JPS62172148U - - Google Patents
Info
- Publication number
- JPS62172148U JPS62172148U JP4594286U JP4594286U JPS62172148U JP S62172148 U JPS62172148 U JP S62172148U JP 4594286 U JP4594286 U JP 4594286U JP 4594286 U JP4594286 U JP 4594286U JP S62172148 U JPS62172148 U JP S62172148U
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- particle beam
- holder
- base
- rectangular hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 claims description 10
- 238000003384 imaging method Methods 0.000 claims 1
- 238000002039 particle-beam lithography Methods 0.000 claims 1
- 238000007493 shaping process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4594286U JPH0631717Y2 (ja) | 1986-03-28 | 1986-03-28 | 荷電粒子ビ−ム描画装置用整形絞り |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4594286U JPH0631717Y2 (ja) | 1986-03-28 | 1986-03-28 | 荷電粒子ビ−ム描画装置用整形絞り |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62172148U true JPS62172148U (enExample) | 1987-10-31 |
| JPH0631717Y2 JPH0631717Y2 (ja) | 1994-08-22 |
Family
ID=30865143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4594286U Expired - Lifetime JPH0631717Y2 (ja) | 1986-03-28 | 1986-03-28 | 荷電粒子ビ−ム描画装置用整形絞り |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0631717Y2 (enExample) |
-
1986
- 1986-03-28 JP JP4594286U patent/JPH0631717Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0631717Y2 (ja) | 1994-08-22 |
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