JPS6217743B2 - - Google Patents

Info

Publication number
JPS6217743B2
JPS6217743B2 JP56008626A JP862681A JPS6217743B2 JP S6217743 B2 JPS6217743 B2 JP S6217743B2 JP 56008626 A JP56008626 A JP 56008626A JP 862681 A JP862681 A JP 862681A JP S6217743 B2 JPS6217743 B2 JP S6217743B2
Authority
JP
Japan
Prior art keywords
glass
resist
mask
glass mask
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56008626A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57122437A (en
Inventor
Sadaaki Nishi
Isao Nagashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP862681A priority Critical patent/JPS57122437A/ja
Publication of JPS57122437A publication Critical patent/JPS57122437A/ja
Publication of JPS6217743B2 publication Critical patent/JPS6217743B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP862681A 1981-01-23 1981-01-23 Glass mask Granted JPS57122437A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP862681A JPS57122437A (en) 1981-01-23 1981-01-23 Glass mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP862681A JPS57122437A (en) 1981-01-23 1981-01-23 Glass mask

Publications (2)

Publication Number Publication Date
JPS57122437A JPS57122437A (en) 1982-07-30
JPS6217743B2 true JPS6217743B2 (enrdf_load_stackoverflow) 1987-04-20

Family

ID=11698154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP862681A Granted JPS57122437A (en) 1981-01-23 1981-01-23 Glass mask

Country Status (1)

Country Link
JP (1) JPS57122437A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5628600Y2 (enrdf_load_stackoverflow) * 1976-11-30 1981-07-07

Also Published As

Publication number Publication date
JPS57122437A (en) 1982-07-30

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