JPS6220869A - 薄膜形成方法 - Google Patents

薄膜形成方法

Info

Publication number
JPS6220869A
JPS6220869A JP15831585A JP15831585A JPS6220869A JP S6220869 A JPS6220869 A JP S6220869A JP 15831585 A JP15831585 A JP 15831585A JP 15831585 A JP15831585 A JP 15831585A JP S6220869 A JPS6220869 A JP S6220869A
Authority
JP
Japan
Prior art keywords
film
substrate
thin film
sputtering
roll
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15831585A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0323632B2 (esLanguage
Inventor
Masato Sugiyama
杉山　征人
Toshihiko Toda
敏彦 戸田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teijin Ltd filed Critical Teijin Ltd
Priority to JP15831585A priority Critical patent/JPS6220869A/ja
Publication of JPS6220869A publication Critical patent/JPS6220869A/ja
Publication of JPH0323632B2 publication Critical patent/JPH0323632B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP15831585A 1985-07-19 1985-07-19 薄膜形成方法 Granted JPS6220869A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15831585A JPS6220869A (ja) 1985-07-19 1985-07-19 薄膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15831585A JPS6220869A (ja) 1985-07-19 1985-07-19 薄膜形成方法

Publications (2)

Publication Number Publication Date
JPS6220869A true JPS6220869A (ja) 1987-01-29
JPH0323632B2 JPH0323632B2 (esLanguage) 1991-03-29

Family

ID=15668946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15831585A Granted JPS6220869A (ja) 1985-07-19 1985-07-19 薄膜形成方法

Country Status (1)

Country Link
JP (1) JPS6220869A (esLanguage)

Also Published As

Publication number Publication date
JPH0323632B2 (esLanguage) 1991-03-29

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