JPS61162053U - - Google Patents
Info
- Publication number
- JPS61162053U JPS61162053U JP1985044939U JP4493985U JPS61162053U JP S61162053 U JPS61162053 U JP S61162053U JP 1985044939 U JP1985044939 U JP 1985044939U JP 4493985 U JP4493985 U JP 4493985U JP S61162053 U JPS61162053 U JP S61162053U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- reference member
- pressing
- electron beam
- beam lithography
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985044939U JPS61162053U (enExample) | 1985-03-29 | 1985-03-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985044939U JPS61162053U (enExample) | 1985-03-29 | 1985-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61162053U true JPS61162053U (enExample) | 1986-10-07 |
Family
ID=30557979
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985044939U Pending JPS61162053U (enExample) | 1985-03-29 | 1985-03-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61162053U (enExample) |
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1985
- 1985-03-29 JP JP1985044939U patent/JPS61162053U/ja active Pending