JPS62196346U - - Google Patents
Info
- Publication number
- JPS62196346U JPS62196346U JP8253386U JP8253386U JPS62196346U JP S62196346 U JPS62196346 U JP S62196346U JP 8253386 U JP8253386 U JP 8253386U JP 8253386 U JP8253386 U JP 8253386U JP S62196346 U JPS62196346 U JP S62196346U
- Authority
- JP
- Japan
- Prior art keywords
- light
- hole
- inert gas
- cover
- ultraviolet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011261 inert gas Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 239000000853 adhesive Substances 0.000 claims 2
- 230000001070 adhesive effect Effects 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 1
Landscapes
- Adhesives Or Adhesive Processes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8253386U JPS62196346U (enExample) | 1986-06-02 | 1986-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8253386U JPS62196346U (enExample) | 1986-06-02 | 1986-06-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62196346U true JPS62196346U (enExample) | 1987-12-14 |
Family
ID=30935280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8253386U Pending JPS62196346U (enExample) | 1986-06-02 | 1986-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62196346U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01308045A (ja) * | 1988-06-06 | 1989-12-12 | Nitto Denko Corp | 半導体ウエハの処理システム |
-
1986
- 1986-06-02 JP JP8253386U patent/JPS62196346U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01308045A (ja) * | 1988-06-06 | 1989-12-12 | Nitto Denko Corp | 半導体ウエハの処理システム |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI330395B (en) | Substrate transfer method and substrate transfer apparatus | |
| KR870009445A (ko) | 반도체 제조장치 | |
| KR102153174B1 (ko) | 노광 장치, 기판 처리 장치, 노광 방법 및 기판 처리 방법 | |
| JPS62196346U (enExample) | ||
| JP2000340641A5 (enExample) | ||
| JPH11251788A (ja) | チップ部品供給装置 | |
| US4984017A (en) | Vacuum contact type printing machine and method of contact therefor | |
| JPS5680141A (en) | Manufacture device of semiconductor | |
| IL132707A0 (en) | Device for drying substrates | |
| JPS62194739U (enExample) | ||
| JPS63119242U (enExample) | ||
| JPH0184428U (enExample) | ||
| JPH0241437U (enExample) | ||
| JPS6464334A (en) | Apparatus for mounting semiconductor wafer | |
| JPH02113331U (enExample) | ||
| JPS5786162A (en) | Tape loading device | |
| DK1063892T3 (da) | Fremföringsindretning til dejkugler | |
| JPS63119243U (enExample) | ||
| JPS62194741U (enExample) | ||
| JPS6339483B2 (enExample) | ||
| JPS63210921A (ja) | 原稿押え装置 | |
| JPH03118931U (enExample) | ||
| JPH0395550U (enExample) | ||
| JPS6481724A (en) | Automatic setting device for thin plate | |
| JP3484301B2 (ja) | 半導体ウエハの保管方法および収容装置 |