハ処理装置

Also Published As

Publication number Publication date
JPS5717139U (enrdf_load_stackoverflow) 1982-01-28

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