JPS62173167A - 研摩方法および研摩装置 - Google Patents
研摩方法および研摩装置Info
- Publication number
- JPS62173167A JPS62173167A JP61009988A JP998886A JPS62173167A JP S62173167 A JPS62173167 A JP S62173167A JP 61009988 A JP61009988 A JP 61009988A JP 998886 A JP998886 A JP 998886A JP S62173167 A JPS62173167 A JP S62173167A
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- workpiece
- polished
- polishing tool
- tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61009988A JPS62173167A (ja) | 1986-01-22 | 1986-01-22 | 研摩方法および研摩装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61009988A JPS62173167A (ja) | 1986-01-22 | 1986-01-22 | 研摩方法および研摩装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62173167A true JPS62173167A (ja) | 1987-07-30 |
| JPH0379150B2 JPH0379150B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-12-17 |
Family
ID=11735253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61009988A Granted JPS62173167A (ja) | 1986-01-22 | 1986-01-22 | 研摩方法および研摩装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62173167A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100341922B1 (ko) * | 2001-12-20 | 2002-06-24 | 모유진 | 광커넥터 페룰용 연마기 |
| JP2003001560A (ja) * | 2001-06-22 | 2003-01-08 | Semiconductor Leading Edge Technologies Inc | 基板研磨装置、基板研磨方法及び半導体装置 |
-
1986
- 1986-01-22 JP JP61009988A patent/JPS62173167A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003001560A (ja) * | 2001-06-22 | 2003-01-08 | Semiconductor Leading Edge Technologies Inc | 基板研磨装置、基板研磨方法及び半導体装置 |
| KR100341922B1 (ko) * | 2001-12-20 | 2002-06-24 | 모유진 | 광커넥터 페룰용 연마기 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0379150B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-12-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |