JPS6296841U - - Google Patents
Info
- Publication number
- JPS6296841U JPS6296841U JP18838585U JP18838585U JPS6296841U JP S6296841 U JPS6296841 U JP S6296841U JP 18838585 U JP18838585 U JP 18838585U JP 18838585 U JP18838585 U JP 18838585U JP S6296841 U JPS6296841 U JP S6296841U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- drawn
- electron beam
- holder body
- beam lithography
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18838585U JPS6296841U (enExample) | 1985-12-09 | 1985-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18838585U JPS6296841U (enExample) | 1985-12-09 | 1985-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6296841U true JPS6296841U (enExample) | 1987-06-20 |
Family
ID=31139696
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18838585U Pending JPS6296841U (enExample) | 1985-12-09 | 1985-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6296841U (enExample) |
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1985
- 1985-12-09 JP JP18838585U patent/JPS6296841U/ja active Pending