JPS62198044A - 電子線照射装置 - Google Patents
電子線照射装置Info
- Publication number
- JPS62198044A JPS62198044A JP61039846A JP3984686A JPS62198044A JP S62198044 A JPS62198044 A JP S62198044A JP 61039846 A JP61039846 A JP 61039846A JP 3984686 A JP3984686 A JP 3984686A JP S62198044 A JPS62198044 A JP S62198044A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic flux
- electron beam
- yoke
- leakage magnetic
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 title claims abstract description 36
- 230000004907 flux Effects 0.000 claims abstract description 31
- 230000035699 permeability Effects 0.000 claims abstract description 14
- 239000000463 material Substances 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract 1
- 230000005684 electric field Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000006249 magnetic particle Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61039846A JPS62198044A (ja) | 1986-02-24 | 1986-02-24 | 電子線照射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61039846A JPS62198044A (ja) | 1986-02-24 | 1986-02-24 | 電子線照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62198044A true JPS62198044A (ja) | 1987-09-01 |
| JPH0565969B2 JPH0565969B2 (enrdf_load_stackoverflow) | 1993-09-20 |
Family
ID=12564326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61039846A Granted JPS62198044A (ja) | 1986-02-24 | 1986-02-24 | 電子線照射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62198044A (enrdf_load_stackoverflow) |
-
1986
- 1986-02-24 JP JP61039846A patent/JPS62198044A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0565969B2 (enrdf_load_stackoverflow) | 1993-09-20 |
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