JPS62202809A - 熱分解黒鉛の製造方法 - Google Patents
熱分解黒鉛の製造方法Info
- Publication number
- JPS62202809A JPS62202809A JP61045755A JP4575586A JPS62202809A JP S62202809 A JPS62202809 A JP S62202809A JP 61045755 A JP61045755 A JP 61045755A JP 4575586 A JP4575586 A JP 4575586A JP S62202809 A JPS62202809 A JP S62202809A
- Authority
- JP
- Japan
- Prior art keywords
- graphite
- argon gas
- benzene
- substrate
- anisotropy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 51
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 43
- 239000010439 graphite Substances 0.000 title claims abstract description 43
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 238000006243 chemical reaction Methods 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 8
- 229930195735 unsaturated hydrocarbon Natural products 0.000 claims abstract description 5
- 150000004945 aromatic hydrocarbons Chemical class 0.000 claims abstract description 4
- 230000008021 deposition Effects 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000007858 starting material Substances 0.000 claims description 4
- 239000004215 Carbon black (E152) Substances 0.000 claims description 3
- 229930195733 hydrocarbon Natural products 0.000 claims description 3
- 150000002430 hydrocarbons Chemical class 0.000 claims description 3
- 238000000197 pyrolysis Methods 0.000 claims description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 abstract description 42
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract description 20
- 229910052786 argon Inorganic materials 0.000 abstract description 10
- 239000007789 gas Substances 0.000 abstract description 10
- 230000000694 effects Effects 0.000 abstract description 5
- 238000010790 dilution Methods 0.000 abstract description 3
- 239000012895 dilution Substances 0.000 abstract description 3
- 239000011521 glass Substances 0.000 abstract description 3
- 229910052710 silicon Inorganic materials 0.000 abstract description 3
- 239000010703 silicon Substances 0.000 abstract description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 3
- 239000010409 thin film Substances 0.000 abstract description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 abstract description 2
- 239000005297 pyrex Substances 0.000 abstract description 2
- 239000010453 quartz Substances 0.000 abstract description 2
- 238000005292 vacuum distillation Methods 0.000 abstract description 2
- 125000003118 aryl group Chemical group 0.000 abstract 1
- 230000001276 controlling effect Effects 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 15
- 238000005516 engineering process Methods 0.000 description 7
- 238000000151 deposition Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012776 electronic material Substances 0.000 description 2
- 239000008204 material by function Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000006114 decarboxylation reaction Methods 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000006356 dehydrogenation reaction Methods 0.000 description 1
- 238000006704 dehydrohalogenation reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005755 formation reaction Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 229920005594 polymer fiber Polymers 0.000 description 1
- 235000011835 quiches Nutrition 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Landscapes
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
- Conductive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61045755A JPS62202809A (ja) | 1986-02-28 | 1986-02-28 | 熱分解黒鉛の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61045755A JPS62202809A (ja) | 1986-02-28 | 1986-02-28 | 熱分解黒鉛の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62202809A true JPS62202809A (ja) | 1987-09-07 |
| JPH048367B2 JPH048367B2 (enrdf_load_stackoverflow) | 1992-02-14 |
Family
ID=12728112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61045755A Granted JPS62202809A (ja) | 1986-02-28 | 1986-02-28 | 熱分解黒鉛の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62202809A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008540316A (ja) * | 2005-05-13 | 2008-11-20 | クリー インコーポレイテッド | 炭化ケイ素結晶の作製方法および装置 |
| JP2011187675A (ja) * | 2010-03-09 | 2011-09-22 | Mitsubishi Electric Corp | 炭化珪素半導体装置の製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59232904A (ja) * | 1983-06-14 | 1984-12-27 | Agency Of Ind Science & Technol | 導電性薄膜の製造方法 |
| JPS6037045A (ja) * | 1983-08-09 | 1985-02-26 | Ricoh Co Ltd | 情報記憶装置 |
-
1986
- 1986-02-28 JP JP61045755A patent/JPS62202809A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59232904A (ja) * | 1983-06-14 | 1984-12-27 | Agency Of Ind Science & Technol | 導電性薄膜の製造方法 |
| JPS6037045A (ja) * | 1983-08-09 | 1985-02-26 | Ricoh Co Ltd | 情報記憶装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008540316A (ja) * | 2005-05-13 | 2008-11-20 | クリー インコーポレイテッド | 炭化ケイ素結晶の作製方法および装置 |
| JP2011187675A (ja) * | 2010-03-09 | 2011-09-22 | Mitsubishi Electric Corp | 炭化珪素半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH048367B2 (enrdf_load_stackoverflow) | 1992-02-14 |
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