JPS62188273A - 半導体装置およびその製造方法 - Google Patents

半導体装置およびその製造方法

Info

Publication number
JPS62188273A
JPS62188273A JP2931086A JP2931086A JPS62188273A JP S62188273 A JPS62188273 A JP S62188273A JP 2931086 A JP2931086 A JP 2931086A JP 2931086 A JP2931086 A JP 2931086A JP S62188273 A JPS62188273 A JP S62188273A
Authority
JP
Japan
Prior art keywords
region
impurity
regions
impurity regions
high concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2931086A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0573068B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Nobuaki Otsuka
伸朗 大塚
Sumio Tanaka
田中　寿実夫
Shigeru Atsumi
渥美　滋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2931086A priority Critical patent/JPS62188273A/ja
Publication of JPS62188273A publication Critical patent/JPS62188273A/ja
Publication of JPH0573068B2 publication Critical patent/JPH0573068B2/ja
Granted legal-status Critical Current

Links

JP2931086A 1986-02-13 1986-02-13 半導体装置およびその製造方法 Granted JPS62188273A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2931086A JPS62188273A (ja) 1986-02-13 1986-02-13 半導体装置およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2931086A JPS62188273A (ja) 1986-02-13 1986-02-13 半導体装置およびその製造方法

Publications (2)

Publication Number Publication Date
JPS62188273A true JPS62188273A (ja) 1987-08-17
JPH0573068B2 JPH0573068B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-13

Family

ID=12272646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2931086A Granted JPS62188273A (ja) 1986-02-13 1986-02-13 半導体装置およびその製造方法

Country Status (1)

Country Link
JP (1) JPS62188273A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05121737A (ja) * 1991-07-15 1993-05-18 Nec Corp 半導体装置の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53118376A (en) * 1977-03-25 1978-10-16 Nec Corp Manufacture of semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53118376A (en) * 1977-03-25 1978-10-16 Nec Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05121737A (ja) * 1991-07-15 1993-05-18 Nec Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0573068B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-13

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees