JPS6217132U - - Google Patents

Info

Publication number
JPS6217132U
JPS6217132U JP9331686U JP9331686U JPS6217132U JP S6217132 U JPS6217132 U JP S6217132U JP 9331686 U JP9331686 U JP 9331686U JP 9331686 U JP9331686 U JP 9331686U JP S6217132 U JPS6217132 U JP S6217132U
Authority
JP
Japan
Prior art keywords
integrated circuit
electron beam
secondary electrons
integrated
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9331686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9331686U priority Critical patent/JPS6217132U/ja
Publication of JPS6217132U publication Critical patent/JPS6217132U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP9331686U 1986-06-20 1986-06-20 Pending JPS6217132U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9331686U JPS6217132U (enrdf_load_stackoverflow) 1986-06-20 1986-06-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9331686U JPS6217132U (enrdf_load_stackoverflow) 1986-06-20 1986-06-20

Publications (1)

Publication Number Publication Date
JPS6217132U true JPS6217132U (enrdf_load_stackoverflow) 1987-02-02

Family

ID=30955801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9331686U Pending JPS6217132U (enrdf_load_stackoverflow) 1986-06-20 1986-06-20

Country Status (1)

Country Link
JP (1) JPS6217132U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6427125U (enrdf_load_stackoverflow) * 1987-07-24 1989-02-16

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53135260A (en) * 1977-04-30 1978-11-25 Hitachi Ltd Sample stage of e lectron microscope or the like
JPS5693339A (en) * 1979-12-27 1981-07-28 Fujitsu Ltd Function test device of integrated circuit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53135260A (en) * 1977-04-30 1978-11-25 Hitachi Ltd Sample stage of e lectron microscope or the like
JPS5693339A (en) * 1979-12-27 1981-07-28 Fujitsu Ltd Function test device of integrated circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6427125U (enrdf_load_stackoverflow) * 1987-07-24 1989-02-16

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