JPS62186202A - Antireflection film for plastic optical parts - Google Patents
Antireflection film for plastic optical partsInfo
- Publication number
- JPS62186202A JPS62186202A JP61028546A JP2854686A JPS62186202A JP S62186202 A JPS62186202 A JP S62186202A JP 61028546 A JP61028546 A JP 61028546A JP 2854686 A JP2854686 A JP 2854686A JP S62186202 A JPS62186202 A JP S62186202A
- Authority
- JP
- Japan
- Prior art keywords
- plastic optical
- layers
- thin film
- film layer
- optical component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 26
- 239000004033 plastic Substances 0.000 title claims abstract description 26
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims abstract description 6
- 239000011651 chromium Substances 0.000 claims abstract description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims abstract 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract 3
- 239000010949 copper Substances 0.000 claims abstract 3
- 239000010931 gold Substances 0.000 claims abstract 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract 2
- 239000000956 alloy Substances 0.000 claims abstract 2
- 229910045601 alloy Inorganic materials 0.000 claims abstract 2
- 229910052782 aluminium Inorganic materials 0.000 claims abstract 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract 2
- 229910052802 copper Inorganic materials 0.000 claims abstract 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract 2
- 229910052737 gold Inorganic materials 0.000 claims abstract 2
- 229910052759 nickel Inorganic materials 0.000 claims abstract 2
- 229910052763 palladium Inorganic materials 0.000 claims abstract 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract 2
- 229910052718 tin Inorganic materials 0.000 claims abstract 2
- 239000010409 thin film Substances 0.000 claims description 14
- 238000000576 coating method Methods 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 6
- 239000012528 membrane Substances 0.000 claims 2
- 230000002265 prevention Effects 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 6
- 229910001635 magnesium fluoride Inorganic materials 0.000 abstract description 5
- 239000000853 adhesive Substances 0.000 abstract 2
- 230000001070 adhesive effect Effects 0.000 abstract 2
- 239000011135 tin Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- -1 RIF ion Chemical class 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001722 carbon compounds Chemical class 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Surface Treatment Of Optical Elements (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はビデオカメラ、スチルカメラ、元ピックアッフ
用光学部品、プロジエクシ璽ンテレビ。[Detailed Description of the Invention] [Industrial Field of Application] The present invention is applicable to video cameras, still cameras, optical components for original pickups, and professional televisions.
複写機等に使用されるプラスチック光学部品の反射防止
膜に関するものである。This invention relates to antireflection coatings for plastic optical parts used in copying machines and the like.
従来光学部品として主流をしめていたガラス部品に代わ
り、最近の超精密金型加工機の出現と、射出成形技術の
向上によりプラスチック先学部品が利用されるようにな
って来た。そしてガラス部品と同様に表面反射を防止す
る薄膜成形が施されている。しかしながらプラスチック
光学部品にもいくつかの欠点がある。つまり、無機ガラ
スと比較して、熱変形温度が低い。含水率が高く、真空
蒸着法による成膜加工時プラスチック光学部品表面に水
分の浮き出し現象が生じ“る。又、低分子量の炭素化合
物を中心とした放出ガスが多い。プラスチック光学部品
と薄膜物質との線膨張係数には、大きな差があり、密着
力低下に影響する。With the recent advent of ultra-precision mold processing machines and improvements in injection molding technology, plastic parts have come to be used instead of glass parts, which have traditionally been the mainstream for optical parts. As with glass parts, a thin film is applied to prevent surface reflections. However, plastic optics also have some drawbacks. In other words, the thermal deformation temperature is lower than that of inorganic glass. The moisture content is high, and a phenomenon in which moisture floats out on the surface of plastic optical components occurs during film formation using the vacuum evaporation method.In addition, a large amount of gas, mainly low molecular weight carbon compounds, is emitted.Plastic optical components and thin film materials There is a large difference in the coefficient of linear expansion, which affects the reduction in adhesion.
以上の問題点に対して、RIFイオンブレーティング法
や部分スパッタ法を真空蒸着時に併用することで密着力
を向上させる提案が見られる。しかし効果として初期密
着力は向上しているのが確認されるが、長期信頼性にお
いて極端に劣化する傾向が観察された。In order to solve the above problems, there have been proposals to improve adhesion by using RIF ion blating method and partial sputtering method together during vacuum deposition. However, although it was confirmed that initial adhesion was improved as an effect, a tendency for extreme deterioration in long-term reliability was observed.
本発明の目的は、密着力の向上した、量産性の高いプラ
スチック光学部品の反射防止膜を提慎することにある。An object of the present invention is to provide an antireflection coating for plastic optical components that has improved adhesion and is highly mass-producible.
本発明のプラスチック光学部品の反射防止膜は、プラス
チック光学部品の表面に少なくとも1#以上の金属薄膜
層を形成し、前記金属?V膜層の上に少なくとも1層以
上の誘電体薄膜層を形成することで、密着力の向上した
、量産性の高いプラスチック光学部品の反射防止膜を提
供するものである。The antireflection film for a plastic optical component of the present invention is formed by forming a metal thin film layer of at least 1 # or more on the surface of the plastic optical component, and forming the antireflection film on the surface of the plastic optical component. By forming at least one dielectric thin film layer on the V film layer, it is possible to provide an antireflection film for plastic optical components that has improved adhesion and is highly mass-producible.
以下実施例に基づきながら本発明を説明する。 The present invention will be explained below based on Examples.
第1図は従来例による構成を示す。弗化マグネシウムを
約1200^の厚さにアクリル射出成形品の上に真空蒸
着で成膜したものである。FIG. 1 shows a conventional configuration. Magnesium fluoride was deposited on an acrylic injection molded product to a thickness of about 1200^ by vacuum evaporation.
第2図は本発明による実施例を示す構成のものである。FIG. 2 shows a configuration showing an embodiment according to the present invention.
クロムの厚さ25Xで、弗化マグネシウムの厚さ950
Xである。金属薄膜物質も、誘電体薄膜物質も本実施例
だけに限定したものでなく、特許請求の範囲に記載物質
にも同様の効果がみられた。具体的構成は第1表に示す
。Chromium thickness 25X, magnesium fluoride thickness 950
It is X. Neither the metal thin film material nor the dielectric thin film material is limited to this example, and similar effects were observed with the materials described in the claims. The specific configuration is shown in Table 1.
従来例と物性比較のために実行した試験は、(1)耐湿
試験(温度40℃、相対湿度90%、1000時間放置
ン(2)耐熱試験(温度80℃、1000時間放置)(
8)熱衝撃試験(低温度領域−20℃、高温度領域+7
0℃、各1時間づつ交互に放置する)で実施した。The tests carried out to compare the physical properties with conventional examples were: (1) Humidity test (temperature 40°C, relative humidity 90%, left for 1000 hours) (2) Heat resistance test (temperature 80°C, left for 1000 hours) (
8) Thermal shock test (low temperature range -20℃, high temperature range +7
The experiments were carried out at 0°C (alternately left for 1 hour each).
その長期信頼性の結果は、第2表に示した。これから本
発明の効果が充分に有効であることが明白となりた。な
お本発明の実施例では射出成形されたアクリル樹脂を使
用したが、その他に0R−59(ジ千チレングリコール
・ビスeアクルカーボネート)、+ヤスティング成形さ
れたアクリル樹脂、lリカーボネート樹脂、ポリスチレ
ン等の合成樹脂にも同様の効果を示す。The long-term reliability results are shown in Table 2. From this, it became clear that the effects of the present invention were sufficiently effective. In the examples of the present invention, injection-molded acrylic resin was used, but other materials include 0R-59 (dithylene glycol bis-acrylic carbonate), + Yasting-molded acrylic resin, l-recarbonate resin, and polystyrene. A similar effect is shown on synthetic resins such as
以上のように本発明のプラスチック光学部品の反射防止
膜は、従来から問題となっていた欠点を解消し、ffi
産性の高い、密着力の向上した反射防止膜を有する。産
業分野における実用性の高い発明である。As described above, the antireflection coating for plastic optical components of the present invention eliminates the conventional drawbacks and improves the ffi
It has an anti-reflection coating with high productivity and improved adhesion. This is a highly practical invention in the industrial field.
第1表 第2表Table 1 Table 2
第1図は、従来のプラスチック光学部品の反射防止膜の
構成を示した図である。
第2図は、本発明のプラスチック光学部品の反射防止膜
の構成を示した図である。
1・・・・・・プラスチック光学部品
2・・・・・・弗化マグネシウムによる反射防止膜3・
・・・・・プラスチック光学部品
4・・・・・・クロムによる金属薄膜
5・・・・・・弗化マグネシウムによる誘電体N膜以
上
出願人 セイコーエプソン株式会社
第乙図FIG. 1 is a diagram showing the structure of an antireflection film of a conventional plastic optical component. FIG. 2 is a diagram showing the structure of the antireflection film of the plastic optical component of the present invention. 1...Plastic optical parts 2...Anti-reflection coating made of magnesium fluoride 3.
...Plastic optical component 4...Metal thin film made of chromium5...Dielectric N film made of magnesium fluoride
Applicant: Seiko Epson Corporation Figure 2
Claims (4)
上の金属薄膜層を形成し、前記金属薄膜層の上に少なく
とも1層以上の誘電体薄膜層を形成したことを特徴とす
るプラスチック光学部品の反射防止膜。(1) Reflection of a plastic optical component characterized in that at least one metal thin film layer is formed on the surface of the plastic optical component, and at least one dielectric thin film layer is formed on the metal thin film layer. Prevention membrane.
)、ニッケル(Ni)、金(Au)、クロム(Cr)、
パラジウム(Pd)、スズ(Su)の単体、もしくはこ
れらの合金から成ることを特徴とする特許請求の範囲第
1項記載のプラスチック光学部品の反射防止膜。(2) The metal thin film layer is made of copper (Cu), aluminum (Al
), nickel (Ni), gold (Au), chromium (Cr),
The antireflection coating for plastic optical components according to claim 1, characterized in that it is made of palladium (Pd), tin (Su) alone, or an alloy thereof.
化マグネシウム(MgF_2)の単体、もしくはその混
合物質から成ることを特徴とする特許請求の範囲1項記
載のプラスチック光学部品の反射防止膜。(3) The antireflection coating for the plastic optical component according to claim 1, wherein the dielectric thin film layer is made of silicon oxide (SiO_2), magnesium fluoride (MgF_2) alone, or a mixture thereof. .
に加熱保温状態で、金属薄膜層と誘電体薄膜層を形成す
ることを特徴とする特許請求の範囲第1項記載のプラス
チック光学部品の反射防止膜。(4) Reflection of the plastic optical component according to claim 1, characterized in that the metal thin film layer and the dielectric thin film layer are formed on the plastic optical component by heating and keeping the plastic optical component within 50°C to 100°C. Prevention membrane.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61028546A JPS62186202A (en) | 1986-02-12 | 1986-02-12 | Antireflection film for plastic optical parts |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61028546A JPS62186202A (en) | 1986-02-12 | 1986-02-12 | Antireflection film for plastic optical parts |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62186202A true JPS62186202A (en) | 1987-08-14 |
Family
ID=12251657
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61028546A Pending JPS62186202A (en) | 1986-02-12 | 1986-02-12 | Antireflection film for plastic optical parts |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62186202A (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01180333A (en) * | 1988-01-11 | 1989-07-18 | Nippon Sheet Glass Co Ltd | Transparent member with reflection preventive film including metallic film |
JPH01200952A (en) * | 1988-02-05 | 1989-08-14 | Nippon Sheet Glass Co Ltd | Transparent plate provided with reflection preventing film having metal film |
JPH01249330A (en) * | 1988-03-30 | 1989-10-04 | Nippon Sheet Glass Co Ltd | Transparent body provided with reflection preventive film containing metallic film |
GB2371562A (en) * | 2001-01-26 | 2002-07-31 | Gen Electric Co Plc | Coated reflector for a lamp |
US6606196B2 (en) | 2000-08-29 | 2003-08-12 | Hoya Corporation | Optical element having antireflection film |
JP2003533726A (en) * | 2000-05-15 | 2003-11-11 | スリーエム イノベイティブ プロパティズ カンパニー | Anti-reflective coating |
US6693747B2 (en) | 2000-08-29 | 2004-02-17 | Hoya Corporation | Optical element having antireflection film |
WO2008129569A1 (en) * | 2007-04-19 | 2008-10-30 | Ledal S.P.A. | Coated plastic film |
CN112376021A (en) * | 2020-11-13 | 2021-02-19 | 上海米蜂激光科技有限公司 | Novel broadband antireflection film and preparation method thereof |
-
1986
- 1986-02-12 JP JP61028546A patent/JPS62186202A/en active Pending
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01180333A (en) * | 1988-01-11 | 1989-07-18 | Nippon Sheet Glass Co Ltd | Transparent member with reflection preventive film including metallic film |
JPH01200952A (en) * | 1988-02-05 | 1989-08-14 | Nippon Sheet Glass Co Ltd | Transparent plate provided with reflection preventing film having metal film |
JPH01249330A (en) * | 1988-03-30 | 1989-10-04 | Nippon Sheet Glass Co Ltd | Transparent body provided with reflection preventive film containing metallic film |
JP2003533726A (en) * | 2000-05-15 | 2003-11-11 | スリーエム イノベイティブ プロパティズ カンパニー | Anti-reflective coating |
US6606196B2 (en) | 2000-08-29 | 2003-08-12 | Hoya Corporation | Optical element having antireflection film |
US6693747B2 (en) | 2000-08-29 | 2004-02-17 | Hoya Corporation | Optical element having antireflection film |
GB2371562A (en) * | 2001-01-26 | 2002-07-31 | Gen Electric Co Plc | Coated reflector for a lamp |
WO2008129569A1 (en) * | 2007-04-19 | 2008-10-30 | Ledal S.P.A. | Coated plastic film |
CN112376021A (en) * | 2020-11-13 | 2021-02-19 | 上海米蜂激光科技有限公司 | Novel broadband antireflection film and preparation method thereof |
CN112376021B (en) * | 2020-11-13 | 2023-03-31 | 上海米蜂激光科技有限公司 | Broadband antireflection film and preparation method thereof |
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