JPS5290893A - Fourrdirectional lapping machine utilizing fluid bearing - Google Patents
Fourrdirectional lapping machine utilizing fluid bearingInfo
- Publication number
- JPS5290893A JPS5290893A JP637376A JP637376A JPS5290893A JP S5290893 A JPS5290893 A JP S5290893A JP 637376 A JP637376 A JP 637376A JP 637376 A JP637376 A JP 637376A JP S5290893 A JPS5290893 A JP S5290893A
- Authority
- JP
- Japan
- Prior art keywords
- fourrdirectional
- fluid bearing
- lapping machine
- machine utilizing
- utilizing fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 title 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51006373A JPS6047066B2 (en) | 1976-01-24 | 1976-01-24 | 4-way lap board |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51006373A JPS6047066B2 (en) | 1976-01-24 | 1976-01-24 | 4-way lap board |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12871479A Division JPS55125977A (en) | 1979-10-04 | 1979-10-04 | 4-direction lapping machine |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5290893A true JPS5290893A (en) | 1977-07-30 |
JPS6047066B2 JPS6047066B2 (en) | 1985-10-19 |
Family
ID=11636560
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51006373A Expired JPS6047066B2 (en) | 1976-01-24 | 1976-01-24 | 4-way lap board |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6047066B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5440391A (en) * | 1977-09-06 | 1979-03-29 | Mo Buisushiee Tekhn Uchiritsus | Method of lapping group of work pieces and planetary lapping machine |
JPS58196967A (en) * | 1982-05-11 | 1983-11-16 | Hitachi Ltd | Polishing of both surfaces of wafer |
JPS59109447U (en) * | 1983-01-06 | 1984-07-24 | ホ−ヤ株式会社 | Double-sided processing equipment |
JPH03264262A (en) * | 1990-03-14 | 1991-11-25 | Kyushu Electron Metal Co Ltd | Lapping machine for precisely polishing double surface |
JPH09123058A (en) * | 1995-10-27 | 1997-05-13 | Hamai Sangyo Kk | Superprecision lapping machine |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4890287U (en) * | 1972-01-17 | 1973-10-30 |
-
1976
- 1976-01-24 JP JP51006373A patent/JPS6047066B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4890287U (en) * | 1972-01-17 | 1973-10-30 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5440391A (en) * | 1977-09-06 | 1979-03-29 | Mo Buisushiee Tekhn Uchiritsus | Method of lapping group of work pieces and planetary lapping machine |
JPS6219983B2 (en) * | 1977-09-06 | 1987-05-01 | Mosuko* Bisushee Tech Uchiritsushe Imeni Enu Ii Baumana | |
JPS58196967A (en) * | 1982-05-11 | 1983-11-16 | Hitachi Ltd | Polishing of both surfaces of wafer |
JPS59109447U (en) * | 1983-01-06 | 1984-07-24 | ホ−ヤ株式会社 | Double-sided processing equipment |
JPS639407Y2 (en) * | 1983-01-06 | 1988-03-19 | ||
JPH03264262A (en) * | 1990-03-14 | 1991-11-25 | Kyushu Electron Metal Co Ltd | Lapping machine for precisely polishing double surface |
JPH0755448B2 (en) * | 1990-03-14 | 1995-06-14 | 九州電子金属株式会社 | Double-sided precision lapping machine |
JPH09123058A (en) * | 1995-10-27 | 1997-05-13 | Hamai Sangyo Kk | Superprecision lapping machine |
Also Published As
Publication number | Publication date |
---|---|
JPS6047066B2 (en) | 1985-10-19 |
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