JP2013200129A - Component conveyance device and component inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a component conveyance device preventing fine particles from adhering to a component.SOLUTION: A component inspection device 1 includes: a second chamber 8 having an opening 3a on a bottom face 8a; a second blower 15 for flowing gas in the second chamber 8 in a gravity direction; a second stage 31, a lifting device 32 and an adsorption device 33 provided in the second chamber 8 and holding an electronic component 27 and moving it to the opening 3a; and a channel 45 for allowing gas to pass through the opening 3a.

Description

  The present invention relates to a component conveying device and a component inspection device.

  When testing the electrical characteristics of a part, place the part in the socket. Then, the electrodes placed on the component and the socket are brought into contact with each other and energized. An IC handler that performs this electrical characteristic inspection with high productivity is disclosed in Patent Document 1. According to this, the IC handler is provided with a loader / unloader shuttle, and the loader / unloader shuttle supplies parts. The contact device picks up the component and moves from the loader / unloader shuttle to the socket.

  The contact device includes an elevating mechanism and a linear motion mechanism. Then, the contact device moves the component up and down and moves it horizontally. When various mechanisms move, the members constituting the mechanism are rubbed to generate fine particles. The fine particles are also called particles, dust, and dust. When the component is mounted with an optical element such as an image sensor, if fine particles adhere to the component, a malfunction may be caused.

  Therefore, Patent Document 2 discloses a method of removing a fine particle by installing a robot such as a contact device in a chamber. According to it, it is moved while swirling the air flow from the ceiling of the chamber toward the floor. As a result, the airflow travels through the chamber and then progresses under the floor.

JP 2000-88918 A JP 2011-21874 A

  Sockets and loader / unloader shuttles are installed on the floor of the chamber. In the vicinity of the socket, there is a place where the airflow does not proceed and the fine particles stagnate and float in the gas. When the part passes through the place where the fine particles float, the fine particles adhere to the part. Therefore, there has been a demand for a component transport device that suppresses the adhesion of fine particles to the component.

  The present invention has been made to solve the above-described problems, and can be realized as the following forms or application examples.

[Application Example 1]
A component conveying apparatus according to this application example, comprising: a chamber having an opening on a bottom surface; an airflow supply unit that supplies gas into the chamber; and a component provided at a first position in the chamber. A transport unit that is moved to the opening and moved from the opening to a second position below, and a channel that is provided in the opening so as to allow the gas to pass therethrough, and at least a part of the channel is It is characterized by being located at the same height as the second position or below the second position.

  According to this application example, the conveyance unit is provided in the chamber. An opening is provided on the bottom surface of the chamber, and the transfer unit holds the component and moves the component to the opening. When the transfer unit moves in the chamber, the parts constituting the transfer unit may rub and generate fine particles. An airflow supply unit supplies gas into the chamber. Thereby, the fine particles move toward the bottom surface. And an opening part is provided in the bottom face, and the flow path which allows gas to pass through the opening part is installed. The flow path passes through the same height as the second position or below the second position. A conveyance part hold | maintains the component with which the 1st position was equipped, moves to an opening part, and also moves to a 2nd position below from an opening part. Therefore, since the fine particles move along the gas flow, they can be prevented from adhering to the parts.

[Application Example 2]
The component conveying apparatus according to the application example includes a first suction unit that sucks the gas passing through the flow path.

  According to this application example, the first suction part sucks the gas passing through the flow path. This flow path is a flow path that allows gas to pass through the opening. Therefore, the flow rate of the gas passing through the opening can be increased to facilitate movement of the fine particles.

[Application Example 3]
In the component conveying apparatus according to the application example, the chamber includes a component inlet / outlet through which the component passes, the air flow supply unit raises the atmospheric pressure in the chamber from outside the chamber, and the gas passes through the chamber from the component inlet / outlet It is characterized by flowing outside.

  According to this application example, the part passes through the part entrance / exit. The gas then flows out of the chamber from the component entrance / exit. Therefore, since the fine particles floating near the component entrance and exit flow out of the chamber together with the gas, the fine particles can be prevented from adhering to the component.

[Application Example 4]
The component conveying apparatus according to the application example described above includes a static eliminator that neutralizes the gas.

  According to this application example, the static eliminator neutralizes the gas in the chamber. Therefore, since the static electricity charged to the fine particles is neutralized, the fine particles can be made difficult to adhere to the part.

[Application Example 5]
The component conveying apparatus according to the application example includes a warning unit that detects fine particles contained in the gas flowing in the chamber and performs a warning operation when the concentration of the fine particles is higher than a determination value.

  According to this application example, the warning unit detects fine particles contained in the gas flowing in the chamber. Then, the warning unit compares the concentration of the fine particles with the determination value. When the concentration of the fine particles is higher than the determination value, the warning unit performs a warning operation. Therefore, the operator can know whether or not there is a high possibility that fine particles will adhere to the part. As a result, when the concentration of the fine particles is high, measures can be taken so that the fine particles do not adhere to the part.

[Application Example 6]
In the component conveying apparatus according to the application example, the side wall of the chamber further includes a second suction unit that sucks the gas.

  According to this application example, the second suction unit is installed on the side wall of the chamber, and the second suction unit sucks the gas. Accordingly, the fine particles floating near the side wall of the chamber can be discharged out of the chamber by the second suction part.

[Application Example 7]
In the component conveying apparatus according to the application example described above, the component conveying device includes a component desorbing material unit that conveys the component, and the component desorbing material unit conveys the component in a place where the gas flows in the chamber To do.

  According to this application example, the component supply material unit conveys the component at a place where the gas flows in the chamber. Therefore, it is possible to prevent fine particles from adhering to the part.

[Application Example 8]
In the component conveying apparatus according to this application example, the component is an imaging element, and the conveying unit holds an imaging surface of the imaging element facing downward.

  According to this application example, the conveyance unit holds the image pickup surface of the image pickup element facing downward. By facing the imaging surface downward at the first position, there is a space on the opposite side of the imaging surface. At this time, the imaging surface can be easily held by holding the surface opposite to the imaging surface with the imaging surface facing downward. And since it can hold | maintain, without touching an imaging surface, when holding components, components can be hold | maintained without making an imaging surface dirty.

[Application Example 9]
A component conveying apparatus according to this application example, wherein a chamber having an opening on a bottom surface, an airflow supply unit that supplies a gas into the chamber, a conveying unit that conveys components provided in the chamber, And a suction part for sucking the gas to the outside of the chamber through the opening.

  According to this application example, the conveyance unit is provided in the chamber. An opening is provided on the bottom surface of the chamber, and the transport unit moves while holding the parts. When the transfer unit moves in the chamber, the parts constituting the transfer unit may rub and generate fine particles. The air flow supply unit supplies gas into the chamber, and the suction unit passes through the opening and sucks the gas outside the chamber. As a result, the fine particles move toward the outside of the chamber through the opening. Therefore, even if the conveying unit conveys the component in the vicinity of the opening, it is possible to prevent fine particles from adhering to the component.

[Application Example 10]
A component conveying apparatus according to this application example, wherein a chamber having an opening on a bottom surface, an airflow supply unit that supplies a gas into the chamber, a conveying unit that conveys components provided in the chamber, A suction part for sucking the gas outside the chamber, wherein the suction part sucks only the gas passing through the opening.

  According to this application example, the conveyance unit is provided in the chamber. An opening is provided on the bottom surface of the chamber, and the transport unit moves while holding the parts. When the transfer unit moves in the chamber, the parts constituting the transfer unit may rub and generate fine particles. The air flow supply unit supplies gas into the chamber, and the suction unit passes through the opening and sucks the gas outside the chamber. The suction part sucks only the gas passing through the opening. Thereby, the suction part can increase the flow volume of the gas which moves toward an opening part. Therefore, even if the conveying unit conveys the component in the vicinity of the opening, it is possible to prevent fine particles from adhering to the component.

[Application Example 11]
A component inspection apparatus according to this application example, wherein a chamber having an opening on a bottom surface, an inspection unit that faces the opening and is located outside the chamber and inspects a component, and gas is introduced into the chamber An air flow supply unit to supply, a transport unit that is provided in the chamber, holds a component, moves to the inspection unit through the opening, and a flow path that allows the gas to pass through the opening. Features.

  According to this application example, the conveyance unit is provided in the chamber. An opening is provided on the bottom surface of the chamber, and an inspection part is located at a location outside the chamber facing the opening. The conveyance unit holds the component and moves the component to the inspection unit through the opening. Therefore, the inspection unit inspects the part. When the transfer unit moves in the chamber, the parts constituting the transfer unit may rub and generate fine particles. The air flow supply unit supplies gas into the chamber. Thereby, the fine particles move toward the bottom surface. And an opening part is provided in the bottom face, and the flow path which allows gas to pass through the opening part is installed. Therefore, since the fine particles move along the gas flow, the fine particles can be prevented from adhering to the component.

(A) And (b) is a schematic perspective view which shows the structure of a component inspection apparatus in connection with 1st Embodiment. (A) is a typical sectional side view for demonstrating the airflow in a 2nd chamber, (b) is a schematic bottom view for demonstrating the airflow in a 1st duct. (A) is a model side cross section for demonstrating the airflow in a 2nd chamber, (b) is a schematic plan view for demonstrating the airflow in a 2nd chamber. The electric control block diagram of a component inspection apparatus. The schematic diagram for demonstrating the inspection method of components. The schematic diagram for demonstrating the inspection method of components. The schematic sectional side view for demonstrating the airflow in the 2nd chamber in connection with 2nd Embodiment. In connection with the third embodiment, (a) is a schematic plan view showing the structure of a component inspection device, and (b) is a schematic side view showing the structure of the component inspection device.

In this embodiment, a characteristic example of a component inspection apparatus provided with a component conveying apparatus will be described. Hereinafter, embodiments will be described with reference to the drawings. In addition, each member in each drawing is illustrated with a different scale for each member in order to make the size recognizable on each drawing.
(First embodiment)
A component inspection apparatus according to the first embodiment will be described with reference to FIGS.

(Parts inspection equipment)
1A and 1B are schematic perspective views showing the structure of a component inspection apparatus. As shown in FIG. 1A, the component inspection apparatus 1 includes a base 2. The base 2 is a gate-shaped structure. A work plate 3 is installed on the base 2. The work plate 3 is a rectangle that is long in one direction, and various operations are performed on the work plate 3. The longitudinal direction of the work plate 3 is defined as the Y direction, and the direction orthogonal to the Y direction on the plane of the work plate 3 is defined as the X direction. A direction orthogonal to the X direction and the Y direction is taken as a Z direction. The -Z direction becomes the direction of gravity.

  On the work plate 3, a first cover 4, a second cover 5, and a third cover 6 are arranged in this order. A space surrounded by the first cover 4 and the work plate 3 is referred to as a first chamber 7, and a space surrounded by the second cover 5 and the work plate 3 is referred to as a second chamber 8 as a chamber. A space surrounded by the third cover 6 and the work plate 3 is defined as a third chamber 9.

  The first chamber 7 and the second chamber 8 are partitioned by the first wall 10, and the second chamber 8 and the third chamber 9 are partitioned by the second wall 11. In the center of the first wall 10 on the work plate 3 side, a first opening 10 a is installed as a component inlet / outlet communicating the first chamber 7 and the second chamber 8. Further, a second opening 11 a is installed at the center of the second wall 11 on the work plate 3 side as a component inlet / outlet that communicates the second chamber 8 and the third chamber 9.

  The first cover 4 includes a supply door 4a on the surface in the -X direction. The operator can open the supply door 4a and supply parts to the first chamber 7. Similarly, the third cover 6 includes a material removal door 6a on the surface in the -X direction. The operator can open the material removal door 6a and take out the parts from the third chamber 9.

  A first air blower 12 is installed on the first cover 4. The first air blower 12 includes a filter 13 and a fan 14 installed on the filter 13. The fan 14 blows air to pass the filter 13 through the airflow. As a result, the first blower 12 causes the air to flow into the first chamber 7. The filter 13 adsorbs fine particles in the air and removes the fine particles from the air. As a result, clean air is blown into the first chamber 7. The filter 13 is not particularly limited as long as it can filter fine particles in the air. In this embodiment, a HEPA (High Efficiency Particulate Air) filter is employed.

  A second air blower 15 as an airflow supply unit is installed on the second cover 5, and a third air blower 16 is installed on the third cover 6. The second blower 15 and the third blower 16 have the same structure as the first blower 12. The second blower 15 blows clean air to the second chamber 8, and the third blower 16 blows clean air to the third chamber 9. In other words, the first blower 12, the second blower 15, and the third blower 16 are devices that supply gas to each chamber.

  On the first cover 4, an alarm device 17 is further installed as a warning unit. The alarm device 17 includes a speaker 18, a light emitting device 19, and the like, and is a device that issues an alarm with sound and light. The alarm device 17 can alert the operator.

  A part of the surface of the base 2 in the −Y direction and the X direction protrudes, and the input device 22 and the output device 23 are installed. For example, a keyboard or a touch panel can be used as the input device 22. The operator inputs data to the component inspection apparatus 1 using the input device 22. As the output device 23, a liquid crystal display device, an organic EL (ELECTROLUMINESCENCE) display device, or the like can be used.

  FIG. 1B is a schematic perspective view of the component inspection apparatus 1 with the first cover 4, the second cover 5, and the third cover 6 removed. As shown in FIG. 1B, a rectangular opening 3a is formed in the center of the work plate 3 in the Y direction and at a location in the X direction. In the −Z direction of the opening 3 a, a measuring table 24 is installed at a location facing the opening 3 a, and a socket 24 a is installed in the center of the measuring table 24. The socket 24a is provided with a probe that functions as an electrode and can be electrically connected to the electrode of the component.

  A rail 25 extending in the Y direction is installed at the center in the X direction on the work plate 3. A first stage 26 is disposed on the rail 25 as a component supply member that moves along the rail 25, and the first stage 26 is moved into the base 2 in the −Z direction of the first stage 26. A linear motion mechanism 26a is installed.

  The surface of the first stage 26 in the Z direction is a placement surface 26b, and two rows of concave portions 26c are formed on the placement surface 26b. And the electronic component 27 as a component is installed in the recessed part 26c. The electronic component 27 is a component that does not want to attach fine particles such as dust and dust, and is not particularly limited. However, in the present embodiment, the electronic component 27 is, for example, an image sensor. The shape of the recess 26 c is substantially the same as the shape of the electronic component 27. As a result, the position of the electronic component 27 on the first stage 26 can be determined.

  In the −X direction of the base 2, a rectangular parallelepiped support base 28 is erected in connection with the base 2. A beam portion 29 extending in the X direction is installed on the surface of the support base 28 in the X direction. A rail 30 is installed on the side surface of the beam portion 29 facing the −Y direction. A second stage 31 that moves along the rail 30 is disposed on the rail 30, and a linear motion mechanism 31 a that moves the second stage 31 is installed inside the beam portion 29.

  In the −Y direction of the second stage 31, an elevating device 32 is installed so as to be fixed to the second stage 31. The elevating device 32 includes a moving shaft 32a that moves up and down. The elevating device 32 includes a linear motion mechanism inside, and the linear motion mechanism moves the moving shaft 32a. A suction device 33 is installed at one end of the moving shaft 32a on the −Z direction side. The transport unit is configured by the second stage 31, the lifting device 32, the suction device 33, and the like.

  The structure of the linear motion mechanism provided in the first stage 26, the second stage 31, and the lifting device 32 is not particularly limited. A step motor or servo motor and a ball screw can be combined. In addition, a linear motor may be used. In the present embodiment, for example, the linear motion mechanism is configured by combining a servo motor and a ball screw.

  The suction device 33 includes a vacuum chuck having a pipe and a valve inside, and the electronic component 27 can be sucked on the surface facing the first stage 26. The vacuum chuck is connected to a vacuum pump through a pipe (not shown).

  A fourth blowing device 34 as a second suction unit is installed on the surface of the support base 28 facing the Y direction. Furthermore, the 5th air blower 35 as a 2nd suction part is installed in the surface which faces the -Y direction of the support stand 28. As shown in FIG. The fourth blower 34 and the fifth blower 35 include a fan, and have a function of discharging the air in the second chamber 8 to the outside of the second chamber 8.

  A control unit 36 that controls the operation of the component inspection apparatus 1 is installed inside the base 2. The control unit 36 includes an electric special inspection unit 37, and an electric special inspection unit 37, a measuring table, and the like constitute an inspection unit 38. The inspection unit 38 communicates electrical signals between the electronic component 27 and the electrical inspection unit 37 to measure the electrical characteristics of the electronic component 27. The part that does not include the inspection unit 38 in the component inspection apparatus 1 is a handler 39.

  The control unit 36 moves the first stage 26 and the second stage 31 to move the suction device 33 to a place facing the electronic component 27. Then, the controller 36 lowers the suction device 33 to bring the suction device 33 into contact with the electronic component 27. Next, the control unit 36 sucks and holds the electronic component 27 on the suction device 33. Then, the control part 36 drives the 2nd stage 31 and the raising / lowering apparatus 32, and moves the adsorption | suction apparatus 33 to the place facing the socket 24a. Next, the control unit 36 lowers the suction device 33 and inserts the electronic component 27 into the socket 24a, and the electrical special inspection unit 37 performs an electrical special inspection of the electronic component 27.

  After the electrical special inspection of the electronic component 27 is completed, the control unit 36 drives the second stage 31 and the lifting device 32 to move the suction device 33 to a location facing the concave portion 26 c of the first stage 26. Next, the controller 36 lowers the suction device 33 and then stops the suction of the electronic component 27 and places the electronic component 27 in the recess 26c. The component inspection apparatus 1 can sequentially perform the electrical inspection of the plurality of electronic components 27 arranged on the first stage 26 by the above procedure.

  FIG. 2A is a schematic side sectional view for explaining the air flow in the second chamber. As shown in FIG. 2A, the second chamber 8 is surrounded by the work plate 3, the second cover 5, the first wall 10 and the second wall 11. The surface of the work plate 3 facing the second chamber 8 is the bottom surface 8 a of the second chamber 8, and the surface of the second cover 5 facing the second chamber 8 is the ceiling 8 b of the second chamber 8.

  A second blower 15 is installed in the Z direction of the second chamber 8, and the second blower 15 forms an air flow 41 in which air flows in the direction of gravity. Accordingly, the air flow 41 proceeds toward the bottom surface 8a. A static elimination device 42 as a static eliminator is installed on the ceiling 8 b of the second chamber 8. The static eliminator 42 is also referred to as an ionizer. The static eliminator 42 removes static electricity by ionizing the air in the second chamber 8 to neutralize the static electricity. The method for ionizing air is not particularly limited, and a soft X-ray irradiation method or a corona discharge method can be used. The static eliminator 42 is installed near the second blower 15. Thereby, the whole static electricity in the 2nd chamber 8 can be removed.

  Near the opening 3a of the work plate 3, a particle counter 43 as a warning unit is installed. The particle counter 43 is a device that counts the number of fine particles passing near the particle counter 43. For example, a light beam is emitted from a light source such as an LED (Light Emitting Diode) to detect scattered light of fine particles passing through the light beam. Furthermore, the flow velocity near the light beam is detected. And it is an apparatus which detects the density | concentration of microparticles | fine-particles from the flow velocity of air, and the frequency which scattered light produces.

  The socket 24 a is located on the −Z direction side below the work plate 3, and the upper surface of the socket 24 a is a second position 24 b where the electronic component 27 is moved. Therefore, when inspecting the electronic component 27, the lifting device 32 extends the moving shaft 32a and lowers the suction device 33. Then, the electronic component 27 passes through the opening 3a and is brought into contact with the socket 24a.

  The measurement table 24 is supported by a support column 44 erected on the work plate 3. Accordingly, there is a gap between the work plate 3 and the measurement table 24, and the flow path 45 is provided in which the airflow 41 passing through the opening 3a flows. In other words, the flow path 45 is a path through which air flows, and can also be referred to as a cavity or a hole through which air flows. The flow path 45 is at least partially located at the same height as the second position 24b or below the second position 24b. In addition, the flow path 45 may be located above the second position 24b at the same height as the second position 24b or a portion following the portion located below the second position 24b.

  FIG. 2B is a schematic bottom view for explaining the air flow in the first duct, and is a view of the measurement table 24 as viewed from the −Z direction side. As shown in FIGS. 2 (a) and 2 (b), an exhaust duct 46 as a suction part and a first suction part is installed around the measurement table 24, and the exhaust duct 46 includes the suction part and the first suction part. Are connected to a sixth blower 47. As a result, the air passing through the opening 3 a is sucked into the sixth blower 47 through the flow path 45 and exhausted from the second chamber 8.

  The exhaust duct 46 is installed so as to surround the four sides of the opening 3a. Therefore, the airflow 41 traveling in all directions through the flow path 45 through the opening 3 a is exhausted by the sixth blower 47 through the exhaust duct 46. Therefore, air always travels as an air flow 41 around the socket 24a. As a result, it is possible to prevent fine particles from adhering to the electronic component 27.

  FIG. 3A is a schematic side sectional view for explaining the air flow in the second chamber, and shows the vicinity of the first stage 26. As shown in FIG. 3A, a first opening 10 a is installed between the first wall 10 and the work plate 3, and a second opening 11 a is placed between the second wall 11 and the work plate 3. Is installed. The first stage 26 reciprocates between the first chamber 7 and the second chamber 8 through the first opening 10a. Similarly, the first stage 26 reciprocates between the second chamber 8 and the third chamber 9 through the second opening 11a.

  The air pressure in the second chamber 8 is set to be higher than the air pressure in the first chamber 7. Furthermore, the atmospheric pressure in the second chamber 8 is set to be higher than the atmospheric pressure in the third chamber 9. The air pressure in the first chamber 7, the second chamber 8, and the third chamber 9 can be set according to the air blowing conditions of the first air blower 12, the second air blower 15, and the third air blower 16, respectively.

  As a result, the air flow 41 flows from the second chamber 8 to the first chamber 7, and the air flow 41 flows from the second chamber 8 to the third chamber 9. Accordingly, the fine particles in the second chamber 8 travel to the first chamber 7 and the third chamber 9 along with the air flow 41. As a result, since the fine particles in the second chamber 8 are reduced, the fine particles can be prevented from adhering to the electronic component 27. In the first opening 10a and the second opening 11a, since air always travels as an air flow 41, it prevents the fine particles from adhering to the electronic component 27 even when the first stage 26 moves between the chambers. can do. In the second chamber 8, the first stage 26 moves where the airflow 41 is formed. Accordingly, it is possible to prevent the fine particles from adhering to the electronic component 27 mounted on the first stage 26.

  FIG. 3B is a schematic plan view for explaining the air flow in the second chamber, and shows the vicinity of the lifting device 32. As shown in FIGS. 3A and 3B, the first wall 10 is provided with an exhaust duct 10 b as a second suction portion, and the exhaust duct 10 b is connected to the fourth blower 34. Thereby, a part of the air in the second chamber 8 is discharged through the exhaust duct 10b. Similarly, the second wall 11 is provided with an exhaust duct 11b as a second suction portion, and the exhaust duct 11b is connected to the fifth blower 35.

  The intake port 10 c of the exhaust duct 10 b and the intake port 11 c of the exhaust duct 11 b are installed in the vicinity of the second stage 31 and the lifting device 32. Thereby, even when fine particles are generated from the second stage 31 and the lifting device 32, the fine particles floating in the vicinity of the first wall 10 and the second wall 11 are discharged from the intake port 10c and the intake port 11c. Therefore, since the density of the fine particles in the second chamber 8 can be reduced, the fine particles can be prevented from adhering to the electronic component 27.

  FIG. 4 is an electric control block diagram of the component inspection apparatus. In FIG. 4, the component inspection apparatus 1 includes a control unit 36 that controls the operation of the component inspection apparatus 1. The control unit 36 includes a CPU (Central Processing Unit) 48 that performs various types of arithmetic processing as a processor, and a memory 49 that stores various types of information. Further, the stage driving device 50, the first blower device 12, the second blower device 15, and the third blower device 16 are connected to the CPU 48 via the input / output interface 51 and the data bus 52.

  Further, the fourth blower 34, the fifth blower 35, the sixth blower 47, the suction device 33, and the socket 24 a are connected to the CPU 48 via the input / output interface 51 and the data bus 52. Further, the particle counter 43, the static elimination device 42, the alarm device 17, the input device 22, and the output device 23 are also connected to the CPU 48 via the input / output interface 51 and the data bus 52.

  The stage driving device 50 is a device that drives the first stage 26, the second stage 31, and the lifting device 32. Each stage is equipped with a device for detecting the position. Then, the stage driving device 50 can move the stage to a desired location and stop it by moving the stage until it reaches the intended location.

  The memory 49 is a concept including a semiconductor memory such as a RAM and a ROM, and an external storage device such as a hard disk and a DVD-ROM. Functionally, it is a storage area for storing the program software 53 in which the control procedure of the operation of the component inspection apparatus 1 is described, or determination value data used for determining whether to issue an alarm with reference to the concentration of fine particles. A storage area for storing certain particle determination data 54 is set. In addition, a storage area for storing electronic component data 55 which is data such as an identification number of the electronic component 27 mounted on the first stage 26 is set. Furthermore, a storage area for storing electrical special inspection data 56 indicating the electrical characteristic inspection results is set. In addition, a work area for the CPU 48, a storage area that functions as a temporary file, and other various storage areas are set.

  The CPU 48 performs control for inspecting the electronic component 27 in accordance with the program software 53 stored in the memory 49. As a specific function realization unit, a material removal control unit 57 is provided. The discharged material control unit 57 performs control for driving the first stage 26 to move the electronic component 27 to be inspected to the moving range of the suction device 33. Further, the discharged material control unit 57 controls the second stage 31 and the lifting device 32 to convey the electronic component 27 between the first stage 26 and the socket 24a.

  In addition, the CPU 48 has a holding control unit 58. The holding control unit 58 controls the operation of driving the suction device 33 to suck the electronic component 27 to the suction device 33 and the operation of releasing the electronic component 27 from the suction device 33. Then, the discharged material control unit 57 and the holding control unit 58 cooperate to convey the electronic component 27.

  In addition, the CPU 48 includes an electrical special inspection unit 37. The electrical inspection unit 37 outputs an inspection signal to the electronic component 27 installed in the socket 24a. The electronic component 27 receives the inspection signal, reacts according to the inspection signal, and outputs a response signal. The electrical inspection unit 37 inputs a response signal and compares it with a determination value. Then, whether the response of the electronic component 27 is good or bad is determined, and the determination result is stored in the memory 49 as the electric special inspection data 56.

  In addition, the CPU 48 has an alarm control unit 61 as a warning unit. The alarm control unit 61 inputs fine particle concentration data output from the particle counter 43. Then, the alarm control unit 61 inputs a determination value which is one of the fine particle determination data 54 from the memory 49. Then, the input fine particle concentration is compared with the determination value. When the concentration of the fine particles is higher than the determination value, the alarm control unit 61 performs a warning operation. In the warning operation, the alarm control unit 61 drives the alarm device 17 to issue an alarm with sound and light. Thereby, the operator can know that there are many fine particles in the second chamber 8.

  In addition, the CPU 48 includes a blower control unit 62. The blower control unit 62 is a device that controls the first blower 12, the second blower 15, the third blower 16, the fourth blower 34, the fifth blower 35, and the sixth blower 47. The air blowing control unit 62 controls the start and stop of air blowing and the air blowing amount. In addition, the CPU 48 includes a charge removal control unit 63. The charge removal control unit 63 is a device that controls the start and stop of the charge removal device 42 and the degree of ionization of air.

  In the present embodiment, each function described above is realized by program software using the CPU 48. However, when each function described above can be realized by a single electronic circuit (hardware) that does not use the CPU 48, It is also possible to use such an electronic circuit.

(Control method for parts inspection equipment)
Next, a method for inspecting the electronic component 27 using the above-described component inspection apparatus 1 will be described with reference to FIGS. 5 and 6 are schematic diagrams for explaining a component inspection method.

  As shown in FIG. 5A, an electronic component 27 is installed in each recess 26c of the first stage 26, respectively. The discharged material control unit 57 causes the stage drive device 50 to drive the first stage 26 and the second stage 31 to move the suction device 33 to a location facing the electronic component 27 to be inspected. Then, the electronic component 27 stands by at the first position 26d in the moving range of the suction device 33. That is, the first position 26d is a standby place where the electronic component 27 waits.

  The electronic component 27 moves between the first chamber 7, the second chamber 8, and the third chamber 9 through the first opening 10 a and the second opening 11 a by the first stage 26. At this time, since the air travels as an air flow 41 at each place, it is difficult for the fine particles to adhere to the electronic component 27.

  As shown in FIG. 5B, subsequently, the discharged material control unit 57 causes the stage drive device 50 to drive the lifting device 32 to lower the suction device 33. Then, the discharged material control unit 57 brings the suction device 33 into contact with the electronic component 27 to be inspected. Next, the holding control unit 58 causes the suction device 33 to suck the electronic component 27. Also at this time, since the air travels as the air flow 41 at the place where the electronic component 27 passes through the second chamber 8, it is difficult for the fine particles to adhere to the electronic component 27. And the electronic component 27 is installed in the recessed part 26c so that the imaging surface of the electronic component 27 which is an image pick-up element may become down. And the adsorption | suction apparatus 33 hold | maintains the electronic component 27 so that the imaging surface of the electronic component 27 may become downward. Thereby, when the electronic component 27 waits in the recessed part 26c, it can prevent that gravity acts on microparticles | fine-particles and adheres to an imaging surface. Moreover, since the adsorption device 33 adsorbs a place that is not the imaging surface, the adsorption device 33 can prevent the imaging surface from becoming dirty.

  Next, as shown in FIG. 5C, the supply material control unit 57 causes the stage drive device 50 to drive the lifting device 32 to raise the suction device 33. Next, the discharged material control unit 57 causes the stage driving device 50 to drive the second stage 31 and move the electronic component 27 to a location facing the socket 24a. As described above, the upper surface of the socket 24a is the second position 24b, which is the destination of the electronic component 27. Also at this time, since the air travels as the air flow 41 at the place where the electronic component 27 passes through the second chamber 8, it is difficult for the fine particles to adhere to the electronic component 27.

  As shown in FIG. 6A, subsequently, the discharged material control unit 57 causes the stage drive device 50 to drive the lifting device 32 to lower the suction device 33. The socket 24a is located below the opening 3a. And the raising / lowering apparatus 32 lets the adsorption | suction apparatus 33 pass the opening part 3a, and installs the electronic component 27 in the 2nd position 24b of the socket 24a. Thereby, the electrode of the electronic component 27 and the electrode of the socket 24a are brought into contact with each other and energized. Subsequently, the electrical inspection unit 37 communicates with the electronic component 27 to inspect electrical characteristics.

  Between the work plate 3 and the measurement table 24, a flow path 45 is formed through which the airflow 41 travels through the opening 3a. The air flow 41 travels around the socket 24a, the electronic component 27, and the suction device 33, and the fine particles also travel with the air flow 41. Accordingly, it is possible to prevent the fine particles from adhering to the socket 24a, the electronic component 27, and the suction device 33.

  Next, as shown in FIG. 6B, the material supply control unit 57 causes the stage drive device 50 to drive the lifting device 32 to raise the suction device 33. Also at this time, since the air around the electronic component 27 becomes the air flow 41 and travels to the opening 3a, the fine particles are hardly attached to the electronic component 27.

  Next, as shown in FIG. 6C, the discharged material control unit 57 causes the stage driving device 50 to drive the second stage 31 to move the electronic component 27 to a location facing the recess 26c. Next, the discharged material control unit 57 causes the stage drive device 50 to drive the lifting device 32 to lower the suction device 33. Next, the holding control unit 58 causes the suction device 33 to release the electronic component 27. Also at this time, since the air travels as the air flow 41 at the place where the electronic component 27 passes through the second chamber 8, it is difficult for the fine particles to adhere to the electronic component 27.

  Next, as shown in FIG. 5A, the discharged material control unit 57 causes the stage driving device 50 to drive the lifting device 32 to raise the suction device 33. Next, the discharged material control unit 57 causes the stage driving device 50 to drive the first stage 26, and moves the suction device 33 to a location facing the electronic component 27 to be inspected. The above steps are sequentially repeated. Then, after all the electronic components 27 installed on the first stage 26 are inspected, the discharged material control unit 57 moves the first stage 26 to the third chamber 9 and ends the operation.

As described above, this embodiment has the following effects.
(1) According to the present embodiment, the first chamber 26, the second stage 31, and the lifting device 32 are provided in the second chamber 8. When the first stage 26, the second stage 31, and the lifting device 32 move in the second chamber 8, the parts constituting the first stage 26, the second stage 31, and the lifting device 32 may be rubbed to generate fine particles. is there. The second blower 15 causes the gas in the second chamber 8 to flow in the direction of gravity. Thereby, the fine particles move toward the bottom surface 8 a of the second chamber 8. And the opening part 3a is provided in the bottom face 8a, and the flow path 45 which lets gas pass through the opening part 3a is installed. Therefore, since the fine particles move along the gas flow, it is possible to suppress the fine particles from adhering to the electronic component 27.

  (2) According to this embodiment, the sixth blower 47 sucks the gas that passes through the flow path 45. This flow path 45 is a flow path that allows gas to pass through the opening 3a. Therefore, the flow velocity of the gas passing through the opening 3a can be increased to facilitate movement of the fine particles.

  (3) According to the present embodiment, the electronic component 27 passes through the first opening 10 a and the second opening 11 a by the first stage 26. Then, the gas flows from the first opening 10 a and the second opening 11 a to the first chamber 7 or the third chamber 9. Accordingly, since the fine particles flow in the first opening 10a and the second opening 11a, the fine particles can be prevented from adhering to the electronic component 27.

  (4) According to the present embodiment, the static eliminator 42 neutralizes the gas in the second chamber 8. Accordingly, since static electricity charged to the fine particles is neutralized, the fine particles can be prevented from adhering to the electronic component 27.

  (5) According to the present embodiment, the particle counter 43 detects fine particles contained in the gas passing through the vicinity of the opening 3a. Then, the alarm control unit 61 compares the fine particle concentration with the determination value. When the concentration of the fine particles is higher than the determination value, the alarm device 17 performs a warning operation. Therefore, since the operator can know whether or not there is a high possibility that the fine particles adhere to the electronic component 27, it is possible to take measures to prevent the fine particles from adhering to the electronic component 27.

  (6) According to the present embodiment, the exhaust ducts 10b and 11b are installed on the first wall 10 and the second wall 11, and the fourth blower 34 and the fifth blower 35 suck the gas. Accordingly, the fine particles floating near the first wall 10 and the second wall 11 can be discharged out of the second chamber 8 by the fourth blower 34 and the fifth blower 35.

  (7) According to the present embodiment, the first stage 26 removes the electronic component 27 through the first opening 10a and the second opening 11a. Since the first opening 10a and the second opening 11a are places where gas flows, it is possible to prevent fine particles from adhering to the electronic component 27. Further, the first stage 26 and the lifting device 32 convey the electronic component 27 at a place where the gas flows in the second chamber 8. Accordingly, it is possible to prevent the fine particles from adhering to the electronic component 27 even in the second chamber 8.

(Second Embodiment)
Next, an embodiment of the component inspection apparatus will be described with reference to a schematic side sectional view for explaining the air flow in the second chamber of FIG.
This embodiment is different from the first embodiment in that the exhaust duct 46 and the sixth blower 47 shown in FIG. 2A are not installed. Note that description of the same points as in the first embodiment is omitted.

  That is, in the present embodiment, as shown in FIG. 7, in the component inspection apparatus 66, the flow path 45 between the work plate 3 and the measurement table 24 is connected to the outside of the second chamber 8. Accordingly, the air in the second chamber 8 travels through the opening 3 a through the flow path 45 and is discharged outside the second chamber 8.

  When the amount of air blown by the second air blower 15 can be made sufficiently large and the flow velocity of the air flow 41 passing through the opening 3a becomes a flow velocity sufficient for discharging fine particles, the exhaust duct in the first embodiment 46 and the sixth blower 47 may not be installed.

  (1) According to this embodiment, the exhaust duct 46 and the sixth blower 47 are not installed. Therefore, the parts inspection device 66 can be manufactured with high productivity.

(Third embodiment)
Next, an embodiment of a part inspection apparatus in which a part supplying part is further expanded will be described with reference to FIG. FIG. 8A is a schematic plan view showing the structure of the component inspection apparatus, and FIG. 8B is a schematic side view showing the structure of the component inspection apparatus. This embodiment is different from the first embodiment in that the part supplying parts is further expanded. Note that description of the same points as in the first embodiment is omitted.

  That is, in the present embodiment, as shown in FIG. 8, the component inspection device 67 includes a rectangular plate-shaped base 68. The directions in which two orthogonal sides of the base 68 extend in plan view of the base 68 are defined as an X direction and a Y direction, and the vertical direction is defined as a −Z direction. Four belt conveyors 69 that are long in the Y direction are installed on the −Y direction side on the base 68, and square trays 70 are arranged on the belt conveyor 69 in the Y direction. The electronic component 27 is arranged on the tray 70.

  Support pillars 71 are erected at the four corners of the base 68. A bridging member 72 extending in the X direction is installed on the two support columns 71 located at the ends in the Y direction, and a bridging member extending in the X direction on the two support columns 71 located at the ends in the −Y direction. 73 is erected. Rails extending in the X direction are provided on the surface of the bridging member 72 and the bridging member 73 on the base 68 side. Then, a prismatic material X stage 74 and a material removal X stage 75 that are suspended in the rails of the bridging member 72 and the bridging member 73 and are long in the Y direction are installed. The material supply X stage 74 and the material removal X stage 75 can reciprocate in the X direction along this rail.

  A rail extending in the Y direction is installed on the surface of the feed X stage 74 on the base 68 side. A feed Y stage 76 is installed on a rail of the feed X stage 74, and the feed Y stage 76 can reciprocate in the Y direction along the rail. A feed gripper 77 is installed on the base 68 side of the feed Y stage 76, and the feed Y stage 76 includes a linear motion mechanism that moves the feed gripping part 77 up and down. The material supply X stage 74 and the material supply Y stage 76 move the material supply gripping portion 77, and the material supply gripping portion 77 sucks and releases the electronic component 27. Thereby, the component inspection device 67 can convey the electronic component 27 on the belt conveyor 69.

  A rail extending in the Y direction is installed on the surface of the material removal X stage 75 on the base 68 side. The material removal Y stage 78 is suspended from the rail of the material removal X stage 75, and the material removal Y stage 78 can reciprocate in the Y direction along this rail. A material removal gripping portion 79 is installed on the base 68 side of the material removal Y stage 78, and the material removal Y stage 78 is provided with a linear motion mechanism that raises and lowers the material removal gripping portion 79. The material removal X stage 75 and the material removal Y stage 78 move the material removal gripping portion 79, and the material removal gripping portion 79 sucks and releases the electronic component 27. Thereby, the component inspection device 67 can convey the electronic component 27 on the belt conveyor 69.

  A pair of rails 25 extending in the X direction are installed on a base 68 on the bridging member 72 side in the Y direction. A first stage 26 having a linear motion mechanism is disposed on the rail 25, and the first stage 26 reciprocates along the rail 25 in the X direction.

  On the base 68, a support base 28 is erected on the −Y direction side of the rail 25. A beam portion 29 extending in the Y direction is installed on the surface of the support base 28 on the Y direction side. And the 2nd stage 31 which moves to the Y direction along the beam part 29 is installed. A lifting device 32 is installed on the second stage 31, and the lifting device 32 moves the suction device 33 up and down.

  An opening 68a is installed in the Y direction of the support table 28, and the measurement table 24 is installed in the -Z direction of the opening 68a. The measuring table 24 is provided with a socket 24a. The socket 24a is electrically connected to the electrical inspection unit 37. The structure around the measurement table 24 is the same as that of the first embodiment.

  The Y direction side of the support base 28 is covered with a second cover 80. On the −X direction side of the second cover 80 and the −Y side of the support base 28, the −X direction side is covered with the first cover 81 from the center in the X direction. The X direction side of the second cover 80 and the first cover 81 is covered with the third cover 82. The first cover 81 has a component insertion port 81a on the -Y direction side, and the third cover 82 has a component discharge port 82a on the -Y direction side.

  The place covered with the first cover 81 is the first chamber 85, and the place covered with the second cover 80 is the second chamber 86. A place covered with the third cover 82 is a third chamber 87. A wall between the first chamber 85 and the second chamber 86 is the first wall 10, and a wall between the second chamber 86 and the third chamber 87 is the second wall 11. A first opening 10a is formed in the first wall 10 where the first stage 26 passes, and a second opening 11a is formed in the second wall 11 where the first stage 26 passes. Yes.

  On the Z direction side of the first cover 81, the second cover 80, and the third cover 82, the first blower 12, the second blower 15, and the third blower 16, respectively, are installed. Furthermore, a fourth blower 34 that moves air from the first wall 10 to the first chamber 85 and a fifth blower 35 that moves air from the second wall 11 to the third chamber 87 are installed.

  On the −Z direction side of the base 68, an exhaust duct 46 is installed around the measurement base 24, and a sixth blower 47 is connected to the exhaust duct 46. A control unit 88 that controls the operation of the component inspection device 67 is installed on the X direction side of the base 68.

  Next, the operation of the component inspection apparatus 67 will be described. First, the operator places the electronic component 27 on the tray 70. Subsequently, the controller 88 moves the first stage 26 to the first chamber 85. Next, the material supply gripping portion 77 holds the electronic component 27 installed on the tray 70 on the belt conveyor 69 and conveys it onto the first stage 26. Then, the controller 88 sequentially conveys the number of electronic components 27 that can be installed on the first stage 26.

  Next, the controller 88 moves the first stage 26 to move the electronic component 27 to be inspected into the moving range of the suction device 33. Subsequently, the control unit 88 drives the second stage 31, the lifting device 32, and the suction device 33 to install the electronic component 27 in the socket 24a. Next, the electrical special inspection unit 37 communicates with the electronic component 27 to inspect electrical characteristics.

  Next, the control unit 88 drives the second stage 31, the lifting device 32, and the suction device 33 to install the electronic component 27 on the first stage 26. The component inspection device 67 repeats the above procedure to inspect all the electronic components 27 on the first stage 26. Subsequently, the control unit 88 moves the first stage 26 to the third chamber 87.

  Next, the material removal gripping portion 79 holds the electronic component 27 installed on the first stage 26 and conveys it onto the tray 70 on the belt conveyor 69. In the tray 70, a place where the non-defective electronic component 27 is installed and a place where the defective electronic component 27 is installed are set in advance. Then, the control unit 88 sorts the electronic components 27 according to the inspection result of the electrical characteristics and installs them on the tray 70.

  Next, the traveling direction of the airflow 41 will be described. The second blower 15 is installed in the second cover 80, and clean air is blown from the second blower 15 to the second chamber 86. In the second chamber 86, the air flow 41 proceeds in the direction of gravity. In the vicinity of the first wall 10, the air flow 41 proceeds to the first chamber 85 by the fourth blower 34. Furthermore, the first opening 10a proceeds to the first chamber 85.

  Near the second wall 11, the air flow 41 proceeds to the third chamber 87 by the fifth blower 35. Furthermore, it progresses to the 3rd chamber 87 also in the 2nd opening part 11a. The airflow 41 that has traveled to the base 68 passes through the opening 68 a and passes through the exhaust duct 46. Then, the air flow 41 is discharged out of the second chamber 86 by the sixth blower 47.

  The first blower 12 is installed in the first cover 81, and clean air is blown from the first blower 12 to the first chamber 85. In the first chamber 85, the air flow 41 proceeds in the direction of gravity. The first cover 81 is provided with a component input port 81a, and the air flow 41 in the first chamber 85 passes through the component input port 81a and is discharged from the first cover 81.

  Similarly, the third blower 16 is installed in the third cover 82, and clean air is blown from the third blower 16 to the third chamber 87. In the third chamber 87, the air flow 41 proceeds in the direction of gravity. The third cover 82 is provided with a component discharge port 82a, and the air flow 41 in the third chamber 87 passes through the component discharge port 82a and is discharged from the third chamber 87.

  The fine particles entering the first chamber 85 and the fine particles generated in the first chamber 85 are discharged out of the first chamber 85 from the component input port 81 a along with the air flow 41. Accordingly, the fine particles are prevented from adhering to the electronic component 27.

  Similarly, the fine particles entering the third chamber 87 and the fine particles generated in the third chamber 87 are discharged from the component discharge port 82 a to the outside of the third chamber 87 along with the air flow 41. Accordingly, the fine particles are prevented from adhering to the electronic component 27.

As described above, this embodiment has the following effects.
(1) According to the present embodiment, the air flow 41 proceeds to the place where the electronic component 27 is installed in the first chamber 85, the second chamber 86, and the third chamber 87. Therefore, even when fine particles are generated in each chamber, the fine particles can be prevented from adhering to the electronic component 27.

  (2) According to this embodiment, the first blower 12, the second blower 15, and the third blower 16 provided with the filter 13 in the first chamber 85, the second chamber 86, and the third chamber 87. Air is being supplied. Therefore, since clean air is supplied to each chamber, it is possible to prevent fine particles from adhering to the electronic component 27.

In addition, this embodiment is not limited to embodiment mentioned above, A various change and improvement can also be added. A modification will be described below.
(Modification 1)
In the first embodiment, the air flow 41 is an air flow, but may be a gas other than air. For example, it may be performed in a special gas such as oxygen or nitrogen. This content can also be applied to the second embodiment and the third embodiment.

(Modification 2)
In the first embodiment, the air flow 41 is advanced to the opening 3 a, but an opening may be installed in addition to the opening 3 a of the work plate 3. For example, it may be installed near the rail 25. Thereby, the flow velocity of the airflow 41 in the vicinity of the electronic component 27 waiting on the first stage 26 can be increased. As a result, it is possible to prevent fine particles from adhering to the electronic component 27 that is on standby.

(Modification 3)
In the first embodiment, the first stage 26 supplies and removes material. Not only this but the stage for material supply and the stage for material removal may be provided separately. And you may convey the electronic component 27 with sufficient productivity.

  DESCRIPTION OF SYMBOLS 1 ... Component inspection apparatus, 3a ... Opening part, 8 ... 2nd chamber as a chamber, 8a ... Bottom surface, 10a ... 1st opening part as component entrance / exit, 10b, 11b ... Exhaust duct as 2nd suction part, 11a ... 2nd opening as a component entrance / exit, 15 ... 2nd air blower as an airflow supply unit, 17 ... Alarm device as a warning unit, 24b ... 2nd position, 26 ... 1st stage as a component supply material part, 26d ... 1st position, 27 ... Electronic component as part, 32 ... Lifting device as transport unit, 33 ... Adsorption device as transport unit, 34 ... Fourth blower device as second suction unit, 35 ... Second suction unit Fifth blower device as 38, inspection unit, 42 ... neutralization device as static eliminator, 43 ... particle counter as warning unit, 45 ... flow path, 46 ... exhaust duct as suction unit and first suction unit, 47 ... sucking Parts and sixth blower as a first suction portion, 61 ... alarm control unit of the alarm unit.

Claims (11)

A chamber having an opening on the bottom;
An air flow supply unit for supplying gas into the chamber;
A transport unit that holds the component provided at the first position in the chamber and moves the component to the opening and moves the component from the opening to a second position below;
A flow path provided in the opening so as to allow the gas to pass therethrough,
At least a part of the flow path is located at the same height as the second position or below the second position. The component conveying apparatus according to claim 1,
A component conveying apparatus comprising: a first suction unit that sucks the gas passing through the flow path. The component conveying device according to claim 1 or 2,
The chamber includes a component entrance through which the component passes,
The component conveying apparatus, wherein the air flow supply unit raises the pressure inside the chamber higher than outside the chamber, and the gas flows from the component inlet / outlet to the outside of the chamber. It is a components conveying apparatus as described in any one of Claims 1-3,
A component conveying apparatus comprising a static eliminator for neutralizing the gas. It is a component conveyance apparatus as described in any one of Claims 1-4,
A component conveying apparatus comprising: a warning unit that detects fine particles contained in the gas flowing in the chamber and performs a warning operation when the concentration of the fine particles is higher than a determination value. It is a component conveyance apparatus as described in any one of Claims 1-5,
A component conveying apparatus comprising a second suction part for sucking the gas on a side wall of the chamber. It is a component conveying apparatus as described in any one of Claims 1-6,
Comprising a parts deburring material part for conveying the parts;
The component conveying apparatus, wherein the component supply material unit conveys the component at a place where the gas flows in the chamber. It is a component conveying apparatus as described in any one of Claims 1-7,
The component is an image sensor;
The component conveying apparatus, wherein the conveying unit holds an imaging surface of the image sensor facing downward. A chamber having an opening on the bottom;
An air flow supply unit for supplying gas into the chamber;
A transport unit for transporting components provided in the chamber;
And a suction part that sucks the gas to the outside of the chamber through the opening. A chamber having an opening on the bottom;
An air flow supply unit for supplying gas into the chamber;
A transport unit for transporting components provided in the chamber;
A suction part for sucking the gas outside the chamber;
The suction part sucks only the gas passing through the opening. A chamber having an opening on the bottom;
An inspection unit that inspects a part that is located at a location outside the chamber opposite to the opening;
An air flow supply unit for supplying gas into the chamber;
A transport unit that is provided in the chamber and holds components and moves to the inspection unit through the opening;
A component inspection apparatus comprising: a flow path through which the gas passes through the opening.

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