JPS5628600Y2 - - Google Patents

Info

Publication number
JPS5628600Y2
JPS5628600Y2 JP1976160650U JP16065076U JPS5628600Y2 JP S5628600 Y2 JPS5628600 Y2 JP S5628600Y2 JP 1976160650 U JP1976160650 U JP 1976160650U JP 16065076 U JP16065076 U JP 16065076U JP S5628600 Y2 JPS5628600 Y2 JP S5628600Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976160650U
Other languages
Japanese (ja)
Other versions
JPS5376774U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976160650U priority Critical patent/JPS5628600Y2/ja
Publication of JPS5376774U publication Critical patent/JPS5376774U/ja
Application granted granted Critical
Publication of JPS5628600Y2 publication Critical patent/JPS5628600Y2/ja
Expired legal-status Critical Current

Links

JP1976160650U 1976-11-30 1976-11-30 Expired JPS5628600Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976160650U JPS5628600Y2 (enrdf_load_stackoverflow) 1976-11-30 1976-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976160650U JPS5628600Y2 (enrdf_load_stackoverflow) 1976-11-30 1976-11-30

Publications (2)

Publication Number Publication Date
JPS5376774U JPS5376774U (enrdf_load_stackoverflow) 1978-06-27
JPS5628600Y2 true JPS5628600Y2 (enrdf_load_stackoverflow) 1981-07-07

Family

ID=28768511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976160650U Expired JPS5628600Y2 (enrdf_load_stackoverflow) 1976-11-30 1976-11-30

Country Status (1)

Country Link
JP (1) JPS5628600Y2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57122437A (en) * 1981-01-23 1982-07-30 Nec Corp Glass mask
JPS638900Y2 (enrdf_load_stackoverflow) * 1987-04-23 1988-03-16
JP7037445B2 (ja) * 2018-06-26 2022-03-16 クアーズテック株式会社 Ｉｃまたはｌｃｄフォトリソグラフィ用のフォトマスク用基板

Also Published As

Publication number Publication date
JPS5376774U (enrdf_load_stackoverflow) 1978-06-27

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