JPS62202809A - 熱分解黒鉛の製造方法 - Google Patents

熱分解黒鉛の製造方法

Info

Publication number
JPS62202809A
JPS62202809A JP61045755A JP4575586A JPS62202809A JP S62202809 A JPS62202809 A JP S62202809A JP 61045755 A JP61045755 A JP 61045755A JP 4575586 A JP4575586 A JP 4575586A JP S62202809 A JPS62202809 A JP S62202809A
Authority
JP
Japan
Prior art keywords
graphite
pyrolytic graphite
anisotropy
hydrocarbon
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61045755A
Other languages
English (en)
Japanese (ja)
Other versions
JPH048367B2 (cs
Inventor
Yoshikazu Yoshimoto
好本　芳和
Tomonari Suzuki
鈴木　友成
Yoshiyuki Tougaki
良之 東垣
Shigeo Nakajima
中島　重夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP61045755A priority Critical patent/JPS62202809A/ja
Publication of JPS62202809A publication Critical patent/JPS62202809A/ja
Publication of JPH048367B2 publication Critical patent/JPH048367B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Conductive Materials (AREA)
JP61045755A 1986-02-28 1986-02-28 熱分解黒鉛の製造方法 Granted JPS62202809A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61045755A JPS62202809A (ja) 1986-02-28 1986-02-28 熱分解黒鉛の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61045755A JPS62202809A (ja) 1986-02-28 1986-02-28 熱分解黒鉛の製造方法

Publications (2)

Publication Number Publication Date
JPS62202809A true JPS62202809A (ja) 1987-09-07
JPH048367B2 JPH048367B2 (cs) 1992-02-14

Family

ID=12728112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61045755A Granted JPS62202809A (ja) 1986-02-28 1986-02-28 熱分解黒鉛の製造方法

Country Status (1)

Country Link
JP (1) JPS62202809A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008540316A (ja) * 2005-05-13 2008-11-20 クリー インコーポレイテッド 炭化ケイ素結晶の作製方法および装置
JP2011187675A (ja) * 2010-03-09 2011-09-22 Mitsubishi Electric Corp 炭化珪素半導体装置の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59232904A (ja) * 1983-06-14 1984-12-27 Agency Of Ind Science & Technol 導電性薄膜の製造方法
JPS6037045A (ja) * 1983-08-09 1985-02-26 Ricoh Co Ltd 情報記憶装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59232904A (ja) * 1983-06-14 1984-12-27 Agency Of Ind Science & Technol 導電性薄膜の製造方法
JPS6037045A (ja) * 1983-08-09 1985-02-26 Ricoh Co Ltd 情報記憶装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008540316A (ja) * 2005-05-13 2008-11-20 クリー インコーポレイテッド 炭化ケイ素結晶の作製方法および装置
JP2011187675A (ja) * 2010-03-09 2011-09-22 Mitsubishi Electric Corp 炭化珪素半導体装置の製造方法

Also Published As

Publication number Publication date
JPH048367B2 (cs) 1992-02-14

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