JPH0176575U - - Google Patents

Info

Publication number
JPH0176575U
JPH0176575U JP1987171304U JP17130487U JPH0176575U JP H0176575 U JPH0176575 U JP H0176575U JP 1987171304 U JP1987171304 U JP 1987171304U JP 17130487 U JP17130487 U JP 17130487U JP H0176575 U JPH0176575 U JP H0176575U
Authority
JP
Japan
Prior art keywords
pump
processing chamber
utility
scope
exhaust system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987171304U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987171304U priority Critical patent/JPH0176575U/ja
Publication of JPH0176575U publication Critical patent/JPH0176575U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Drying Of Semiconductors (AREA)
JP1987171304U 1987-11-11 1987-11-11 Pending JPH0176575U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987171304U JPH0176575U (fr) 1987-11-11 1987-11-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987171304U JPH0176575U (fr) 1987-11-11 1987-11-11

Publications (1)

Publication Number Publication Date
JPH0176575U true JPH0176575U (fr) 1989-05-24

Family

ID=31463017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987171304U Pending JPH0176575U (fr) 1987-11-11 1987-11-11

Country Status (1)

Country Link
JP (1) JPH0176575U (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10125657A (ja) * 1996-10-16 1998-05-15 Ebara Corp 真空排気装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10125657A (ja) * 1996-10-16 1998-05-15 Ebara Corp 真空排気装置

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