JPS62193764A - デイスク基板の研摩装置 - Google Patents

デイスク基板の研摩装置

Info

Publication number
JPS62193764A
JPS62193764A JP3190186A JP3190186A JPS62193764A JP S62193764 A JPS62193764 A JP S62193764A JP 3190186 A JP3190186 A JP 3190186A JP 3190186 A JP3190186 A JP 3190186A JP S62193764 A JPS62193764 A JP S62193764A
Authority
JP
Japan
Prior art keywords
disk substrate
pressure
pressure head
polishing
abrasive tape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3190186A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0573545B2 (enrdf_load_stackoverflow
Inventor
Tsuneo Morita
森田　宜夫
Hiroichi Suzuki
博一 鈴木
Masunobu Sonoda
園田　益伸
Shunei Miyajima
宮島　俊英
Yasunori Fukuyama
福山　保則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP3190186A priority Critical patent/JPS62193764A/ja
Publication of JPS62193764A publication Critical patent/JPS62193764A/ja
Publication of JPH0573545B2 publication Critical patent/JPH0573545B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP3190186A 1986-02-18 1986-02-18 デイスク基板の研摩装置 Granted JPS62193764A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3190186A JPS62193764A (ja) 1986-02-18 1986-02-18 デイスク基板の研摩装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3190186A JPS62193764A (ja) 1986-02-18 1986-02-18 デイスク基板の研摩装置

Publications (2)

Publication Number Publication Date
JPS62193764A true JPS62193764A (ja) 1987-08-25
JPH0573545B2 JPH0573545B2 (enrdf_load_stackoverflow) 1993-10-14

Family

ID=12343905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3190186A Granted JPS62193764A (ja) 1986-02-18 1986-02-18 デイスク基板の研摩装置

Country Status (1)

Country Link
JP (1) JPS62193764A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009208214A (ja) * 2008-03-06 2009-09-17 Ebara Corp 研磨装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6219368A (ja) * 1985-07-19 1987-01-28 Hitachi Ltd テ−プ加工装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6219368A (ja) * 1985-07-19 1987-01-28 Hitachi Ltd テ−プ加工装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009208214A (ja) * 2008-03-06 2009-09-17 Ebara Corp 研磨装置

Also Published As

Publication number Publication date
JPH0573545B2 (enrdf_load_stackoverflow) 1993-10-14

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