JPS6047066B2 - 4-way lap board - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION An object of the present invention is to freely control the rotational speed and rotational ratio of each part that performs lapping work depending on the size, shape, material, etc. of the material to be lapped in a four-way lapping machine. The object of the present invention is to provide a lapping machine that is far more efficient and accurate than conventional lapping machines and is less likely to damage the workpiece by providing optimal lapping conditions to the workpiece.

The gist of the present invention, particularly proposed to achieve the above object, is that the rotational speed can be freely controlled for each of the upper lap plate, lower lap plate, and center gear international gear in a four-way lapping machine. By providing separate drive sources and centrally controlling these drive sources, the rotation ratio of each member can be freely controlled.

In recent years, the number of parts that require highly accurate parallel planes has increased, and lapping machines have rapidly advanced. For example, a method of increasing the rotation speed of the lap plate, a method of rotating the upper and lower lap plates and driving the carrier with a central gear, a method of increasing the rotation speed of the upper and lower lap plates,
Rotating both the center gear and internal gear 4
directional wrapping methods, etc. However, with these modified machines, it is impossible to increase the precision beyond that of the mother machine, and the current situation is that the accuracy is actually reduced as the lap speed increases.

What all of the above examples of high efficiency have in common is that in order to lengthen the lap length per unit time, the overall rotational speed of the lap plate was simply increased without modifying the mechanism, and as a result, the workpiece The main reason is that the wafer does not follow the lap plate, resulting in a decrease in accuracy. Such defects are eliminated by the configuration of the present invention, and it becomes possible to set the optimum lapping speed and rotation ratio, ie, lapping conditions, for all workpieces.

That is, the present invention provides a method for controlling the respective rotational speeds of upper and lower lap plates that rotate horizontally, a carrier that rotates horizontally between the upper and lower lap plates, and a central gear and internal gear that rotate the carrier. A drive source that can be freely controlled is provided to set various rotation speeds depending on the size, shape, material, etc. of the material to be lapped, and the rotation ratio of each part can also be changed and controlled at the same time, resulting in high speed and high precision. This is a lapping machine that can perform lapping processing with less breakage and damage to the workpiece. Next, it will be explained in detail based on the drawings.

The drawing is a schematic side view of a flat four-way lapping machine. As shown in the figure, there is a carrier 4 between an upper lap plate 2 and a lower lap plate 3 which are rotated by an upper lap plate drive unit 1. A central gear 5 is provided on the inside and an internal gear 6 is provided on the outside to rotate the shaft.

Further, above the upper lap plate 2 is a known pressure mechanism 7 using, for example, a spring, and below the lower lap plate 3 is a rotary bearing mechanism 8 for maintaining the horizontal rotation of the upper and lower lap plates 2 and 3.
will be provided. This bearing mechanism 8 has an annular frame 10 having a rectangular cross section, which has cam-shaped recesses 9 intermittently bored on the bottom surface of the lower lap plate 3, and attaches the annular frame 10 to the annular oil tank having a horizontal bottom 11. When the annular frame 10 is rotated by the lower lap plate 3, the annular frame 10 floats against the load from above mainly due to the resistance of the oil 13 flowing into the cam-shaped recess 9. do. Therefore, during the lapping operation, the horizontal rotation of the lower lapping plate 3, carrier 4, upper lapping plate 2, etc. is maintained. As for the drive system, the center gear 5, lower lap plate 3, internal gear 6, and upper lap plate 2 are connected to respective drive sources M1, M2, M3, and M4 via one-way clutches 14.

As the drive sources M1 to M4, known variable speed motors such as DC servo motors, inverter motors, and hydraulic motors, which can freely change the rotation speed, are used. Operations are instructed from a centralized control panel 15 in which the respective operating mechanisms are assembled. The improved conventional lapping machine as mentioned above has upper and lower lapping plates, a center gear, an internal gear, etc. One drive source is used for driving the rotary member, and each rotating member is rotated from the drive source via a belt, gears, etc.

However, with such a configuration, the rotation ratio between each rotating member is fixed, so if something happens. If you try to change this, it will be necessary to install a transmission mechanism such as replacing gears and replacing belts.

However, installing such a transmission mechanism is mechanically complex, the structure of the lapping machine itself becomes too large, there are restrictions on the range of transmission, and the cost is too high compared to the degree of performance improvement. This has not been realized for the following reasons. Of course, when the workpiece is made of metal material, due to its rigidity,
Although it is possible to increase the speed to some extent using the conventional equipment described above, when the workpiece is made of hard and brittle materials such as ceramics or silicon wafers, and the thickness of the workpiece becomes extremely thin, the rotation ratio cannot be fixed. If you simply increase the speed while the
Workpiece breakage rate increases.

Therefore, if it is possible to always set appropriate lapping conditions according to the size, shape, material, surface roughness, etc. of the workpiece, the demands for high speed, high precision, and reduced breakage rate can be met. It should be possible to do so.

The present invention eliminates the fixation of the rotation ratio by providing separate drive sources for the upper and lower lap plates, the center gear, and the internal gear that can freely change their rotation speeds, thereby always maintaining appropriate lapping conditions for the workpiece. It is made so that it can be given. Furthermore, in the present invention, the operation of each of the drive sources mentioned above is centrally controlled by a central control panel, which is not only useful for simultaneous starting and stopping, but also for lapping while always maintaining optimal lapping conditions. is an essential requirement for implementation.

As mentioned above, the shape, material, etc. of the workpiece vary widely, and different lapping conditions are required for each workpiece.

In this case, lapping is performed by setting the rotation speed and rotation ratio that are known empirically in advance, but strictly speaking, the properties of the workpiece are considered to be different for each individual workpiece, so it is necessary to find the appropriate lapping conditions that are the greatest common divisor. In order to operate the entire lapping machine smoothly, the rotational speed and rotation ratio of the lapping plates and the lapping plate and the carrier must be mutually adjusted while checking the rotational status of each, and the lapping conditions as a whole must be matched. It is necessary to do so. The same applies when the lapping plate is operated at an increased speed during the lapping operation or when the lapping conditions are changed to correct a flat or curved surface.

Wrap condition settings can always be changed using the center gear of the upper and lower lap plates.
Since it is related to the rotational speed and rotational ratio of the internal gear, it is necessary to centrally control operations such as increasing the speed of the lap plate, changing gears, and changing the rotational ratio while adjusting the rotational speed and rotational ratio of the internal gear. As described above, the present invention can always set appropriate lapping conditions for various types of workpieces, and can also freely change the lapping conditions depending on the degree of lapping even during lapping operation, so it can be used for workpieces made of hard and brittle materials. This is a new and useful lapping machine that enables high-speed, highly efficient lapping with less damage to the workpiece.

[Brief explanation of the drawing]

The drawing is a schematic side view showing an outline of the lapping machine of the present invention. In the figure, the reference numeral 1 indicates the upper lap plate drive unit 2, and the upper lap plate 3.
The lower lap plate 4 is the carrier 5, the center gear 6 is the internal gear 7, the upper lap plate is the pressure mechanism 8, the rotary bearing mechanism 9 is the cam-shaped recess 10, the annular frame 11 is the annular oil tank 12, the horizontal bottom 12 is the annular oil tank 13 is oil 14 is one-way clutch 15
is a centralized control panel Ml, M2, M3, and M4 are drive sources.

Claims (1)

[Claims] 1 In a four-way lap machine consisting of upper and lower lap plates that rotate horizontally, a carrier that rotates horizontally between the upper and lower lap plates, and a center gear and an internal gear that drive the carrier, the upper and lower lap plates, the center gear internal The gears are driven by separate drive sources that can freely control their respective rotation speeds, and are equipped with a centralized control panel that centrally controls each drive source and freely changes the rotation ratio of each gear. This is a 4-way lapping machine.