JPH0255302A - Antireflection film of plastic optical parts - Google Patents
Antireflection film of plastic optical partsInfo
- Publication number
- JPH0255302A JPH0255302A JP63207045A JP20704588A JPH0255302A JP H0255302 A JPH0255302 A JP H0255302A JP 63207045 A JP63207045 A JP 63207045A JP 20704588 A JP20704588 A JP 20704588A JP H0255302 A JPH0255302 A JP H0255302A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- antireflection film
- plastic optical
- optical parts
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 41
- 239000004033 plastic Substances 0.000 title claims abstract description 36
- 229920003023 plastic Polymers 0.000 title claims abstract description 36
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 19
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims abstract description 10
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 8
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 8
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 8
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 7
- 238000000576 coating method Methods 0.000 claims description 10
- 239000011248 coating agent Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 abstract description 8
- 230000003595 spectral effect Effects 0.000 abstract description 7
- 238000010438 heat treatment Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 230000001070 adhesive effect Effects 0.000 abstract 1
- 238000007733 ion plating Methods 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 40
- 239000010410 layer Substances 0.000 description 15
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 6
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000003667 anti-reflective effect Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 241000345998 Calamus manan Species 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 235000012950 rattan cane Nutrition 0.000 description 1
- 238000001612 separation test Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Surface Treatment Of Optical Elements (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明はプロジェクションテレビ、ビデオカメラ、スチ
ルカメラなどの光学系に使用されるプラスチック製光学
部品の反射防止に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to antireflection of plastic optical components used in optical systems such as projection televisions, video cameras, and still cameras.
従来の技術
従来、レンズなどの光学部品には無機ガラスが多く使用
されてきたが、近年、軽量で加工が容易であり、かつ量
産に適している点等ですぐれているプラスチックが光学
部品の素材として用いられるようになってきた。ところ
が、プラスチックなどのプラスチック製光学部品は無機
ガラス同様に表面での光の反射が大きいという欠点があ
る。この欠点を解消するために、プラスチック製光学部
品の表面に無機ガラス表面に形成される反射防止膜と同
機に反射防止膜を形成することで表面反射を防止するこ
とは一般技術として知られている。Conventional technology Traditionally, inorganic glass has been widely used for optical parts such as lenses, but in recent years, plastics have become popular as materials for optical parts because they are lightweight, easy to process, and suitable for mass production. It has come to be used as. However, like inorganic glass, optical components made of plastic have the disadvantage of large amounts of light reflection on their surfaces. In order to eliminate this drawback, it is known as a general technique to prevent surface reflection by forming an anti-reflection film on the surface of plastic optical components on the same surface as the anti-reflection film formed on the inorganic glass surface. .
（例えば「精密プラスチック光学レンズの設計、成形技
術とその問題点コトリケップス技術資料集Ｎα８７．Ｐ
６−１〜Ｐ６−４）
以下図面を参照しながら従来のプラスチック製光学部品
の反射防止膜について説明する。第２図はプラスチック
製光学部品の表面に無機ガラス表面に形成される反射防
止膜と同様なフッ化マグネシウムからなる反射防止膜を
形成した構造を示す図であり、第３図（ｂ）はその分光
反射特性を示す図であり、比較のための第３図（Ｃ）は
反射防止膜を形成しない場合のプラスチック製光学部品
の分光反耐特性を示す図である。第２図において、ｌは
プラスチック製光学部品、５はフン化マグネシウムより
なる反射防止膜である。前記反射防止膜５は一般には真
空茎７．法によって形成されるが、最近では、反射防止
膜とプラスチック製光学部品との密着性や耐久性を向上
させるためにプラスチック製光学部品を６０°Ｃ〜８０
°Ｃに加熱して真空蒸着をする方法やＲＦビイオンブレ
ーティング法を用いて反射防止膜を形成する方法が行わ
れている。(For example, "Design of precision plastic optical lenses, molding technology, and their problems" Kotorikepps technical data collection Nα87.P
6-1 to P6-4) A conventional antireflection film for plastic optical components will be described below with reference to the drawings. Figure 2 shows a structure in which an anti-reflection film made of magnesium fluoride, similar to the anti-reflection film formed on the surface of inorganic glass, is formed on the surface of a plastic optical component, and Figure 3 (b) shows the structure. FIG. 3C is a diagram showing the spectral reflection characteristics, and FIG. 3(C) for comparison is a diagram showing the spectral resistance characteristics of the plastic optical component when no antireflection film is formed. In FIG. 2, 1 is a plastic optical component, and 5 is an antireflection film made of magnesium fluoride. The anti-reflection coating 5 is generally a vacuum stem 7. However, recently, plastic optical parts are heated at 60°C to 80°C to improve the adhesion and durability between the antireflection film and plastic optical parts.
A method of forming an antireflection film using a method of vacuum deposition by heating to °C or a method of RF bioion blating has been used.
発明が解決しよ−）とする課題
しかしながら、上記従来例において真空蒸着法によって
フン化マグネシウムからなる反射防止膜を形成する例で
は、プラスチックの流動温度、熱変形温度が低く、また
、プラスチック内部からの放出ガスの問題もあるため無
機ガラス基板に蒸着膜を形成する時に行う、基板加熱（
通常３００ ’Ｃ〜４００°Ｃ）によって強固な蒸着膜
の形成ができない。そのため、り０°Ｃ〜６０°Ｃ以下
の低温でプラスチック製光学部品の表面に反射防止膜を
形成していたが、この低温で形成された反射防止膜はプ
ラスチック表面上の密着性も悪く、耐久性も低いもので
ある。However, in the above-mentioned conventional example in which an antireflection film made of magnesium fluoride is formed by vacuum evaporation, the flow temperature and heat distortion temperature of the plastic are low, and There is also the issue of gas emissions, so substrate heating (
(usually 300'C to 400°C), it is not possible to form a strong deposited film. Therefore, antireflection films were formed on the surfaces of plastic optical components at low temperatures ranging from 0°C to 60°C, but antireflection films formed at these low temperatures also had poor adhesion to plastic surfaces. It also has low durability.
また、前記のようにプラスチ・／り製光学部品を６０°
Ｃ〜８０°Ｃに加熱したりＲＦビイオンブレーティング
法を用いて反射防止膜を形成した場合には、反射防止膜
にクラックが生じやすく、また形成時の条件を一定にし
、かつプラスチック表面の状態を一定に保持するのも困
難であり量産には適するものではない。さらに、第３図
（ｂ）に示すように、フッ化マグ７シウムの単層膜での
反射防止膜は、中心波長（λ。）において残存反射率が
約１．５％ありプラスチック製光学部品の反射防止膜と
しては充分の特性を持っていない。In addition, as mentioned above, the optical parts made of plasti/resist can be placed at 60°.
When an anti-reflective film is formed by heating to 80°C to 80°C or using the RF bio-ion blating method, cracks tend to occur in the anti-reflective film. It is also difficult to maintain a constant value, so it is not suitable for mass production. Furthermore, as shown in Figure 3(b), the anti-reflection coating made of a single layer of mag7sium fluoride has a residual reflectance of about 1.5% at the center wavelength (λ), and is used for plastic optical parts. It does not have sufficient properties as an antireflection film.
以上のように従来のプラスチック製光学部品の反射防止
膜には、プラスチック表面との密着性が悪く、耐久性に
も劣り、反射防止膜としての光学特性も充分でないとい
う課題を有していた。As described above, conventional antireflection films for plastic optical components have had the problems of poor adhesion to the plastic surface, poor durability, and insufficient optical properties as an antireflection film.
本発明は上記課題に鑑み、プラスチック製光学部品に対
してのｆ！着性、耐久性及び光学特性に優れた反射防止
膜を提供するものである。In view of the above problems, the present invention provides an f! The present invention provides an antireflection film with excellent adhesion, durability, and optical properties.
課題を解決するための手段
本発明は前記課題を解決するために、プラスチック製光
学部品の表面に、表面側から空気側へ順に、第１層、第
２層、第３層の３層構造の藤着膜を形成して反射防止膜
を構成する構造であって、第−層は一酸化ケイ素からな
り、第二層はチタン酸ジルコニウム、第３層は二酸化ケ
イ素からなることを特徴とする反射防止膜を提供するも
のである。Means for Solving the Problems In order to solve the problems described above, the present invention has a three-layer structure of a first layer, a second layer, and a third layer on the surface of a plastic optical component in order from the surface side to the air side. A structure in which an anti-reflection film is formed by forming a rattan film, the first layer being made of silicon monoxide, the second layer being made of zirconium titanate, and the third layer being made of silicon dioxide. It provides a protective film.
作用
本発明は、プラスチック製光学部品の表面に、−酸化ケ
イ素、チタン酸ジルコニウム、二酸化ケイ素からなる３
層反射防止膜を形成するものであり、その結果、密着性
、耐久性および光学特性に優れた反射防止膜を得ること
ができる。Function The present invention provides a method of applying a 3-layer compound consisting of silicon oxide, zirconium titanate, and silicon dioxide to the surface of a plastic optical component.
A layered antireflection film is formed, and as a result, an antireflection film with excellent adhesion, durability, and optical properties can be obtained.
実施例
以下本発明の一実施例について図面を参照しながら説明
する。EXAMPLE An example of the present invention will be described below with reference to the drawings.
第１図は本発明のプラスチック製光学部品の反射防止膜
の構成を示す図であり、第３図（ａ）にその分光反射特
性例を示す。第１図において、１はプラスチック製光学
部品、２は一酸化ケイ素からなる第１層、３はチタン酸
ジルコニウムからなる第２層、４は二酸化ケイ素からな
る第３層であり、本発明における具体的内容は第１表に
示す通りである。FIG. 1 is a diagram showing the structure of the antireflection film of the plastic optical component of the present invention, and FIG. 3(a) shows an example of its spectral reflection characteristics. In FIG. 1, 1 is a plastic optical component, 2 is a first layer made of silicon monoxide, 3 is a second layer made of zirconium titanate, and 4 is a third layer made of silicon dioxide. The contents are shown in Table 1.
第 １ 表
（λ、＝５５０η川）
またそれぞれの層はプラスチック製光学部品を６０’Ｃ
以下に保持した状態の下で、真空蒸着法により形成した
。Table 1 (λ, = 550η) Also, each layer is made of plastic optical components heated to 60'C.
It was formed by a vacuum evaporation method under the following conditions.
上記本発明の実施例の反射防止膜と従来の反射防止膜と
の密着性、耐久性を比較するために行った試験は、（＋
）粘着テープｔ７．ｌ＋離試験（温度４０°Ｃ相対湿度
８５％の高温・高温雰囲気中に３００時間放置した後、
粘着テープをプラスチック製光学部品表面に密着し、引
きはがす） 、（２）耐湿試験（温度４０°Ｃ２相対湿
度９５％の高温・高温雰囲気中に１０００時間放置）
、 （３）熱衝撃試験（温度−３０°Ｃ１７０°Ｃの低
温及び高温の雰囲気中に交互に３０分間ずつ放置を約１
００時間）であり、比較のための従来の反射防止膜は、
前記従来例の１つであるプラスチック製光学部品の表面
にフッ化マグネシウムの反射防止膜を真空蒸着法で、光
学的膜厚λ。／４（λ。＝５５０ｎｍ）の厚さに形成し
たものであり、第２図に示す構造のものである。密着性
、耐久性試験結果は第２表に示す通りである。A test was conducted to compare the adhesion and durability of the anti-reflective film of the above embodiment of the present invention and a conventional anti-reflective film.
) Adhesive tape t7. l+ separation test (after being left in a high temperature/high temperature atmosphere at a temperature of 40°C and a relative humidity of 85% for 300 hours,
(2) Humidity test (leave in a high temperature atmosphere at 40°C and 95% relative humidity for 1000 hours)
(3) Thermal shock test (temperature: -30°C to 170°C, left in low and high temperature atmosphere for 30 minutes alternately for about 1 hour)
00 hours), and the conventional antireflection coating for comparison is:
An anti-reflection film of magnesium fluoride is coated on the surface of a plastic optical component, which is one of the conventional examples, by vacuum evaporation to an optical film thickness of λ. /4 (λ.=550 nm), and has the structure shown in FIG. The results of the adhesion and durability tests are shown in Table 2.
（以 下 余 白）
第２表
第２表かられかるように本発明の反射防止膜は従来の反
射防止膜より、密着性、耐久性の点で優れている。さら
に、従来例は、反射防止膜形成時にクランクの発生が見
られたが本発明の実施例においては反射防止膜は常時安
定していた。分光反射特性に関しても第３図（ａ）から
れかるように中心波長（λ。＝５５０ｎｍ）で、反射率
約０．３％であり従来例より反射防止膜として優れてい
る。(Margin below) As can be seen from Table 2, the antireflection film of the present invention is superior to conventional antireflection films in terms of adhesion and durability. Further, in the conventional example, cranking was observed during formation of the antireflection film, but in the example of the present invention, the antireflection film was always stable. As for the spectral reflection characteristics, as can be seen from FIG. 3(a), the reflectance at the center wavelength (λ=550 nm) was about 0.3%, which is superior to the conventional example as an antireflection film.
なお、前記実施例では、各膜厚を第１表に示すようなも
のにしたが、膜厚は特に上記の値に限定されるものでは
なく、設計波長に応じて変化させれば良く、構造が第１
図に示すものであれば問題ない。In the above embodiment, each film thickness was set as shown in Table 1, but the film thickness is not particularly limited to the above values, and may be changed according to the design wavelength, and the film thickness may be changed according to the design wavelength. is the first
There is no problem as long as it is as shown in the figure.
発明の効果
以上の説明から明らかなように、本発明のプラスチック
製光学部品の反射防止膜は、−酸化ケイ素からなる第１
層、チタン酸ジルコニアからなる第２層、二酸化ケイ素
からなる第３層という構造をとることによって、プラス
チック製光学部品との密着性を高め、反射防止膜の耐久
性を向上すると共に、分光反射特性にも優れ、クラック
の発生も防げるため、従来例のもつ欠点を解消する効果
を有する。また、本発明のプラスチック製光学部品の反
射防止膜は量産にも適しているため、その実用上の価値
は大なるものがある。Effects of the Invention As is clear from the above explanation, the antireflection coating of the plastic optical component of the present invention has a primary coating made of silicon oxide.
By adopting a structure consisting of a layer, a second layer made of zirconia titanate, and a third layer made of silicon dioxide, it increases the adhesion with plastic optical parts, improves the durability of the anti-reflection coating, and improves spectral reflection characteristics. It also has the effect of eliminating the drawbacks of the conventional example, as it is excellent in terms of performance and prevents the occurrence of cracks. Furthermore, the antireflection film for plastic optical components of the present invention is suitable for mass production, and therefore has great practical value.
第１図は本発明のプラスチック製光学部品の反射防止膜
の構成図、第２図は従来のプラスチック製光学部品の反
射防止膜の構成図、第３図は分光反射特性を示すグラフ
である。
１・・・・・・プラスチック製光学部品、２・・・・・
・−酸化ケイ素からなる薄膜、３・・・・・・チタン酸
ジルコニウムからなる薄膜、４・・・・・・二酸化ケイ
素からなる薄膜、５・・・・・・フッ化マグネシウムか
らなる薄膜、（ａ）・・・・・・本発明の実施例におけ
るプラスチック製光学部品の反射防止膜の特性、６）・
・・・・・従来の、プラスチック製光学部品の反射防止
膜（フッ化マグネシウムからなる単層膜）の特性、（Ｃ
）・・・・・・反射防止膜を形成していないプラスチッ
ク製光学部品の特性。FIG. 1 is a block diagram of an antireflection film of a plastic optical component of the present invention, FIG. 2 is a block diagram of a conventional antireflection film of a plastic optical component, and FIG. 3 is a graph showing spectral reflection characteristics. 1...Plastic optical parts, 2...
- Thin film made of silicon oxide, 3... Thin film made of zirconium titanate, 4... Thin film made of silicon dioxide, 5... Thin film made of magnesium fluoride, ( a)...Characteristics of the antireflection film of the plastic optical component in the embodiments of the present invention, 6).
...Characteristics of conventional antireflection coatings (single-layer coatings made of magnesium fluoride) for plastic optical components, (C
)...Characteristics of plastic optical parts that do not have an anti-reflection coating.
Claims (1)
側に順に、第１層、第２層、第３層の３層構造の蒸着膜
を形成して反射防止膜を構成する構造であって、前記第
１層は一酸化ケイ素からなり、前記第２層はチタン酸ジ
ルコニウム、前記第３層は二酸化ケイ素からなることを
特徴とするプラスチック製光学部品の反射防止膜。A structure in which an antireflection film is formed by forming a three-layer vapor deposited film of a first layer, a second layer, and a third layer on the surface of a plastic optical component in order from the surface side to the air side, An antireflection coating for a plastic optical component, wherein the first layer is made of silicon monoxide, the second layer is made of zirconium titanate, and the third layer is made of silicon dioxide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63207045A JPH0687082B2 (en) | 1988-08-19 | 1988-08-19 | Anti-reflective coating for plastic optical parts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63207045A JPH0687082B2 (en) | 1988-08-19 | 1988-08-19 | Anti-reflective coating for plastic optical parts |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0255302A true JPH0255302A (en) | 1990-02-23 |
| JPH0687082B2 JPH0687082B2 (en) | 1994-11-02 |
Family
ID=16533293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63207045A Expired - Fee Related JPH0687082B2 (en) | 1988-08-19 | 1988-08-19 | Anti-reflective coating for plastic optical parts |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0687082B2 (en) |
-
1988
- 1988-08-19 JP JP63207045A patent/JPH0687082B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0687082B2 (en) | 1994-11-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |