JPS62170840A - 水素検知光センサ - Google Patents
水素検知光センサInfo
- Publication number
- JPS62170840A JPS62170840A JP61011093A JP1109386A JPS62170840A JP S62170840 A JPS62170840 A JP S62170840A JP 61011093 A JP61011093 A JP 61011093A JP 1109386 A JP1109386 A JP 1109386A JP S62170840 A JPS62170840 A JP S62170840A
- Authority
- JP
- Japan
- Prior art keywords
- hydrogen
- film
- waveguide
- hydrogen gas
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims abstract description 38
- 239000001257 hydrogen Substances 0.000 title claims abstract description 22
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 22
- 230000003287 optical effect Effects 0.000 title claims abstract description 20
- 150000002431 hydrogen Chemical class 0.000 claims abstract description 6
- 239000011248 coating agent Substances 0.000 claims abstract description 4
- 238000000576 coating method Methods 0.000 claims abstract description 4
- 230000031700 light absorption Effects 0.000 claims description 23
- 238000001514 detection method Methods 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 2
- 239000013307 optical fiber Substances 0.000 abstract description 14
- 239000000758 substrate Substances 0.000 abstract description 9
- 238000010438 heat treatment Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 5
- 239000012528 membrane Substances 0.000 abstract description 4
- 229910003327 LiNbO3 Inorganic materials 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 238000007740 vapor deposition Methods 0.000 abstract description 3
- 230000000274 adsorptive effect Effects 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 238000001771 vacuum deposition Methods 0.000 abstract 1
- 238000001179 sorption measurement Methods 0.000 description 16
- 239000010408 film Substances 0.000 description 13
- 239000010409 thin film Substances 0.000 description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- FRAALLYKYQKVNX-UHFFFAOYSA-N 1-phenyl-4-(1-phenylpyridin-1-ium-4-yl)pyridin-1-ium Chemical compound C1=CC=CC=C1[N+]1=CC=C(C=2C=C[N+](=CC=2)C=2C=CC=CC=2)C=C1 FRAALLYKYQKVNX-UHFFFAOYSA-N 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 235000018936 Vitellaria paradoxa Nutrition 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 210000005252 bulbus oculi Anatomy 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- OHSVLFRHMCKCQY-UHFFFAOYSA-N lutetium atom Chemical compound [Lu] OHSVLFRHMCKCQY-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61011093A JPS62170840A (ja) | 1986-01-23 | 1986-01-23 | 水素検知光センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61011093A JPS62170840A (ja) | 1986-01-23 | 1986-01-23 | 水素検知光センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62170840A true JPS62170840A (ja) | 1987-07-27 |
| JPH0513458B2 JPH0513458B2 (enrdf_load_html_response) | 1993-02-22 |
Family
ID=11768379
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61011093A Granted JPS62170840A (ja) | 1986-01-23 | 1986-01-23 | 水素検知光センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62170840A (enrdf_load_html_response) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62251637A (ja) * | 1986-04-24 | 1987-11-02 | Hochiki Corp | 水素センサ |
| JPH06235695A (ja) * | 1992-08-21 | 1994-08-23 | Boehringer Mannheim Gmbh | 液体試料分析用の分析要素 |
| JPH06242008A (ja) * | 1993-02-10 | 1994-09-02 | Draegerwerk Ag | ガス混合物のガス状成分及び／又は蒸気状成分の比色検出のための装置 |
| WO1995030889A1 (en) * | 1994-05-09 | 1995-11-16 | Unisearch Limited | Method and device for optoelectronic chemical sensing |
| JP2007248424A (ja) * | 2006-03-20 | 2007-09-27 | Atsumi Tec:Kk | 水素センサ |
| JP2009244262A (ja) * | 2008-03-28 | 2009-10-22 | General Electric Co <Ge> | 光ファイバガスセンサを備えた感知システム |
| KR100923104B1 (ko) | 2008-09-19 | 2009-10-27 | 전남대학교산학협력단 | 초음파를 이용한 광섬유 기체감지센서 |
| WO2010032979A3 (ko) * | 2008-09-19 | 2010-07-01 | 전남대학교산학협력단 | 초음파를 이용한 광섬유 센서 및 광섬유 기체감지센서 |
-
1986
- 1986-01-23 JP JP61011093A patent/JPS62170840A/ja active Granted
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62251637A (ja) * | 1986-04-24 | 1987-11-02 | Hochiki Corp | 水素センサ |
| JPH06235695A (ja) * | 1992-08-21 | 1994-08-23 | Boehringer Mannheim Gmbh | 液体試料分析用の分析要素 |
| JPH06242008A (ja) * | 1993-02-10 | 1994-09-02 | Draegerwerk Ag | ガス混合物のガス状成分及び／又は蒸気状成分の比色検出のための装置 |
| WO1995030889A1 (en) * | 1994-05-09 | 1995-11-16 | Unisearch Limited | Method and device for optoelectronic chemical sensing |
| JP2007248424A (ja) * | 2006-03-20 | 2007-09-27 | Atsumi Tec:Kk | 水素センサ |
| WO2007108276A1 (ja) * | 2006-03-20 | 2007-09-27 | Kabushiki Kaisha Atsumitec | 水素センサ |
| JP2009244262A (ja) * | 2008-03-28 | 2009-10-22 | General Electric Co <Ge> | 光ファイバガスセンサを備えた感知システム |
| KR100923104B1 (ko) | 2008-09-19 | 2009-10-27 | 전남대학교산학협력단 | 초음파를 이용한 광섬유 기체감지센서 |
| WO2010032979A3 (ko) * | 2008-09-19 | 2010-07-01 | 전남대학교산학협력단 | 초음파를 이용한 광섬유 센서 및 광섬유 기체감지센서 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0513458B2 (enrdf_load_html_response) | 1993-02-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |