JPS63167414U - - Google Patents

Info

Publication number
JPS63167414U
JPS63167414U JP5995387U JP5995387U JPS63167414U JP S63167414 U JPS63167414 U JP S63167414U JP 5995387 U JP5995387 U JP 5995387U JP 5995387 U JP5995387 U JP 5995387U JP S63167414 U JPS63167414 U JP S63167414U
Authority
JP
Japan
Prior art keywords
cassette
wafer
wafers
stores
stacked
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5995387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5995387U priority Critical patent/JPS63167414U/ja
Publication of JPS63167414U publication Critical patent/JPS63167414U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP5995387U 1987-04-22 1987-04-22 Pending JPS63167414U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5995387U JPS63167414U (enExample) 1987-04-22 1987-04-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5995387U JPS63167414U (enExample) 1987-04-22 1987-04-22

Publications (1)

Publication Number Publication Date
JPS63167414U true JPS63167414U (enExample) 1988-11-01

Family

ID=30891937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5995387U Pending JPS63167414U (enExample) 1987-04-22 1987-04-22

Country Status (1)

Country Link
JP (1) JPS63167414U (enExample)

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