JPS62193181A - 光起電力装置の製造方法 - Google Patents
光起電力装置の製造方法Info
- Publication number
- JPS62193181A JPS62193181A JP61034800A JP3480086A JPS62193181A JP S62193181 A JPS62193181 A JP S62193181A JP 61034800 A JP61034800 A JP 61034800A JP 3480086 A JP3480086 A JP 3480086A JP S62193181 A JPS62193181 A JP S62193181A
- Authority
- JP
- Japan
- Prior art keywords
- electrode film
- film
- semiconductor film
- substrate
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000004065 semiconductor Substances 0.000 claims abstract description 54
- 238000000034 method Methods 0.000 claims abstract description 25
- 238000006243 chemical reaction Methods 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 238000009826 distribution Methods 0.000 claims description 53
- 230000001678 irradiating effect Effects 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 abstract description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 8
- 229910021417 amorphous silicon Inorganic materials 0.000 abstract description 8
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 abstract description 6
- 239000010936 titanium Substances 0.000 abstract description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052719 titanium Inorganic materials 0.000 abstract description 3
- MZFIXCCGFYSQSS-UHFFFAOYSA-N silver titanium Chemical compound [Ti].[Ag] MZFIXCCGFYSQSS-UHFFFAOYSA-N 0.000 abstract description 2
- 239000004411 aluminium Substances 0.000 abstract 2
- 229910001887 tin oxide Inorganic materials 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 22
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000004088 simulation Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000001020 plasma etching Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 230000003685 thermal hair damage Effects 0.000 description 3
- 238000009827 uniform distribution Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 229910021419 crystalline silicon Inorganic materials 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 206010011732 Cyst Diseases 0.000 description 1
- 241001474791 Proboscis Species 0.000 description 1
- 206010037660 Pyrexia Diseases 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- -1 aluminum <AQ') Chemical class 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 208000031513 cyst Diseases 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
Landscapes
- Drying Of Semiconductors (AREA)
- Photovoltaic Devices (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61034800A JPS62193181A (ja) | 1986-02-18 | 1986-02-18 | 光起電力装置の製造方法 |
| US07/015,691 US4755475A (en) | 1986-02-18 | 1987-02-17 | Method of manufacturing photovoltaic device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61034800A JPS62193181A (ja) | 1986-02-18 | 1986-02-18 | 光起電力装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62193181A true JPS62193181A (ja) | 1987-08-25 |
| JPH0528911B2 JPH0528911B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-04-27 |
Family
ID=12424316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61034800A Granted JPS62193181A (ja) | 1986-02-18 | 1986-02-18 | 光起電力装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62193181A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120152339A1 (en) * | 2010-03-18 | 2012-06-21 | Fuji Electric Co., Ltd. | Thin film solar cell and method for manufacturing same |
-
1986
- 1986-02-18 JP JP61034800A patent/JPS62193181A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120152339A1 (en) * | 2010-03-18 | 2012-06-21 | Fuji Electric Co., Ltd. | Thin film solar cell and method for manufacturing same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0528911B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-04-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4755475A (en) | Method of manufacturing photovoltaic device | |
| JPH0560674B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| JPS5935489A (ja) | 光半導体装置の製造方法 | |
| JP2680582B2 (ja) | 光起電力装置の製造方法 | |
| JPS62193181A (ja) | 光起電力装置の製造方法 | |
| JP2002231986A (ja) | 集積型薄膜太陽電池の製造方法 | |
| JPS6233477A (ja) | 光起電力装置の製造方法 | |
| US5861325A (en) | Technique for producing interconnecting conductive links | |
| JPS61280680A (ja) | 半導体装置の製造方法 | |
| JPS62193182A (ja) | 光起電力装置の製造方法 | |
| JPS59220978A (ja) | 光起電力装置の製造方法 | |
| JPH0558676B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| JP2648064B2 (ja) | 光半導体装置の製造方法 | |
| JPS6114727A (ja) | 半導体装置の製造方法 | |
| JPS63258077A (ja) | 光起電力装置の製造方法 | |
| JP2744058B2 (ja) | 光起電力装置の製造方法 | |
| JPS6031258A (ja) | 光起電力装置の製造方法 | |
| JPS62142371A (ja) | 薄膜半導体光電変換装置 | |
| JPH03257874A (ja) | 光起電力装置の製造方法 | |
| JP2517226B2 (ja) | 半導体装置の製造方法 | |
| JPS59220979A (ja) | 光起電力装置の製造方法 | |
| JPS60231372A (ja) | 半導体装置作製方法 | |
| JPS633470A (ja) | 光電変換装置の作成方法 | |
| JPS60262471A (ja) | 光起電力装置の製造方法 | |
| JPS61280679A (ja) | 光起電力装置の製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |