JPS6218954U - - Google Patents

Info

Publication number
JPS6218954U
JPS6218954U JP10998085U JP10998085U JPS6218954U JP S6218954 U JPS6218954 U JP S6218954U JP 10998085 U JP10998085 U JP 10998085U JP 10998085 U JP10998085 U JP 10998085U JP S6218954 U JPS6218954 U JP S6218954U
Authority
JP
Japan
Prior art keywords
vacuum chamber
vacuum
liner tube
communicates
evacuated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10998085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10998085U priority Critical patent/JPS6218954U/ja
Publication of JPS6218954U publication Critical patent/JPS6218954U/ja
Pending legal-status Critical Current

Links

JP10998085U 1985-07-18 1985-07-18 Pending JPS6218954U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10998085U JPS6218954U (fr) 1985-07-18 1985-07-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10998085U JPS6218954U (fr) 1985-07-18 1985-07-18

Publications (1)

Publication Number Publication Date
JPS6218954U true JPS6218954U (fr) 1987-02-04

Family

ID=30988585

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10998085U Pending JPS6218954U (fr) 1985-07-18 1985-07-18

Country Status (1)

Country Link
JP (1) JPS6218954U (fr)

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