JPS61176762U - - Google Patents
Info
- Publication number
- JPS61176762U JPS61176762U JP6056685U JP6056685U JPS61176762U JP S61176762 U JPS61176762 U JP S61176762U JP 6056685 U JP6056685 U JP 6056685U JP 6056685 U JP6056685 U JP 6056685U JP S61176762 U JPS61176762 U JP S61176762U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- exhaust pipe
- vacuum chamber
- conductance
- main valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6056685U JPS61176762U (fr) | 1985-04-23 | 1985-04-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6056685U JPS61176762U (fr) | 1985-04-23 | 1985-04-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61176762U true JPS61176762U (fr) | 1986-11-04 |
Family
ID=30588033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6056685U Pending JPS61176762U (fr) | 1985-04-23 | 1985-04-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61176762U (fr) |
-
1985
- 1985-04-23 JP JP6056685U patent/JPS61176762U/ja active Pending