JPS61100132U - - Google Patents
Info
- Publication number
- JPS61100132U JPS61100132U JP18549184U JP18549184U JPS61100132U JP S61100132 U JPS61100132 U JP S61100132U JP 18549184 U JP18549184 U JP 18549184U JP 18549184 U JP18549184 U JP 18549184U JP S61100132 U JPS61100132 U JP S61100132U
- Authority
- JP
- Japan
- Prior art keywords
- path
- wafer
- chuck
- take
- semiconductor manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000006185 dispersion Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 8
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000000376 reactant Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18549184U JPS61100132U (enExample) | 1984-12-06 | 1984-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18549184U JPS61100132U (enExample) | 1984-12-06 | 1984-12-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61100132U true JPS61100132U (enExample) | 1986-06-26 |
Family
ID=30742960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18549184U Pending JPS61100132U (enExample) | 1984-12-06 | 1984-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61100132U (enExample) |
-
1984
- 1984-12-06 JP JP18549184U patent/JPS61100132U/ja active Pending
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