JPS62199030A - 半導体ウエハ−の処理装置 - Google Patents

半導体ウエハ−の処理装置

Info

Publication number
JPS62199030A
JPS62199030A JP4312886A JP4312886A JPS62199030A JP S62199030 A JPS62199030 A JP S62199030A JP 4312886 A JP4312886 A JP 4312886A JP 4312886 A JP4312886 A JP 4312886A JP S62199030 A JPS62199030 A JP S62199030A
Authority
JP
Japan
Prior art keywords
wafer
base
semiconductor wafer
mounting table
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4312886A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0553062B2 (enrdf_load_stackoverflow
Inventor
Shinji Fujiki
藤木　慎二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP4312886A priority Critical patent/JPS62199030A/ja
Publication of JPS62199030A publication Critical patent/JPS62199030A/ja
Publication of JPH0553062B2 publication Critical patent/JPH0553062B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Jigs For Machine Tools (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP4312886A 1986-02-27 1986-02-27 半導体ウエハ−の処理装置 Granted JPS62199030A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4312886A JPS62199030A (ja) 1986-02-27 1986-02-27 半導体ウエハ−の処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4312886A JPS62199030A (ja) 1986-02-27 1986-02-27 半導体ウエハ−の処理装置

Publications (2)

Publication Number Publication Date
JPS62199030A true JPS62199030A (ja) 1987-09-02
JPH0553062B2 JPH0553062B2 (enrdf_load_stackoverflow) 1993-08-09

Family

ID=12655203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4312886A Granted JPS62199030A (ja) 1986-02-27 1986-02-27 半導体ウエハ−の処理装置

Country Status (1)

Country Link
JP (1) JPS62199030A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006075356A1 (ja) 2005-01-11 2006-07-20 Mitsubishi Denki Kabushiki Kaisha 半導体製造装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006075356A1 (ja) 2005-01-11 2006-07-20 Mitsubishi Denki Kabushiki Kaisha 半導体製造装置
JPWO2006075356A1 (ja) * 2005-01-11 2008-06-12 三菱電機株式会社 半導体製造装置
JP4611292B2 (ja) * 2005-01-11 2011-01-12 三菱電機株式会社 半導体製造装置
US8696816B2 (en) 2005-01-11 2014-04-15 Mitsubishi Electric Corporation Semiconductor manufacturing apparatus

Also Published As

Publication number Publication date
JPH0553062B2 (enrdf_load_stackoverflow) 1993-08-09

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Legal Events

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