JPS5290893A - Fourrdirectional lapping machine utilizing fluid bearing - Google Patents

Fourrdirectional lapping machine utilizing fluid bearing

Info

Publication number
JPS5290893A
JPS5290893A JP637376A JP637376A JPS5290893A JP S5290893 A JPS5290893 A JP S5290893A JP 637376 A JP637376 A JP 637376A JP 637376 A JP637376 A JP 637376A JP S5290893 A JPS5290893 A JP S5290893A
Authority
JP
Japan
Prior art keywords
fourrdirectional
fluid bearing
lapping machine
machine utilizing
utilizing fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP637376A
Other languages
Japanese (ja)
Other versions
JPS6047066B2 (en
Inventor
Yasuo Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamai Co Ltd
Original Assignee
Hamai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamai Co Ltd filed Critical Hamai Co Ltd
Priority to JP51006373A priority Critical patent/JPS6047066B2/en
Publication of JPS5290893A publication Critical patent/JPS5290893A/en
Publication of JPS6047066B2 publication Critical patent/JPS6047066B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP51006373A 1976-01-24 1976-01-24 4-way lap board Expired JPS6047066B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51006373A JPS6047066B2 (en) 1976-01-24 1976-01-24 4-way lap board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51006373A JPS6047066B2 (en) 1976-01-24 1976-01-24 4-way lap board

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP12871479A Division JPS55125977A (en) 1979-10-04 1979-10-04 4-direction lapping machine

Publications (2)

Publication Number Publication Date
JPS5290893A true JPS5290893A (en) 1977-07-30
JPS6047066B2 JPS6047066B2 (en) 1985-10-19

Family

ID=11636560

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51006373A Expired JPS6047066B2 (en) 1976-01-24 1976-01-24 4-way lap board

Country Status (1)

Country Link
JP (1) JPS6047066B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5440391A (en) * 1977-09-06 1979-03-29 Mo Buisushiee Tekhn Uchiritsus Method of lapping group of work pieces and planetary lapping machine
JPS58196967A (en) * 1982-05-11 1983-11-16 Hitachi Ltd Polishing of both surfaces of wafer
JPS59109447U (en) * 1983-01-06 1984-07-24 ホ−ヤ株式会社 Double-sided processing equipment
JPH03264262A (en) * 1990-03-14 1991-11-25 Kyushu Electron Metal Co Ltd Lapping machine for precisely polishing double surface
JPH09123058A (en) * 1995-10-27 1997-05-13 Hamai Sangyo Kk Superprecision lapping machine

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4890287U (en) * 1972-01-17 1973-10-30

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4890287U (en) * 1972-01-17 1973-10-30

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5440391A (en) * 1977-09-06 1979-03-29 Mo Buisushiee Tekhn Uchiritsus Method of lapping group of work pieces and planetary lapping machine
JPS6219983B2 (en) * 1977-09-06 1987-05-01 Mosuko* Bisushee Tech Uchiritsushe Imeni Enu Ii Baumana
JPS58196967A (en) * 1982-05-11 1983-11-16 Hitachi Ltd Polishing of both surfaces of wafer
JPS59109447U (en) * 1983-01-06 1984-07-24 ホ−ヤ株式会社 Double-sided processing equipment
JPS639407Y2 (en) * 1983-01-06 1988-03-19
JPH03264262A (en) * 1990-03-14 1991-11-25 Kyushu Electron Metal Co Ltd Lapping machine for precisely polishing double surface
JPH0755448B2 (en) * 1990-03-14 1995-06-14 九州電子金属株式会社 Double-sided precision lapping machine
JPH09123058A (en) * 1995-10-27 1997-05-13 Hamai Sangyo Kk Superprecision lapping machine

Also Published As

Publication number Publication date
JPS6047066B2 (en) 1985-10-19

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