JPS62176532A - 真空処理装置の輸送装置 - Google Patents

真空処理装置の輸送装置

Info

Publication number
JPS62176532A
JPS62176532A JP1568786A JP1568786A JPS62176532A JP S62176532 A JPS62176532 A JP S62176532A JP 1568786 A JP1568786 A JP 1568786A JP 1568786 A JP1568786 A JP 1568786A JP S62176532 A JPS62176532 A JP S62176532A
Authority
JP
Japan
Prior art keywords
vacuum
vacuum processing
equipment
transportation
gate valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1568786A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0329453B2 (enExample
Inventor
Shunichi Asuka
飛鳥　俊一
Naoyuki Tamura
直行 田村
Norio Kanai
金井　謙雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1568786A priority Critical patent/JPS62176532A/ja
Publication of JPS62176532A publication Critical patent/JPS62176532A/ja
Publication of JPH0329453B2 publication Critical patent/JPH0329453B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Packages (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
JP1568786A 1986-01-29 1986-01-29 真空処理装置の輸送装置 Granted JPS62176532A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1568786A JPS62176532A (ja) 1986-01-29 1986-01-29 真空処理装置の輸送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1568786A JPS62176532A (ja) 1986-01-29 1986-01-29 真空処理装置の輸送装置

Publications (2)

Publication Number Publication Date
JPS62176532A true JPS62176532A (ja) 1987-08-03
JPH0329453B2 JPH0329453B2 (enExample) 1991-04-24

Family

ID=11895664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1568786A Granted JPS62176532A (ja) 1986-01-29 1986-01-29 真空処理装置の輸送装置

Country Status (1)

Country Link
JP (1) JPS62176532A (enExample)

Also Published As

Publication number Publication date
JPH0329453B2 (enExample) 1991-04-24

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