JPS62169120A - Space optical modulator - Google Patents
Space optical modulatorInfo
- Publication number
- JPS62169120A JPS62169120A JP61011383A JP1138386A JPS62169120A JP S62169120 A JPS62169120 A JP S62169120A JP 61011383 A JP61011383 A JP 61011383A JP 1138386 A JP1138386 A JP 1138386A JP S62169120 A JPS62169120 A JP S62169120A
- Authority
- JP
- Japan
- Prior art keywords
- film
- light
- transparent electrode
- liquid crystal
- photoconductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title abstract description 8
- 239000002184 metal Substances 0.000 claims abstract description 28
- 229910052751 metal Inorganic materials 0.000 claims abstract description 28
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 239000011521 glass Substances 0.000 claims abstract description 8
- 239000011159 matrix material Substances 0.000 claims abstract description 6
- 239000007788 liquid Substances 0.000 claims 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 abstract description 4
- 229910001887 tin oxide Inorganic materials 0.000 abstract description 4
- 239000004020 conductor Substances 0.000 abstract description 3
- 238000001259 photo etching Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 description 51
- 239000010409 thin film Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011358 absorbing material Substances 0.000 description 1
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、光アドレス型の空間光変調器に関するＯ
〔発明の概要〕
本発明は・光アドレス型の空間光変調器において、反射
面をマ） ＩＪクス配列した金属薄膜とすることにより
、読み出し光の光強度を増加したものである。Detailed Description of the Invention [Industrial Field of Application] The present invention relates to an optically addressed spatial light modulator. M) The light intensity of the readout light is increased by using a metal thin film arranged in an IJ pattern.
従来の光アドレス型の空間光変調器は、第２図に示すよ
うにガラス基２１．２８をはさんで透明電極２２一液晶
２３−反射膜２４−光吸収膜２５−光導電膜２６−透明
電極２７の構造となっており、光導電膜２６に照射され
る光量により光導電膜の抵抗値が変化し・透明電極２２
．２７の間に一定電圧が印加されているため、光量によ
り液晶に印加される電圧は変化する。As shown in FIG. 2, a conventional optically addressed spatial light modulator includes a transparent electrode 22, a liquid crystal 23, a reflective film 24, a light absorbing film 25, a photoconductive film 26, and a transparent conductive film 26. The structure of the electrode 27 is such that the resistance value of the photoconductive film changes depending on the amount of light irradiated onto the photoconductive film 26.
．． Since a constant voltage is applied between 27 and 27, the voltage applied to the liquid crystal changes depending on the amount of light.
すなわち、光社変化による光情報を液晶に印加する電圧
変化に変換し、■Ｌ電圧変化よる液晶の複屈折効果を利
用してＵＭ偏光した光を照射することで、反射面で反射
して来る光は楕円偏光となり、光情報に変換される。し
たがって出力側に偏光子を置くことにより空間強度分布
を得ることができる０
〔発明が解決しようとする問題点〕
しかし、前述の従来技術では、反射膜が誘電性物質から
なっている。これは導電性物質で反射膜を形成した場合
、光導電膜の変化による電圧変化が導電反射膜で平均化
され液晶に加わる電圧が平均化され光情報が伝達されな
くなる０誘電性膜の反射面は金属面に比べ反射率が低い
ため、光出力が小さくなる。また誘電体であることから
反射膜による電圧損失がありｌ！接極間印加する電圧は
高くなる。そこで本発明はこのような問題点を解決する
もので、その目的とするところは光出力を大きくするこ
とにある。In other words, the optical information caused by the light change is converted into a voltage change applied to the liquid crystal, and the birefringence effect of the liquid crystal due to the L voltage change is used to irradiate UM polarized light, which is reflected on the reflective surface. The light becomes elliptically polarized and converted into optical information. Therefore, by placing a polarizer on the output side, a spatial intensity distribution can be obtained. [Problems to be Solved by the Invention] However, in the above-mentioned prior art, the reflective film is made of a dielectric material. This is because when a reflective film is formed with a conductive material, voltage changes due to changes in the photoconductive film are averaged out by the conductive reflective film, and the voltage applied to the liquid crystal is averaged, resulting in no longer transmitting optical information on the reflective surface of the zero-dielectric film. has a lower reflectance than a metal surface, resulting in lower light output. Also, since it is a dielectric material, there is voltage loss due to the reflective film! The voltage applied between the electrodes becomes higher. The present invention is intended to solve these problems, and its purpose is to increase the optical output.
本発明の空間光変調器は、反射面を金属薄膜で形成し、
しかも金属薄膜はマトリクス状に配列し、それぞれが電
気的に分離されていることを特徴とする〇
〔作 用〕
本発明の上記の構成によれば、反射面を金属膜とするこ
とにより、反射率が高くなり光出力の大きな空間光変調
器が得られる。The spatial light modulator of the present invention has a reflective surface formed of a metal thin film,
Moreover, the metal thin film is arranged in a matrix -shaped shape, and each is characterized by being electrically separated. As a result, a spatial light modulator with a high light output can be obtained.
しかも金属反射膜はマトリクス状に小片状に分離されて
いることから電気的に独立しており光入力情報はそのま
ま液晶に伝達され光出力される◇〔実施例１〕
第１図は、本発明の実施例における空間光変調器の断面
図である。ガラス基板１上に透明電極２、光導電膜３、
光吸収膜４、金属反射膜５を形成した基板と、ガラス基
板６上に透明電極７を形成した基板とを液晶の配向処理
して液晶８を封入して空間光変調器となすり
透明電極は、工Ｔｏ（工ｎｄｉｕｍ Ｔｉｎ ０ｘｉ
ｄｅ）あるいはスズ酸化膜等通常使用されている透明導
電体で構成し、光導電膜はＣａＳやσ−３１等の光導電
物で構成する・金属反射膜は・ｋｌ、、Ｎｉ、Ｃデ、Ｍ
Ｏ９Ｔａ、Ｗ等の金属薄膜であり、フォトエツチングに
よりモザイク形状に画素パターンをマトリクス状に形成
しである。モザイク状に形成した金属反射画素パターン
は、電気的に分離されている。Moreover, since the metal reflective film is separated into small pieces in a matrix, they are electrically independent, and the optical input information is directly transmitted to the liquid crystal and output as light. FIG. 2 is a cross-sectional view of a spatial light modulator in an embodiment of the invention. A transparent electrode 2, a photoconductive film 3, on a glass substrate 1,
A substrate on which a light absorption film 4 and a metal reflection film 5 are formed, and a substrate on which a transparent electrode 7 is formed on a glass substrate 6 are subjected to liquid crystal alignment treatment, and a liquid crystal 8 is sealed therein to form a spatial light modulator and a transparent electrode is formed. is To(Indium Tin 0xi)
de) Or it is made of a commonly used transparent conductor such as a tin oxide film, and the photoconductive film is made of a photoconductor such as CaS or σ-31.The metal reflective film is made of kl, Ni, C de, etc. M
It is a metal thin film of O9Ta, W, etc., and has a pixel pattern formed in a mosaic shape in a matrix by photo-etching. The metal reflective pixel patterns formed in a mosaic shape are electrically isolated.
光吸収率の大きなものを選ぶ。Choose one with high light absorption.
〔実施例２〕
実施例１における光吸収膜のかわりに金属反射膜５を遮
光膜として、金属反射膜の隙間は、対向基板上に遮光膜
を形成して光がもれるのを防止する０
第３図に示すようにガラス基板１上に透明電極２を形成
するつ透明電極としては、工ＴＯやスズ酸化膜等の透過
率がよく抵抗の小さなものがよい。[Example 2] The metal reflective film 5 is used as a light-shielding film instead of the light-absorbing film in Example 1, and the gap between the metal reflective films is filled with a light-shielding film formed on the opposing substrate to prevent light from leaking. As shown in FIG. 3, the transparent electrode 2 formed on the glass substrate 1 is preferably one having high transmittance and low resistance, such as a tin oxide film or a tin oxide film.
透明［極２の上に光センサとして光導電膜３を形成する
０光導電膜としては、０（１８，σ−Ｅ３ｉ等が使用さ
れる。この光導電膜上に金属膜を形成してフォトエツチ
ングによりモザイク状の画素パターンをマ） ＩＪクス
状に形成して金属反射膜５となす。0(18,σ-E3i, etc.) is used as the photoconductive film that forms the photoconductive film 3 as a photosensor on the transparent [pole 2].A metal film is formed on this photoconductive film and the photo By etching, a mosaic pixel pattern is formed in the shape of an IJ box to form the metal reflective film 5.
他方のガラス基板６に透明電極７を形成し、さらに透明
電極Ｚ上に遮光膜９を前記画素パターンの隙間をおおう
ようにパターン形成する。遮光材としては、金属、半導
体、無機及び有機の吸収光材が考えられる。第３図は透
明電極上に遮光膜を形成したが、遮光膜を形成して遮光
腰上に形成してもよい。以上の２基板を実施例１と同様
にして液晶８を封入して空間光変調器となす。A transparent electrode 7 is formed on the other glass substrate 6, and a light shielding film 9 is further patterned on the transparent electrode Z so as to cover the gap between the pixel patterns. As the light shielding material, metals, semiconductors, inorganic and organic light absorbing materials can be considered. In FIG. 3, a light-shielding film is formed on the transparent electrode, but a light-shielding film may be formed on the light-shielding plate. The above two substrates are sealed with liquid crystal 8 in the same manner as in Example 1 to form a spatial light modulator.
〔実施例３〕
実施例１における光吸収膜のかわりに金属反射膜５を遮
光膜として金属反射膜の隙間は、遮光膜パターンにより
光がもれるのを防止する。[Example 3] A metal reflective film 5 is used as a light shielding film instead of the light absorbing film in Example 1, and the gap between the metal reflective films prevents light from leaking due to the light shielding film pattern.
第４図に示すようにガラス基板１上に透明１！極２を形
成し、透明電極２上に遮光膜９を形成し、フォトエツチ
ングにより所定の形状になす。さらに光導電膜３、金属
膜を積層し、金Ｎ膜を７オトエノチングにより所定の形
状にして金属反射膜５となす。このとき金属反射膜５の
隙間には平面的に見て前記遮光膜９が位置するようにす
る。As shown in FIG. 4, transparent 1! A pole 2 is formed, a light shielding film 9 is formed on the transparent electrode 2, and a predetermined shape is formed by photo-etching. Further, a photoconductive film 3 and a metal film are laminated, and the gold-N film is formed into a predetermined shape by etching to form a metal reflective film 5. At this time, the light shielding film 9 is positioned in the gap between the metal reflective films 5 when viewed from above.
以後、実施例１と同様にして対向する基板を形成し、液
晶封入をして空間光変調器となす◇なお、遮光膜９と透
明電極２の順番は上記と逆の順番でも効果はかわらない
。Thereafter, opposing substrates are formed in the same manner as in Example 1, and a liquid crystal is encapsulated to form a spatial light modulator. ◇ Note that the effect does not change even if the order of the light shielding film 9 and the transparent electrode 2 is reversed to the above. .
以上述べたように本発明によれば、反射面を金属の反射
を使うことにより・従来の誘電体反射面の場合に比べ、
光出力を大巾に増大出来るようなるとともに、誘電体反
射膜を必要としないことから電圧損失を小さくすること
が出来、その結果として低電圧化、低消費電力化が実現
出来る◇また、金属反射面は、一定電圧となるため液晶
に印加される電圧は、その面内で一定となり、このこと
は、同一反射面からの光出力は均一であるため、シャー
プな空間光出力が得られることを意味する。すなわちキ
ャラクタやグラフィック等の像を出力する場合、像にに
じみが発生していたが、本発明により非常にシャープな
像が得られるようになった。As described above, according to the present invention, by using metal reflection as the reflective surface, compared to the conventional dielectric reflective surface,
In addition to being able to greatly increase the optical output, it is also possible to reduce voltage loss because a dielectric reflective film is not required, resulting in lower voltage and lower power consumption. Since the surface has a constant voltage, the voltage applied to the liquid crystal is constant within that surface.This means that the light output from the same reflective surface is uniform, so sharp spatial light output can be obtained. means. That is, when outputting images such as characters and graphics, blurring occurred in the images, but with the present invention, very sharp images can now be obtained.
第１図は本発明の空間光変調器の一実施例を示す主要断
面図。
第２図は従来の空間光変調器の主要断面図・第３図、第
４図は本発明による空間光変調器の実施例を示す主要断
面図。
２．７・・・・・・透明１！極
３・・・・・・光導電膜
４・・・・・・光吸収膜
５・・・・・・金属反射膜
８・・・・・・液晶
以 上FIG. 1 is a main sectional view showing an embodiment of the spatial light modulator of the present invention. FIG. 2 is a main sectional view of a conventional spatial light modulator, and FIGS. 3 and 4 are main sectional views showing embodiments of a spatial light modulator according to the present invention. 2.7...Transparent 1! Pole 3...Photoconductive film 4...Light absorption film 5...Metal reflective film 8...Liquid crystal or higher
Claims (1)
晶−金属反射膜−光導電膜−透明電極の構造を有し、金
属反射膜はモザイク状にマトリクス配列され、かつ各モ
ザイク状反射膜は、電気的に分離されていることを特徴
とする空間光変調器。 ２、金属反射膜と光導電膜の間に光吸収膜を有すること
を特徴とする特許請求の範囲第一項記載の空間光変調器
。 ３、光導電膜と透明電極の間に遮光膜を形成し、かつ金
属反射膜の隙間をおおうように配置したことを特徴とす
る特許請求の範囲第一項記載の空間光変調器。 ４、透明電極とガラス基板との間に遮光膜を形成し、か
つ金属反射膜の隙間をおおうように配置したことを特徴
とする特許請求の範囲第一項記載の空間光変調器。 ５、対向するガラス基板上に遮光膜を形成し、かつ金属
反射膜の隙間をおおうように配置したことを特徴とする
特許請求の範囲第一項記載の空間光変調器。[Claims] 1. A spatial light modulator using liquid crystal, which has a structure of transparent electrode-liquid crystal-metal reflective film-photoconductive film-transparent electrode, and the metal reflective film is arranged in a mosaic matrix, A spatial light modulator characterized in that each mosaic reflective film is electrically isolated. 2. The spatial light modulator according to claim 1, further comprising a light absorbing film between the metal reflective film and the photoconductive film. 3. The spatial light modulator according to claim 1, characterized in that a light shielding film is formed between the photoconductive film and the transparent electrode, and is disposed to cover the gap between the metal reflective films. 4. The spatial light modulator according to claim 1, wherein a light shielding film is formed between the transparent electrode and the glass substrate, and is arranged to cover the gap between the metal reflective films. 5. The spatial light modulator according to claim 1, characterized in that a light shielding film is formed on the opposing glass substrates and is arranged to cover the gap between the metal reflective films.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61011383A JPS62169120A (en) | 1986-01-22 | 1986-01-22 | Space optical modulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61011383A JPS62169120A (en) | 1986-01-22 | 1986-01-22 | Space optical modulator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62169120A true JPS62169120A (en) | 1987-07-25 |
Family
ID=11776484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61011383A Pending JPS62169120A (en) | 1986-01-22 | 1986-01-22 | Space optical modulator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62169120A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01179018A (en) * | 1987-12-31 | 1989-07-17 | Hamamatsu Photonics Kk | Light valve device |
| JPH01179015A (en) * | 1987-12-31 | 1989-07-17 | Hamamatsu Photonics Kk | Light valve device |
| JPH0211A (en) * | 1987-10-15 | 1990-01-05 | Displaytech Inc | Electrooptical switching apparatus using ferrodielectric liquid crystal |
| JPH0497135A (en) * | 1990-08-09 | 1992-03-30 | Nec Corp | Liquid crystal light valve |
| US5384649A (en) * | 1991-12-26 | 1995-01-24 | Matsushita Electric Industrial Co., Ltd. | Liquid crystal spatial light modulator with electrically isolated reflecting films connected to electrically isolated pixel portions of photo conductor |
| US5428711A (en) * | 1991-01-09 | 1995-06-27 | Matsushita Electric Industrial Co., Ltd. | Spatial light modulator and neural network |
| JP2009258689A (en) * | 2008-03-24 | 2009-11-05 | Citizen Holdings Co Ltd | Optical modulation device |
-
1986
- 1986-01-22 JP JP61011383A patent/JPS62169120A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0211A (en) * | 1987-10-15 | 1990-01-05 | Displaytech Inc | Electrooptical switching apparatus using ferrodielectric liquid crystal |
| JPH01179018A (en) * | 1987-12-31 | 1989-07-17 | Hamamatsu Photonics Kk | Light valve device |
| JPH01179015A (en) * | 1987-12-31 | 1989-07-17 | Hamamatsu Photonics Kk | Light valve device |
| JPH0497135A (en) * | 1990-08-09 | 1992-03-30 | Nec Corp | Liquid crystal light valve |
| US5428711A (en) * | 1991-01-09 | 1995-06-27 | Matsushita Electric Industrial Co., Ltd. | Spatial light modulator and neural network |
| US5384649A (en) * | 1991-12-26 | 1995-01-24 | Matsushita Electric Industrial Co., Ltd. | Liquid crystal spatial light modulator with electrically isolated reflecting films connected to electrically isolated pixel portions of photo conductor |
| JP2009258689A (en) * | 2008-03-24 | 2009-11-05 | Citizen Holdings Co Ltd | Optical modulation device |
| US8466906B2 (en) | 2008-03-24 | 2013-06-18 | Citizen Holdings Co., Ltd. | Optical modulation apparatus |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100187329B1 (en) | A reflective substrate, a method for producing the same and liquid crystal display device using the same | |
| JP2698218B2 (en) | Reflective liquid crystal display device and method of manufacturing the same | |
| JP2812851B2 (en) | Reflective liquid crystal display | |
| US5808712A (en) | Transmission liquid crystal display device with a liquid crystal panel having high luminance and wide view field angle | |
| KR0162262B1 (en) | Liquid crystal display device and its production | |
| JPH0627481A (en) | Reflective active matrix substrate, its production and liquid crystal display device | |
| JPH05323371A (en) | Reflection type liquid crystal display device and its production | |
| US4619501A (en) | Charge isolation in a spatial light modulator | |
| TWI413829B (en) | Reflective touch display panel and manufacturing method thereof | |
| JPH043121A (en) | Liquid crystal display and manufacture thereof | |
| JPS62169120A (en) | Space optical modulator | |
| KR20070042615A (en) | Array substrate and method of manufacturing the same | |
| JP2930517B2 (en) | Method for manufacturing reflective liquid crystal display device | |
| US5220445A (en) | Optical image processor | |
| JPS58215626A (en) | Light intensity-space frequency transducing element | |
| KR20040049540A (en) | Thin film transistor substrate, method of manufacturing the same and liquid crystal display device having the same | |
| KR20020067885A (en) | transflective liquid crystal display device | |
| JPS6240430A (en) | Liquid crystal light valve | |
| JPS6328308B2 (en) | ||
| KR100707035B1 (en) | Method for adjusting light transmission field and transflective type liquid crystal display using the same | |
| JPH01177020A (en) | Active matrix display device | |
| JPS63182632A (en) | Filter | |
| KR100948621B1 (en) | Trans-reflective liquid crystal display and method of manufacturing the same | |
| KR100693649B1 (en) | Reflector and liquid-crystal display | |
| JP2844075B2 (en) | Reflective active matrix liquid crystal display |