JPS62183354U - - Google Patents
Info
- Publication number
- JPS62183354U JPS62183354U JP7158686U JP7158686U JPS62183354U JP S62183354 U JPS62183354 U JP S62183354U JP 7158686 U JP7158686 U JP 7158686U JP 7158686 U JP7158686 U JP 7158686U JP S62183354 U JPS62183354 U JP S62183354U
- Authority
- JP
- Japan
- Prior art keywords
- detection
- inputting
- images
- types
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Description
第１図は本考案の第１実施例のブロツク図、第
２図は本考案の第２実施例のブロツク図である。 Ｓ…試料、Ｂ…電子ビーム、１…Ｘ軸偏向コイ
ル、２…Ｙ軸偏向コイル、３…Ｘ軸偏向信号発生
器、４…Ｙ軸偏向信号発生器、５…Ｘ線分光検出
部、６…輝度変調器、７…Ｙ軸走査信号変調器、
８…ＣＲＴ、９…ＣＲＴ。
２図は本考案の第２実施例のブロツク図である。 Ｓ…試料、Ｂ…電子ビーム、１…Ｘ軸偏向コイ
ル、２…Ｙ軸偏向コイル、３…Ｘ軸偏向信号発生
器、４…Ｙ軸偏向信号発生器、５…Ｘ線分光検出
部、６…輝度変調器、７…Ｙ軸走査信号変調器、
８…ＣＲＴ、９…ＣＲＴ。
Claims (1)
- 複数の映像の同時表示手段と、一種類の検出信
号域は２種類の検出信号を入力させて、複数の映
像信号を得る信号処理手段を備えたことを特徴と
する荷電ビーム走査型分析装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986071586U JPH0539560Y2 (ja) | 1986-05-12 | 1986-05-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986071586U JPH0539560Y2 (ja) | 1986-05-12 | 1986-05-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62183354U true JPS62183354U (ja) | 1987-11-20 |
| JPH0539560Y2 JPH0539560Y2 (ja) | 1993-10-07 |
Family
ID=30914270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986071586U Expired - Lifetime JPH0539560Y2 (ja) | 1986-05-12 | 1986-05-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0539560Y2 (ja) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6073165U (ja) * | 1983-10-25 | 1985-05-23 | 日本電子株式会社 | 走査電子顕微鏡 |
-
1986
- 1986-05-12 JP JP1986071586U patent/JPH0539560Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6073165U (ja) * | 1983-10-25 | 1985-05-23 | 日本電子株式会社 | 走査電子顕微鏡 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0539560Y2 (ja) | 1993-10-07 |
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