JPS6219983B2 - - Google Patents
Info
- Publication number
- JPS6219983B2 JPS6219983B2 JP52106375A JP10637577A JPS6219983B2 JP S6219983 B2 JPS6219983 B2 JP S6219983B2 JP 52106375 A JP52106375 A JP 52106375A JP 10637577 A JP10637577 A JP 10637577A JP S6219983 B2 JPS6219983 B2 JP S6219983B2
- Authority
- JP
- Japan
- Prior art keywords
- support frame
- lapping
- plate
- planetary
- machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007246 mechanism Effects 0.000 claims description 46
- 238000000034 method Methods 0.000 claims description 7
- 238000003754 machining Methods 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 8
- 238000005498 polishing Methods 0.000 description 8
- 230000033001 locomotion Effects 0.000 description 5
- 230000009467 reduction Effects 0.000 description 5
- 230000002441 reversible effect Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000013598 vector Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10637577A JPS5440391A (en) | 1977-09-06 | 1977-09-06 | Method of lapping group of work pieces and planetary lapping machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10637577A JPS5440391A (en) | 1977-09-06 | 1977-09-06 | Method of lapping group of work pieces and planetary lapping machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5440391A JPS5440391A (en) | 1979-03-29 |
| JPS6219983B2 true JPS6219983B2 (fr) | 1987-05-01 |
Family
ID=14431960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10637577A Granted JPS5440391A (en) | 1977-09-06 | 1977-09-06 | Method of lapping group of work pieces and planetary lapping machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5440391A (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3262808B2 (ja) * | 1998-08-20 | 2002-03-04 | 浜井産業株式会社 | 遊星歯車方式平行平面加工盤 |
| JP2007152499A (ja) * | 2005-12-06 | 2007-06-21 | Fujikoshi Mach Corp | ワーク研磨方法 |
| JP5245319B2 (ja) * | 2007-08-09 | 2013-07-24 | 富士通株式会社 | 研磨装置及び研磨方法、基板及び電子機器の製造方法 |
| JP6498891B2 (ja) * | 2014-09-04 | 2019-04-10 | 株式会社池上精機 | 研磨方法及び研磨装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS526197A (en) * | 1975-07-02 | 1977-01-18 | Kotobuki Kiko Kk | Surface lap planing equipment |
| JPS5290893A (en) * | 1976-01-24 | 1977-07-30 | Hamai Sangyo | Fourrdirectional lapping machine utilizing fluid bearing |
-
1977
- 1977-09-06 JP JP10637577A patent/JPS5440391A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS526197A (en) * | 1975-07-02 | 1977-01-18 | Kotobuki Kiko Kk | Surface lap planing equipment |
| JPS5290893A (en) * | 1976-01-24 | 1977-07-30 | Hamai Sangyo | Fourrdirectional lapping machine utilizing fluid bearing |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5440391A (en) | 1979-03-29 |
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