JPS62202809A - 熱分解黒鉛の製造方法 - Google Patents
熱分解黒鉛の製造方法Info
- Publication number
- JPS62202809A JPS62202809A JP61045755A JP4575586A JPS62202809A JP S62202809 A JPS62202809 A JP S62202809A JP 61045755 A JP61045755 A JP 61045755A JP 4575586 A JP4575586 A JP 4575586A JP S62202809 A JPS62202809 A JP S62202809A
- Authority
- JP
- Japan
- Prior art keywords
- graphite
- pyrolytic graphite
- anisotropy
- hydrocarbon
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
- Conductive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61045755A JPS62202809A (ja) | 1986-02-28 | 1986-02-28 | 熱分解黒鉛の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61045755A JPS62202809A (ja) | 1986-02-28 | 1986-02-28 | 熱分解黒鉛の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62202809A true JPS62202809A (ja) | 1987-09-07 |
JPH048367B2 JPH048367B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-02-14 |
Family
ID=12728112
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61045755A Granted JPS62202809A (ja) | 1986-02-28 | 1986-02-28 | 熱分解黒鉛の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62202809A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008540316A (ja) * | 2005-05-13 | 2008-11-20 | クリー インコーポレイテッド | 炭化ケイ素結晶の作製方法および装置 |
JP2011187675A (ja) * | 2010-03-09 | 2011-09-22 | Mitsubishi Electric Corp | 炭化珪素半導体装置の製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59232904A (ja) * | 1983-06-14 | 1984-12-27 | Agency Of Ind Science & Technol | 導電性薄膜の製造方法 |
JPS6037045A (ja) * | 1983-08-09 | 1985-02-26 | Ricoh Co Ltd | 情報記憶装置 |
-
1986
- 1986-02-28 JP JP61045755A patent/JPS62202809A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59232904A (ja) * | 1983-06-14 | 1984-12-27 | Agency Of Ind Science & Technol | 導電性薄膜の製造方法 |
JPS6037045A (ja) * | 1983-08-09 | 1985-02-26 | Ricoh Co Ltd | 情報記憶装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008540316A (ja) * | 2005-05-13 | 2008-11-20 | クリー インコーポレイテッド | 炭化ケイ素結晶の作製方法および装置 |
JP2011187675A (ja) * | 2010-03-09 | 2011-09-22 | Mitsubishi Electric Corp | 炭化珪素半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH048367B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-02-14 |
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