JPS6217367B2 - - Google Patents

Info

Publication number
JPS6217367B2
JPS6217367B2 JP53142372A JP14237278A JPS6217367B2 JP S6217367 B2 JPS6217367 B2 JP S6217367B2 JP 53142372 A JP53142372 A JP 53142372A JP 14237278 A JP14237278 A JP 14237278A JP S6217367 B2 JPS6217367 B2 JP S6217367B2
Authority
JP
Japan
Prior art keywords
film
etching
mask
resist
permalloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53142372A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5568610A (en
Inventor
Hiroshi Umezaki
Hideki Nishida
Norikazu Tsumita
Koji Yamada
Katsuhiro Kaneko
Yoshitsugu Koiso
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14237278A priority Critical patent/JPS5568610A/ja
Publication of JPS5568610A publication Critical patent/JPS5568610A/ja
Publication of JPS6217367B2 publication Critical patent/JPS6217367B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
    • H01F41/34—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)
JP14237278A 1978-11-20 1978-11-20 Preparing magnetic bubble memory element Granted JPS5568610A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14237278A JPS5568610A (en) 1978-11-20 1978-11-20 Preparing magnetic bubble memory element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14237278A JPS5568610A (en) 1978-11-20 1978-11-20 Preparing magnetic bubble memory element

Publications (2)

Publication Number Publication Date
JPS5568610A JPS5568610A (en) 1980-05-23
JPS6217367B2 true JPS6217367B2 (cs) 1987-04-17

Family

ID=15313843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14237278A Granted JPS5568610A (en) 1978-11-20 1978-11-20 Preparing magnetic bubble memory element

Country Status (1)

Country Link
JP (1) JPS5568610A (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4001061A (en) * 1975-03-05 1977-01-04 International Business Machines Corporation Single lithography for multiple-layer bubble domain devices

Also Published As

Publication number Publication date
JPS5568610A (en) 1980-05-23

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