JPS62183354U - - Google Patents

Info

Publication number
JPS62183354U
JPS62183354U JP7158686U JP7158686U JPS62183354U JP S62183354 U JPS62183354 U JP S62183354U JP 7158686 U JP7158686 U JP 7158686U JP 7158686 U JP7158686 U JP 7158686U JP S62183354 U JPS62183354 U JP S62183354U
Authority
JP
Japan
Prior art keywords
detection
inputting
images
types
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7158686U
Other languages
English (en)
Other versions
JPH0539560Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986071586U priority Critical patent/JPH0539560Y2/ja
Publication of JPS62183354U publication Critical patent/JPS62183354U/ja
Application granted granted Critical
Publication of JPH0539560Y2 publication Critical patent/JPH0539560Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)

Description

【図面の簡単な説明】
第１図は本考案の第１実施例のブロツク図、第
２図は本考案の第２実施例のブロツク図である。 Ｓ…試料、Ｂ…電子ビーム、１…Ｘ軸偏向コイ
ル、２…Ｙ軸偏向コイル、３…Ｘ軸偏向信号発生
器、４…Ｙ軸偏向信号発生器、５…Ｘ線分光検出
部、６…輝度変調器、７…Ｙ軸走査信号変調器、
８…ＣＲＴ、９…ＣＲＴ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 複数の映像の同時表示手段と、一種類の検出信
    号域は２種類の検出信号を入力させて、複数の映
    像信号を得る信号処理手段を備えたことを特徴と
    する荷電ビーム走査型分析装置。
JP1986071586U 1986-05-12 1986-05-12 Expired - Lifetime JPH0539560Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986071586U JPH0539560Y2 (ja) 1986-05-12 1986-05-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986071586U JPH0539560Y2 (ja) 1986-05-12 1986-05-12

Publications (2)

Publication Number Publication Date
JPS62183354U true JPS62183354U (ja) 1987-11-20
JPH0539560Y2 JPH0539560Y2 (ja) 1993-10-07

Family

ID=30914270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986071586U Expired - Lifetime JPH0539560Y2 (ja) 1986-05-12 1986-05-12

Country Status (1)

Country Link
JP (1) JPH0539560Y2 (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6073165U (ja) * 1983-10-25 1985-05-23 日本電子株式会社 走査電子顕微鏡

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6073165U (ja) * 1983-10-25 1985-05-23 日本電子株式会社 走査電子顕微鏡

Also Published As

Publication number Publication date
JPH0539560Y2 (ja) 1993-10-07

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