JPS62170638U - - Google Patents
Info
- Publication number
- JPS62170638U JPS62170638U JP5910286U JP5910286U JPS62170638U JP S62170638 U JPS62170638 U JP S62170638U JP 5910286 U JP5910286 U JP 5910286U JP 5910286 U JP5910286 U JP 5910286U JP S62170638 U JPS62170638 U JP S62170638U
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- base
- direction parallel
- utility
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
第１図〜第４図は本考案の実施例の断面図、第
５図は従来の配線を示す断面図である。 １１，２１，３１，４１，５１…Ａ１配線、１
２，２２，３２，４２，５２…半絶縁性ＧａＡｓ
基板、３３，４３…ＳｉＯ２。
５図は従来の配線を示す断面図である。 １１，２１，３１，４１，５１…Ａ１配線、１
２，２２，３２，４２，５２…半絶縁性ＧａＡｓ
基板、３３，４３…ＳｉＯ２。
Claims (1)
- 半導体装置の配線において、配線を形成すべき
領域の下地に配線を流れるべき電流に対して平行
方向に段差が形成され、該段差側面を含む下地上
に配線が形成されてなることを特徴とする半導体
装置の配線。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5910286U JPS62170638U (ja) | 1986-04-18 | 1986-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5910286U JPS62170638U (ja) | 1986-04-18 | 1986-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62170638U true JPS62170638U (ja) | 1987-10-29 |
Family
ID=30890281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5910286U Pending JPS62170638U (ja) | 1986-04-18 | 1986-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62170638U (ja) |
-
1986
- 1986-04-18 JP JP5910286U patent/JPS62170638U/ja active Pending