JPS62194142A - Clean room - Google Patents

Abstract

PURPOSE:To reduce the influence of dust generation and increase the manufacturing yield of LSI by a method wherein the fixed floor of a passageway area in a clean room is aranged at the lower position of the fixed floor of an equipment area while openings are provided between the fixed floors. CONSTITUTION:The floors of the equipment area A and the passageway area C of the clean room or the floors near a working room 10 are formed by the fixed floors 7a, 7b made of concrete. The fixed floor 7b is arranged at the lower position of the fixed floors 7a by a predetermined sie. Openings 21 for discharging air are formed between the fixed floors 7a, 7b. The fixed floors 7a, on which manufacturing equipments 12 are arranged, are positioned at a higher position of the fixed floor 7b of the passageway area C, therefore, the invasion of dust, generated from a worker 14 or the fixed floor 7b, may be prevented. Further, the fixed floors 7a are separated from the fixed floor 7b whereby the vibration of the fixed floors 7a, generated by the walking of the woker 14, will never be caused and the yield of LSI or the like, manufactured by the manufacturing equipments 12, may be increased.

Description

DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Use" The present invention relates to a clean room used in the field of manufacturing VLSIs, ICs, etc.

"Prior Art" As a conventional clean room of this type, a partially laminar flow clean room as shown in FIG. 2 is known.

In the figure, numeral 1 is a ceiling board, and 2 is a floor slab.

A ceiling board 3 is provided on the ceiling of the room between the ceiling board 1 and the floor slab 2, and an air supply duct 4 from a main air conditioner (not shown) is arranged above the ceiling board 3. It is set up. Also,
Air supply chambers 5.5.5 are formed in the lower part of the ceiling plate 3, and they are equipped with [JLPA filter (or HE P
A filter) 6.6.6 communicates with the space below. On the other hand, a perforated floor (grating, punched metal, etc.) 7 is installed on the floor of the room, which has an opening above the floor slab 2, and a utility area 8 is installed between them. It is formed. Further, the room is divided into a working room 10 and a service area [1] by a partition plate 9.9 installed between the air supply chamber 5 and the perforated floor 7. Near the bottom of the partition plate 9, manufacturing equipment 12.12 such as LSI is arranged.
3 is formed.

The space of the work chamber IO is divided into an apparatus area A above the manufacturing apparatus 12 and a passage area C through which the worker 14 passes approximately in the center of the work chamber IO. In consideration of the psychological influence on people, the ceiling portion is made high, and the ULP A filter 6 of the supply chamber 5 is disposed at a higher position than that of the device area A. Further, a lighting fixture 15 is attached to the supply chamber 5 above the worker 14, and an air conditioner 17 with a built-in fan equipped with a louver 16 with a damper on the outside on the service area 11 side.
17 is provided.

In such a conventional partially laminar flow clean room, first, clean air sent through the air supply duct 4 is
From the air supply chamber 5°5.5 installed on the ceiling to the work room I
It is blown out to O. . The clean air supplied to the work room ■0 flows in a nearly laminar flow in one direction from the ceiling to the floor where the perforated floor 7 is provided, and then flows from the utility area 8 to the service area II to the air conditioner. It reaches the machine 17, and is further sent from the empty machine 17 into the supply chamber 5, and the U
It passes through the LPA filter 6 and is supplied to the working chamber 10 again.

``Problem to be solved by the invention'' However, in the conventional clean room, the floor is made of perforated floor such as grating, which makes it difficult to walk and causes workers to easily get tired. , Under the floor (usually between the perforated floor and the slab!, the depth is about 5m to 3m)
The perforated floor vibrates as workers walk, negatively impacting the manufacturing equipment.
Because the height from the perforated floor to the top of the manufacturing equipment is low, dust from the floor and workers tends to spread to the top of the manufacturing equipment, causing L
In addition, it is necessary to make the ceiling of the aisle area higher in consideration of the psychological impact on people, which causes the building to have a higher floor height, which reduces the construction cost. There were problems such as the fact that it was causing the upload.

The present invention has been made in view of the above-mentioned problems, and provides a floor part that does not cause workers to become fatigued or feel fear, and which does not have an adverse effect on manufacturing equipment due to vibration. The purpose of the present invention is to provide a clean room that can increase the yield of LSI by reducing the influence of dust generated by workers and workers, and further reduce the construction cost by lowering the floor height of the building.

"Means for Solving the Problems" In order to solve the above problems, the present invention provides a method of flowing clean air from an air supply section provided in the ceiling toward a floor section having an exhaust opening. The floor of the equipment area and the passage area of a clean room that maintains the air in the equipment area and the passage area provided in the room in a clean state is formed by a fixed bed, and the passage area is fixed. The floor is disposed below the fixed bed in the device region, and an opening is provided between the fixed bed in the passage region and the fixed bed in the device region.

[Example J] Hereinafter, the present invention will be described in detail with reference to the drawings. FIG. 1 shows an embodiment of the present invention and is a sectional view of a clean room. In the figure, the same elements as those shown in the conventional clean room shown in Fig. 2 are as follows:
The same reference numerals are used to omit the explanation.

In FIG. 1, the device area A and the passage area C1, that is,
The floor near the work room 10 is a concrete fixed floor 7 a
, 7a, 7b, and the passage area C
The fixed bed 7b is located at a position lower than the fixed bed 7a of the equipment area A by a predetermined dimension (approximately 40 cm in this embodiment), making use of a space that is not used much in the utility area 8 directly below it. has been done. And fixed floor 7
An exhaust opening 2I is formed between a and 7b, and a mesh louver 2Ia that is coarse enough to prevent objects from falling under the floor is attached to the opening 2I. Therefore, the top surface of the manufacturing equipment I2 placed on the fixed floor 7a of the equipment area A is located at a higher level than the fixed floor 7b of the passage area C, and the clean room building is
The ceiling plate 3 can be lowered to the extent that the fixed floor 7b of the passage area C is lowered, and the floor height is accordingly lowered.

Additionally, due to the lowering of the ceiling plate 3, the ULPA filter (or I4E P A
filter) 6 is installed at the same height as the ULPA filter (or HEPA filter) 6 in the passage area C (in this embodiment, the height dimension of the air supply chamber 5 is different from that of the conventional one). As a result, the space from the top surface of the manufacturing device 12 to the bottom surface of the ULPA filter 6 to the device region is maintained at a predetermined height. The rest of the structure is the same as the clean room shown in FIG. 2.

Next, the operation of the clean room having the above configuration will be explained.

First, clean air sent from the main air conditioner through the air supply duct 4 is supplied to the air supply chamber 5.5.5 provided in the ceiling. The clean air supplied to the air supply chambers 5', 5, 5 passes through a ULPA filter (or 14EPA filter) 6.6.6 and is blown into the working chamber IO. The blown clean air passes mainly through three types of flow paths and is returned to the air supply chamber 5°5.5.

First, the first flow path (2) is connected to the air supply chamber 5 in the device area A.
After passing through the upper surface of the manufacturing equipment 12, the clean air blown from the
, and then returns to the air supply chamber 5 via the air conditioner 17 . Next, the second flow path {circle around (2)} is where the clean air blown out from the air supply chamber 5 in the device area A is connected to the manufacturing device I.
After passing through the upper surface of 2, it passes through the opening 21 between the fixed beds 7a and 7b, enveloping the worker 14, and reaches the utility area 8, and then passes through the Zapis area 11 and then connects the air conditioner 17. and then back to the air supply chamber 5. The third flow path (2) is a flow path through which clean air blown out from the air supply chamber 5 in the passage area C wraps around the work 314 from the head and returns to the air supply chamber 5 from the opening 21 together with the flow path (2). It is a road.

Here, the area in which it is desired to maintain the cleanest environment is the upper surface of the manufacturing apparatus 12, that is, the apparatus area A including the loading and unloading portions of wafer cassettes. Therefore, by blowing clean air, dust in the device area A can be directly removed, and the dust can be removed directly from the operator 14 and the fixed floor 7b.
It is necessary to prevent the diffusion of dust from the air, and in order to satisfy this condition, the tH purified air flowing through the flow path 2 seals the two sides of the manufacturing apparatus I2.

In particular, in this embodiment, the clean air flowing through the flow path (2) has an airflow shape with a large horizontal velocity vector from the device area A toward the passage area C. Not only can dust be prevented from dispersing from C, but also because the fixed bed 7a on which the manufacturing device 12 is placed is located at a higher position than the fixed bed 7b in the passage area 7b, the upper surface of the manufacturing device 12 can be prevented. is higher than the fixed floor 7b, and most of the body of the worker 14 is positioned below the second surface of the manufacturing equipment 12 (in this embodiment,
The height from the fixed bed 7b to the top of the manufacturing equipment is 140cm.
), and as a result, the worker 14
This prevents the intrusion of dust generated from the fixed floor 7b.

Therefore, in this embodiment, the upper surface of the manufacturing apparatus I2 can be maintained in an ultra-rh clean state, and the clean air supplied into the working chamber IO can be transferred between the fixed beds 7a and 7b. Since the air can be exhausted from the opening 2I provided between the two, the floors can be fixed beds 7a and 7b, and furthermore, the fixed beds 7a and 7b in the device area A and the passage area C can be By separating, the fixed bed 7b is less likely to vibrate as the worker 14 walks and the vibrations are less likely to be transmitted to the manufacturing equipment I2. The yield of SI etc. can be increased. In addition, the fixed floor 7b has good walking properties and does not cause fatigue to the worker 14, and does not make the worker 14 feel afraid since the floor is not visible under the floor.

Furthermore, by lowering the floor of the passage area C, the ceiling plate 3 can be lowered, and as a result, the floor height of the building can be lowered, and construction costs can be reduced. Furthermore, in this embodiment, since the fixed bed 7a and the floor portion 7 of the Zahis area II are formed on the same plane, the manufacturing equipment 12 can be easily maintained or replaced when the manufacturing equipment 12 is maintained or replaced. It is possible to draw out to the service area 11.

In addition, the fixed floors 7a and 7b are made of PC boards (
A precast concrete plate) may also be used, and in consideration of the short height of the worker 14, a fixed floor 7b may be used.
A movable step stool may be provided. Further, in order to further completely prevent vibrations of the manufacturing apparatus 2, a vibration isolating device such as vibration isolating rubber may be attached to the legs of the manufacturing apparatus 12.

"Effects of the Invention" As explained above, in the clean room of the present invention, the floors of the equipment area and the passage area are formed of fixed beds, and the fixed bed of the passage area is placed below the fixed bed of the equipment area. However, since there is an opening between the fixed floor in the aisle area and the fixed floor in the equipment area, it is easy to walk and reduces worker fatigue. In addition, the floor will not vibrate as workers walk, the transmission of vibration will be reduced, and the manufacturing equipment will not be adversely affected. Since the height to the top surface is increased, dust from the floor and workers is significantly reduced from spreading to the top of the manufacturing equipment.
The yield of I can be increased. Furthermore, it is possible to lower the floor height of the building, thereby reducing construction costs.

[Brief explanation of drawings]

FIG. 1 is a side sectional view of a clean room showing an embodiment of the present invention, and FIG. 2 is a side sectional view of a clean room showing a conventional technique.

Claims (1)

[Claims] By flowing clean air from the air supply section installed in the ceiling toward the floor section that has an exhaust opening, the air in the equipment area and passage area provided in the room is maintained in a clean state. The floors of the equipment area and the passage area of the clean room are formed of fixed beds, the fixed bed of the passage area is arranged below the fixed bed of the equipment area, and the fixed bed of the passage area and the equipment area are formed with fixed beds. A clean room with an opening between the area and the fixed floor.