JPS6359336U - - Google Patents
Info
- Publication number
- JPS6359336U JPS6359336U JP15305086U JP15305086U JPS6359336U JP S6359336 U JPS6359336 U JP S6359336U JP 15305086 U JP15305086 U JP 15305086U JP 15305086 U JP15305086 U JP 15305086U JP S6359336 U JPS6359336 U JP S6359336U
- Authority
- JP
- Japan
- Prior art keywords
- metal portion
- contact
- taper
- contact hole
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002161 passivation Methods 0.000 claims description 4
- 239000010953 base metal Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
第１図は本考案のパツシベーシヨンのコンタク
トホール部、第２図は従来のパツシベーシヨンの
コンタクトホール部である。 １……下地金属、２……パツシベーシヨン、３
……電極金属。
トホール部、第２図は従来のパツシベーシヨンの
コンタクトホール部である。 １……下地金属、２……パツシベーシヨン、３
……電極金属。
Claims (1)
- パツシベーシヨン膜をかいして、下地金属部と
電極金属部とのコンタクトをとる際、コンタクト
ホール部にテーパーを有する事を特徴とする半導
体素子。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15305086U JPS6359336U (ja) | 1986-10-03 | 1986-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15305086U JPS6359336U (ja) | 1986-10-03 | 1986-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6359336U true JPS6359336U (ja) | 1988-04-20 |
Family
ID=31071586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15305086U Pending JPS6359336U (ja) | 1986-10-03 | 1986-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6359336U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0311652A (ja) * | 1989-06-08 | 1991-01-18 | Nippon Telegr & Teleph Corp <Ntt> | 集積回路とその製造方法 |
-
1986
- 1986-10-03 JP JP15305086U patent/JPS6359336U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0311652A (ja) * | 1989-06-08 | 1991-01-18 | Nippon Telegr & Teleph Corp <Ntt> | 集積回路とその製造方法 |