JP2625367B2 - Method for manufacturing multilayer wiring board - Google Patents

Method for manufacturing multilayer wiring board

Info

Publication number
JP2625367B2
JP2625367B2 JP5316170A JP31617093A JP2625367B2 JP 2625367 B2 JP2625367 B2 JP 2625367B2 JP 5316170 A JP5316170 A JP 5316170A JP 31617093 A JP31617093 A JP 31617093A JP 2625367 B2 JP2625367 B2 JP 2625367B2
Authority
JP
Japan
Prior art keywords
green sheet
camera
wiring board
multilayer wiring
adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP5316170A
Other languages
Japanese (ja)
Other versions
JPH07170075A (en
Inventor
治 新井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP5316170A priority Critical patent/JP2625367B2/en
Publication of JPH07170075A publication Critical patent/JPH07170075A/en
Application granted granted Critical
Publication of JP2625367B2 publication Critical patent/JP2625367B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

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  • Production Of Multi-Layered Print Wiring Board (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は多層配線基板の製造方法
に関し特に、大型コンピュータで使用されるセラミック
ス多層配線基板の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a multilayer wiring board, and more particularly to a method for manufacturing a ceramic multilayer wiring board used in a large-sized computer.

【0002】[0002]

【従来の技術】高密度化や高多層化の要求の中で内層回
路パターンとスルーホール間の寸法ズレを防止するため
特開昭63−173391号公報は積層体の周辺部に対
抗して設けられた一枚の開孔部に基準ピンを挿入する技
術が開示されている。
2. Description of the Related Art Japanese Unexamined Patent Publication (Kokai) No. 63-173391 is provided in order to prevent a dimensional deviation between an inner layer circuit pattern and a through hole in response to demands for higher density and higher multilayer. There is disclosed a technique for inserting a reference pin into one of the openings provided.

【0003】[0003]

【発明が解決しようとする課題】この従来の多層配線基
板の製造方法では基板サイズが小さかったりスルーホー
ル径、スルーホールピッチが大きい場合は特に問題とさ
れないが、コンピュータの高速化のため高密度配線が必
要となってくると、積層精度が悪いという形で現われて
くる。特にこの時はグリーンシートの厚さが薄くなるた
め、グリーンシート単体での取り扱いが困難となる。
In the conventional method of manufacturing a multilayer wiring board, there is no particular problem when the board size is small or the through hole diameter and through hole pitch are large. When this becomes necessary, it appears in the form of poor lamination accuracy. In particular, at this time, the thickness of the green sheet becomes thin, so that it is difficult to handle the green sheet alone.

【0004】[0004]

【課題を解決するための手段】本発明のセラミックス多
層配線基板の製造方法は積層する前のグリーンシート全
面に接着剤を均一に塗布する工程と、基準となる一枚目
のグリーンシートとカメラで位置合わせをして積層金型
にあるガイドピンに差し込んで仮接着する工程と、仮接
着後グリーンシートを切断する工程とを備えている。ま
た、保護フィルムを貼ったまま印刷まで行なうプロセス
の場合は、グリーンシート切断後保護フィルムを剥離す
る工程がある。
According to the method for manufacturing a ceramic multilayer wiring board of the present invention, a step of uniformly applying an adhesive to the entire surface of a green sheet before laminating is performed, and the first green sheet as a reference and a camera are used. The method includes a step of aligning and inserting into a guide pin in a lamination mold to perform temporary bonding, and a step of cutting the green sheet after the temporary bonding. Further, in the case of a process in which printing is performed with the protective film adhered, there is a step of peeling the protective film after cutting the green sheet.

【0005】[0005]

【実施例】本発明の一実施例について図面を参照して詳
細に説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described in detail with reference to the drawings.

【0006】図1(A)を参照すると本発明の一実施例
の前工程は以下の通りである。すなわち、成膜に用いた
キャリアフィルムがそのまま保護フィルム1として利用
され、ステンレス枠2に貼られスルーホールが形成され
る。その後導体ペーストの充填後、パターンが印刷され
る。この構成のグリーンシートが積層金型3の中へ積層
される準備として片面にシリコンコートが施してあるポ
リエチレンフィルムのシリコンコート面がステンレス枠
2に接着剤で貼られる。このポリエチレンフィルムに位
置合わせおよびガイドピン4を差し込むため4つのスル
ーホールが形成される。積層金型3の下型5の全面に接
着剤が均一に塗布される。用意されたポリエチレンフィ
ルムに形成されたスルーホールと、下型5から出ている
ガイドピン4とがカメラ6で位置合わせされる。位置合
わせができたら下型5が徐々に上げられていき、ガイド
ピン4がスルーホールに差し込まれる。次に、下型5と
ポリエチレンフィルムとが密着され切断される。以上で
積層金型3の準備は完了である。
Referring to FIG. 1A, the pre-process of one embodiment of the present invention is as follows. That is, the carrier film used for film formation is used as it is as the protective film 1 and is attached to the stainless steel frame 2 to form a through hole. Then, after filling with the conductive paste, the pattern is printed. As a preparation for laminating the green sheet having this configuration into the lamination mold 3, the silicon-coated surface of the polyethylene film having one surface coated with silicon is adhered to the stainless steel frame 2 with an adhesive. Four through holes are formed in the polyethylene film for positioning and inserting the guide pins 4. The adhesive is uniformly applied to the entire surface of the lower mold 5 of the multilayer mold 3. The through hole formed in the prepared polyethylene film and the guide pin 4 coming out of the lower mold 5 are aligned by the camera 6. When the positioning is completed, the lower mold 5 is gradually raised, and the guide pins 4 are inserted into the through holes. Next, the lower mold 5 and the polyethylene film are brought into close contact with each other and cut. Preparation of the lamination mold 3 is thus completed.

【0007】次に図1(A)のグリーンシートのパター
ン印刷面に500°C程度までで完全に熱分解してしま
う接着剤が図2のように噴霧法で均一に塗布される。こ
の時の塗布厚は、10μm以下に制御されている。この
図1(B)に示される接着剤塗布工程でグリーンシート
の準備も完了である。まず準備した積層金型3の下型5
が2〜3mm程度、シート切断刃の上面より下げられ
る。
Next, an adhesive which is completely thermally decomposed up to about 500 ° C. is uniformly applied to the pattern printing surface of the green sheet of FIG. 1A by a spraying method as shown in FIG. At this time, the coating thickness is controlled to 10 μm or less. The preparation of the green sheet is also completed in the adhesive application step shown in FIG. First, the lower mold 5 of the prepared laminated mold 3
Is about 2 to 3 mm lower than the upper surface of the sheet cutting blade.

【0008】図1(C)を参照すると、これに接着剤の
塗布されたグリーンシートがセットされ、位置合わせお
よびガイドピン4を差し込むためのスルーホールとカメ
ラ6との位置が合わせられる。
Referring to FIG. 1C, a green sheet to which an adhesive is applied is set thereon, and the position of a through hole for positioning and inserting a guide pin 4 and the position of the camera 6 are aligned.

【0009】図1(D)を参照すると、位置合わせ終了
後下型5が徐々に上げられ、スルーホールに差し込まれ
グリーンシートと下型5とが密着される。
Referring to FIG. 1D, after the positioning is completed, the lower mold 5 is gradually raised, inserted into the through hole, and the green sheet and the lower mold 5 are brought into close contact with each other.

【0010】図1(E)を参照すると、この状態で積層
金型3の上型7が下降され、グリーンシートが切断さ
れ、そのまま上型7で圧力がかけられてポリエチレンフ
ィルムとグリーンシートとが接着される。
Referring to FIG. 1E, in this state, the upper mold 7 of the laminated mold 3 is lowered, the green sheet is cut, and pressure is applied by the upper mold 7 to separate the polyethylene film and the green sheet. Glued.

【0011】図1(F)を参照すると、接着後は上型7
を上昇させて、グリーンシートに貼られていた保護フィ
ルム1が粘着ロール8を用いて剥離される。2層目以降
のグリーンシートも同様にして積層されていく。
Referring to FIG. 1F, after bonding, the upper mold 7 is formed.
And the protective film 1 stuck on the green sheet is peeled off using the adhesive roll 8. The second and subsequent green sheets are similarly laminated.

【0012】[0012]

【発明の効果】以上説明したように本発明は、位置合わ
せをしてそのまま基準となるグリーンシートへ固定して
から切断するという積層方法をとっているので積層ズレ
が全くないセラミックス多層配線基板を製造することが
できる。
As described above, the present invention employs a laminating method of positioning, fixing the green sheet to a reference green sheet as it is, and then cutting it. Can be manufactured.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例を示すフローチャート。FIG. 1 is a flowchart showing an embodiment of the present invention.

【図2】図1(B)に示した接着剤塗布方法を説明する
ための図。
FIG. 2 is a view for explaining the adhesive application method shown in FIG. 1 (B).

【符号の説明】[Explanation of symbols]

1 保護フィルム 2 ステンレス枠 3 積層金型 4 ガイドピン 5 下型 6 カメラ 7 上型 8 粘着ロール DESCRIPTION OF SYMBOLS 1 Protective film 2 Stainless steel frame 3 Lamination mold 4 Guide pin 5 Lower mold 6 Camera 7 Upper mold 8 Adhesive roll

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 一方の主面に可撓性フィルムが貼付され
たグリーンシートの他方の主面に接着剤を均一に塗布す
る接着剤塗布工程と、 この接着剤塗布工程で塗布された前記グリーンシートの
前記接着剤塗布面と積層金型とを対向させ位置合わせを
した後該積層金型に設けられたガイドピンに差し込んで
仮接着する位置合わせ仮接着工程と、 この位置合わせ仮接着工程で仮接着されたグリーンシー
トを所定の大きさに切断する切断工程と この切断工程により切断された前記グリーンシートから
前記可撓性フィルムを剥離する剥離工程と を含むことを
特徴とする多層配線基板の製造方法。
1. A flexible film is adhered to one main surface.
An adhesive application step of uniformly applying an adhesive on the other main surface of the green sheet, and the green sheet applied in the adhesive application step .
The adhesive application surface and the lamination mold are opposed to each other for alignment.
And aligning temporary bonding step of inserting is temporarily adhered to the guide pin provided on the stacked die after a cutting step of cutting the temporarily bonded green sheets in this alignment temporary bonding step to a predetermined size, From the green sheet cut in this cutting step
And a peeling step of peeling the flexible film .
【請求項2】 1枚目に積層したグリーンシートのスル
ーホールの位置を前記位置合わせ仮接着工程においてカ
メラで確認してカメラを固定し、2枚目以降のグリーン
シートを固定したカメラで位置合わせして前記ガイドピ
ンに差し込んで積層することを特徴とする請求項1記載
の多層配線基板の製造方法。
2. The position of the through hole of the first laminated green sheet is confirmed by a camera in the alignment temporary bonding step, the camera is fixed, and the second and subsequent green sheets are fixed by the camera. 2. The method for manufacturing a multilayer wiring board according to claim 1, wherein the stacking is performed by inserting into the guide pins.
JP5316170A 1993-12-16 1993-12-16 Method for manufacturing multilayer wiring board Expired - Fee Related JP2625367B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5316170A JP2625367B2 (en) 1993-12-16 1993-12-16 Method for manufacturing multilayer wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5316170A JP2625367B2 (en) 1993-12-16 1993-12-16 Method for manufacturing multilayer wiring board

Publications (2)

Publication Number Publication Date
JPH07170075A JPH07170075A (en) 1995-07-04
JP2625367B2 true JP2625367B2 (en) 1997-07-02

Family

ID=18074073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5316170A Expired - Fee Related JP2625367B2 (en) 1993-12-16 1993-12-16 Method for manufacturing multilayer wiring board

Country Status (1)

Country Link
JP (1) JP2625367B2 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2501928B2 (en) * 1990-02-19 1996-05-29 富士通株式会社 Green sheet stacking method
JPH04321295A (en) * 1991-02-28 1992-11-11 Toppan Printing Co Ltd Manufacture of printed-wiring board

Also Published As

Publication number Publication date
JPH07170075A (en) 1995-07-04

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