JPS62204355U - - Google Patents
Info
- Publication number
- JPS62204355U JPS62204355U JP9266486U JP9266486U JPS62204355U JP S62204355 U JPS62204355 U JP S62204355U JP 9266486 U JP9266486 U JP 9266486U JP 9266486 U JP9266486 U JP 9266486U JP S62204355 U JPS62204355 U JP S62204355U
- Authority
- JP
- Japan
- Prior art keywords
- field effect
- effect transistor
- mesa
- mes
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 2
- 230000005669 field effect Effects 0.000 claims 2
- 239000011810 insulating material Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Junction Field-Effect Transistors (AREA)
Description
第１図は本考案の一実施例の断面図、第２図ａ
〜ｃは本考案の一実施例の製造方法を説明する為
の工程順に示した半導体チツプの断面図である。
１…ＧａＡｓ基板、２…メサ部、３…絶縁膜、
４…外部取出し電極、５…ホトレジスト膜。
Figure 1 is a sectional view of an embodiment of the present invention, Figure 2a
-c are cross-sectional views of a semiconductor chip shown in order of steps for explaining a manufacturing method according to an embodiment of the present invention. 1... GaAs substrate, 2... Mesa part, 3... Insulating film,
4... External lead-out electrode, 5... Photoresist film.
Claims (1)
ブ層を有するＭＥＳ型電界効果トランジスタにお
いて、前記メサ部以外の部分は基板よりも低い誘
電率を有する絶縁物で埋められメサ部と同一平面
を形成していることを特徴とするＭＥＳ型電界効
果トランジスタ。 In an MES type field effect transistor having an active layer formed in a mesa shape on a GaAs substrate, a portion other than the mesa portion is filled with an insulating material having a lower dielectric constant than the substrate, and is flush with the mesa portion. A MES field effect transistor characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9266486U JPS62204355U (en) | 1986-06-17 | 1986-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9266486U JPS62204355U (en) | 1986-06-17 | 1986-06-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62204355U true JPS62204355U (en) | 1987-12-26 |
Family
ID=30954569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9266486U Pending JPS62204355U (en) | 1986-06-17 | 1986-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62204355U (en) |
-
1986
- 1986-06-17 JP JP9266486U patent/JPS62204355U/ja active Pending
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