JPS62194142A - クリ−ンル−ム - Google Patents
クリ−ンル−ムInfo
- Publication number
- JPS62194142A JPS62194142A JP61035541A JP3554186A JPS62194142A JP S62194142 A JPS62194142 A JP S62194142A JP 61035541 A JP61035541 A JP 61035541A JP 3554186 A JP3554186 A JP 3554186A JP S62194142 A JPS62194142 A JP S62194142A
- Authority
- JP
- Japan
- Prior art keywords
- floor
- area
- fixed
- clean
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61035541A JPS62194142A (ja) | 1986-02-20 | 1986-02-20 | クリ−ンル−ム |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61035541A JPS62194142A (ja) | 1986-02-20 | 1986-02-20 | クリ−ンル−ム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62194142A true JPS62194142A (ja) | 1987-08-26 |
JPH0559331B2 JPH0559331B2 (enrdf_load_stackoverflow) | 1993-08-30 |
Family
ID=12444590
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61035541A Granted JPS62194142A (ja) | 1986-02-20 | 1986-02-20 | クリ−ンル−ム |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62194142A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5681219A (en) * | 1995-03-28 | 1997-10-28 | Advanced Micro Devices | Exhaust shroud and skirt apparatus and method |
JP2008162339A (ja) * | 2006-12-27 | 2008-07-17 | Kumi Kasei Kk | 車両用アシストグリップ |
JP2013200129A (ja) * | 2012-03-23 | 2013-10-03 | Seiko Epson Corp | 部品搬送装置及び部品検査装置 |
-
1986
- 1986-02-20 JP JP61035541A patent/JPS62194142A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5681219A (en) * | 1995-03-28 | 1997-10-28 | Advanced Micro Devices | Exhaust shroud and skirt apparatus and method |
JP2008162339A (ja) * | 2006-12-27 | 2008-07-17 | Kumi Kasei Kk | 車両用アシストグリップ |
JP2013200129A (ja) * | 2012-03-23 | 2013-10-03 | Seiko Epson Corp | 部品搬送装置及び部品検査装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0559331B2 (enrdf_load_stackoverflow) | 1993-08-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100592208B1 (ko) | 클린 벤치 | |
JPH10277339A (ja) | クリーンルームのファンフィルタユニット | |
JPS62194142A (ja) | クリ−ンル−ム | |
JPS62194141A (ja) | クリ−ンル−ム | |
JP2551923Y2 (ja) | クリーンルーム | |
JPH10259938A (ja) | 半導体装置生産用クリーンルーム | |
JPS62147249A (ja) | クリ−ンル−ム | |
JPS6142792Y2 (enrdf_load_stackoverflow) | ||
JPH06178907A (ja) | クリーンベンチ及びその配列構造 | |
JPH068695B2 (ja) | クリ−ンル−ム | |
JP2003214668A (ja) | クリーンルーム | |
JPS61168735A (ja) | クリ−ンル−ム | |
JPH022605B2 (enrdf_load_stackoverflow) | ||
JPS62147248A (ja) | 清浄作業室 | |
JPS62134431A (ja) | クリ−ンル−ム | |
JP3420722B2 (ja) | 局所空気清浄装置 | |
JPH0416099Y2 (enrdf_load_stackoverflow) | ||
JPS62147250A (ja) | クリ−ンル−ム | |
JPH0544663Y2 (enrdf_load_stackoverflow) | ||
JPH058342B2 (enrdf_load_stackoverflow) | ||
JPS62288431A (ja) | 防振基礎用ステ−ジ | |
JPS6266039A (ja) | 清浄作業室設備 | |
JPS61168736A (ja) | クリ−ンル−ム | |
JPS62158933A (ja) | 移動式クリ−ンル−ム作業台 | |
JPH029321Y2 (enrdf_load_stackoverflow) |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |