JPS62170342A - Method of laminating green sheet - Google Patents
Method of laminating green sheetInfo
- Publication number
- JPS62170342A JPS62170342A JP61014002A JP1400286A JPS62170342A JP S62170342 A JPS62170342 A JP S62170342A JP 61014002 A JP61014002 A JP 61014002A JP 1400286 A JP1400286 A JP 1400286A JP S62170342 A JPS62170342 A JP S62170342A
- Authority
- JP
- Japan
- Prior art keywords
- green sheets
- green sheet
- laminating
- green
- laminating green
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 12
- 238000010030 laminating Methods 0.000 title claims description 8
- 238000007906 compression Methods 0.000 claims 1
- 238000003475 lamination Methods 0.000 description 6
- 239000011230 binding agent Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000002985 plastic film Substances 0.000 description 2
- 229920006255 plastic film Polymers 0.000 description 2
- 241000282373 Panthera pardus Species 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000004447 silicone coating Substances 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
- Press-Shaping Or Shaping Using Conveyers (AREA)
- Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、セラミック多層配線基板等の製造時に使用さ
れるグリーンシートの積層方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for laminating green sheets used in manufacturing ceramic multilayer wiring boards and the like.
従来の技術
従来、グリーンシートの積層方法としては、重ねられた
複数枚のグリーンシートに、温度が約80℃〜120℃
、圧力カ約1s o Kg/crA 〜26oKq/c
rAの条件で、プレス機によって熱圧着を行っていた。Conventional technology Conventionally, as a method for laminating green sheets, multiple stacked green sheets are stacked at a temperature of approximately 80°C to 120°C.
, pressure force approximately 1s o Kg/crA ~ 26oKq/c
Thermocompression bonding was performed using a press machine under rA conditions.
発明が解決しようとする問題点
積層されるグリーンシートの形状が、−辺がflcrn
の正方形であるとすると、積層時の圧力f P Kg/
crl 。Problems to be Solved by the Invention The shape of the green sheets to be stacked is
If it is a square, the pressure during stacking f P Kg/
crl.
その時グリーンシート全体にかかる荷重6MKりとした
場合、次式が成り立つ。If the load applied to the entire green sheet is 6MK at that time, the following formula holds true.
M=PxA2
よって、グリーンシートの一辺が長くなるに従って、プ
レス様に要求される加重能力は、グリーンシートの長さ
の二乗に比例して必要となってくる。M=PxA2 Therefore, as the side of the green sheet becomes longer, the load capacity required of the press becomes proportional to the square of the length of the green sheet.
コノ時、圧力P(D匝が従来(D 1s OKq/cr
A 〜2 S。At the time of confirmation, pressure P (D 匝 is conventional (D 1s OKq/cr
A~2S.
’I−g/crAでは、積層されるグリーンシートの大
きさが大きくなるに従ってプレス機は非常に大がかりな
ものになってしまう欠点を有し、また、熱圧着だけでは
、積層時の積層条件のバラツキにより積層不十分となり
、積層されたグリーンシートを焼成したときにデラミネ
ーシヲンと呼ばれる層間での剥離が生じることがあった
。本発明は、このよプレス機の小型化が可能となり、ま
た確実にグリーンシートに積層一体化できるグリーンシ
ートの積層方法を提供するものである。'I-g/crA has the disadvantage that the pressing machine becomes very large as the size of the green sheets to be laminated increases, and thermocompression bonding alone is not suitable for laminating conditions during lamination. Due to the variation, the lamination becomes insufficient, and when the laminated green sheets are fired, separation between the layers called delamination may occur. The present invention provides a method for laminating green sheets, which makes it possible to miniaturize the press machine and reliably integrate green sheets into one.
問題点を解決するための手段
本発明のグリーンシートの積層方法は、積層すべきグリ
ーンシートに超音波振動を与えながら熱圧着する方法で
ある。Means for Solving the Problems The method of laminating green sheets of the present invention is a method of thermocompression bonding while applying ultrasonic vibration to the green sheets to be laminated.
作 用
本発明のグリーンシートの積層方法によれば、グリーン
シートに超音波振動を与えながら熱圧着する事により、
グリーンシート中の有機成分である粘結剤が活性化し、
かつグリーンシート間の界面でこの粘結剤同志がこすれ
合うことにより、加えるべき圧力が、例えば、従来16
o Kg/cnl〜250 Kg/cni必要であっ
たが、本発明の方法によれば約20 Kg/crl 〜
30 K9/crtl で同程度の積層性が得られる。Function: According to the method of laminating green sheets of the present invention, by thermocompression bonding while applying ultrasonic vibration to the green sheets,
The organic component in the green sheet, the binder, is activated,
In addition, as the binder rubs against each other at the interface between the green sheets, the pressure to be applied is reduced, for example, compared to conventional 16
o Kg/cnl ~ 250 Kg/cni was required, but according to the method of the present invention, approximately 20 Kg/crl ~
30 K9/crtl gives the same level of lamination.
よって、プレス機は小型化されコストダウンとなり、か
つ確実にグリーンシートラ積層一体化できるものである
。Therefore, the press machine can be miniaturized, the cost can be reduced, and the green sheet lamination can be reliably integrated.
実施例
以下、本発明の一実施例を図面を参照して説明する。図
面に示すように、プレス機の土台部6上に超音波発振器
4とヒーター3の内蔵された金型2bを置き、さらにそ
の金型2b上には表面にシリコンコーティングされたプ
ラスチックフィルム6aと6bの間に重ねられた積層す
べき拶数枚のグリーンシート1を設置しておき、然る後
ヒーター3の内蔵された金型2aが下降し加重を加える
。EXAMPLE Hereinafter, an example of the present invention will be described with reference to the drawings. As shown in the drawing, a mold 2b with a built-in ultrasonic oscillator 4 and a heater 3 is placed on the base 6 of a press, and plastic films 6a and 6b whose surfaces are coated with silicon are placed on the mold 2b. Several green sheets 1 to be stacked are placed between the two, and then the mold 2a containing the heater 3 is lowered to apply weight.
この方法により、次に述べる2種類の条件にて実験を行
った。まず第1の条件として、超音波発振器4を非動作
状態とし、金型2a、2bの温度を約80℃、圧力を1
00KV福で2分間加えた場合、積層されたグリーンシ
ートは一見、積層一体化されているように見えたが、ピ
ンセットにてグリーンシートの一枚全剥離してみると、
容易に剥離された。第2の条件として、金型2a、2b
の温度全豹80℃、超音波発振器4の出力を200W(
周波数28 k)h )で動作状態とし、圧力ヲ20K
y/adで2分間加えた場合、積層されたグリーンシー
トは完全に一体化しており、ビンセットにてグリーンシ
ートの一枚を剥離しようとしても剥離する事は出来なか
った。前記の超音波発振器4の出力及び周波数を変化せ
しめて種々実験した結束出力で2ooW 〜2KW、周
波数で28k)h〜s。Using this method, experiments were conducted under the following two types of conditions. First, the first condition is that the ultrasonic oscillator 4 is inactive, the temperature of the molds 2a and 2b is approximately 80°C, and the pressure is 1.
When applying 00KV Fuku for 2 minutes, the stacked green sheets appeared to be integrated, but when I peeled off each green sheet with tweezers, I found that
peeled off easily. As a second condition, molds 2a and 2b
The temperature of the whole leopard is 80℃, and the output of ultrasonic oscillator 4 is 200W (
The operating state was set at a frequency of 28 k) h) and a pressure of 20 K.
When y/ad was applied for 2 minutes, the stacked green sheets were completely integrated, and even if one tried to peel off one of the green sheets with a bin set, it could not be peeled off. Various experiments were conducted by changing the output and frequency of the ultrasonic oscillator 4, and the bundling output was 2ooW to 2KW, and the frequency was 28Kh to s.
北で良好な結果が得られた。Good results were obtained in the north.
発明の効果
以上のように、本発明のグリーンシート積層方法によれ
ば、積層すべき複数枚のグリーンシートに超音波振動を
与えながら熱圧着することにより、加えるべき必要な加
重を軽減できる為、プレス機の小型化が可能となること
によりコストダウンとなり、かつ確実に積層一体化が可
能となる実用上極めて有用な発明である。Effects of the Invention As described above, according to the green sheet lamination method of the present invention, by thermocompression bonding while applying ultrasonic vibration to a plurality of green sheets to be laminated, the necessary load to be applied can be reduced. This invention is extremely useful in practice, as it enables the press machine to be made smaller, thereby reducing costs, and also making it possible to reliably integrate the layers.
図面は、本発明のグリーンシートの積層方法に使用され
るプレス装置の一実施例の断面図である。
1・・・・・・グリーンシート、2a、2b・・・・・
・金型、3・・・・・・ヒーター、4・・・・・・超音
波発振器、6・・・・・・プレス機の土台、6a、6b
・・・・・・表面にシリコンコーティングされたプラス
チックフィルム。
代理人の氏名 弁理士 中 尾 敏 男 ほか1名/−
−− グリーンシート
24.24−−一全を
、5−m−と一タ
4−−一喝fr涙虎1良各
σ”−ブレ入感のよ一台
ム、ムーーーボン面l−ン°ノコンコーティングご収h
l°フスナック74ルAThe drawing is a sectional view of one embodiment of a press device used in the green sheet lamination method of the present invention. 1...Green sheet, 2a, 2b...
・Mold, 3...Heater, 4...Ultrasonic oscillator, 6...Press machine base, 6a, 6b
...Plastic film with silicone coating on the surface. Name of agent: Patent attorney Toshio Nakao and 1 other person/-
--Green sheet 24.24--One complete, 5-m-and one-tall 4--One-shot fr 1-good each σ"-One unit with a feeling of blur, Moo-bon surface l-n°con coating Payment h
l°fusnak74ruA
Claims (1)
えながら熱圧着することを特徴とするグリーンシートの
積層方法。A method for laminating green sheets, which comprises thermo-compression bonding a plurality of green sheets to be laminated while applying ultrasonic vibrations.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61014002A JPS62170342A (en) | 1986-01-24 | 1986-01-24 | Method of laminating green sheet |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61014002A JPS62170342A (en) | 1986-01-24 | 1986-01-24 | Method of laminating green sheet |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62170342A true JPS62170342A (en) | 1987-07-27 |
Family
ID=11849009
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61014002A Pending JPS62170342A (en) | 1986-01-24 | 1986-01-24 | Method of laminating green sheet |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62170342A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6442808A (en) * | 1987-08-10 | 1989-02-15 | Murata Manufacturing Co | Manufacture of laminated ceramic capacitor |
JPH03108502A (en) * | 1989-09-22 | 1991-05-08 | Yokogawa Electric Corp | Laminating method for green sheet |
JPH04282813A (en) * | 1991-03-11 | 1992-10-07 | Taiyo Yuden Co Ltd | Method and apparatus for laminating ceramic green sheet |
-
1986
- 1986-01-24 JP JP61014002A patent/JPS62170342A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6442808A (en) * | 1987-08-10 | 1989-02-15 | Murata Manufacturing Co | Manufacture of laminated ceramic capacitor |
JPH03108502A (en) * | 1989-09-22 | 1991-05-08 | Yokogawa Electric Corp | Laminating method for green sheet |
JPH04282813A (en) * | 1991-03-11 | 1992-10-07 | Taiyo Yuden Co Ltd | Method and apparatus for laminating ceramic green sheet |
JPH0779069B2 (en) * | 1991-03-11 | 1995-08-23 | 太陽誘電株式会社 | Method and apparatus for laminating ceramic green sheet |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN106852032A (en) | A kind of flexible metal base plate and preparation method thereof | |
JPS62170342A (en) | Method of laminating green sheet | |
JP4201882B2 (en) | Laminate production method | |
JPH03250612A (en) | Manufacture of laminated ceramic parts | |
JP2003501284A5 (en) | Method of joining face material to substrate | |
JP2979330B2 (en) | Elastic material sheet with adhesive for manufacturing electronic parts and method for manufacturing laminated chip parts | |
JP2003258583A (en) | Manufacturing method of chip type electronic component | |
JPH09181449A (en) | Method for manufacturing ceramic multilayer board | |
JP5038627B2 (en) | Method for laminating ceramic green sheets | |
JPS6353030A (en) | Manufacture of ceramic laminate | |
JPS594638U (en) | Adhesive thin plate for fixing semiconductor wafers | |
JP2004221099A (en) | Method for manufacturing laminated ceramic electronic component | |
JP2001111224A (en) | Method and apparatus for manufacturing multilayer ceramic board | |
JPH0457119B2 (en) | ||
JPH03148196A (en) | Lamination of green sheet | |
JPS58202586A (en) | Method of producing printed circuit board | |
JPH0794359A (en) | Manufacture of laminated ceramic electronic component | |
JP4045472B2 (en) | Wiring board manufacturing method | |
JP2001199005A (en) | Copper foil laminate, method of manufacturing the same and method for manufacturing printed circuit board | |
JPS6356995A (en) | Manufacture of multilayer circuit laminated board | |
CN115515310A (en) | Method for processing inner layer of capacitor-embedded material | |
JPH11268023A (en) | Manufacture of green sheet laminate | |
JPH0498894A (en) | Manufacture of ceramic multilayer wiring board | |
JPS58202587A (en) | Method of producing printed circuit board | |
JP2625367B2 (en) | Method for manufacturing multilayer wiring board |