JPS62166764A - リニアパルスモ−タ - Google Patents
リニアパルスモ−タInfo
- Publication number
- JPS62166764A JPS62166764A JP948686A JP948686A JPS62166764A JP S62166764 A JPS62166764 A JP S62166764A JP 948686 A JP948686 A JP 948686A JP 948686 A JP948686 A JP 948686A JP S62166764 A JPS62166764 A JP S62166764A
- Authority
- JP
- Japan
- Prior art keywords
- mover
- movable element
- pulse motor
- linear pulse
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Linear Motors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP948686A JPS62166764A (ja) | 1986-01-20 | 1986-01-20 | リニアパルスモ−タ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP948686A JPS62166764A (ja) | 1986-01-20 | 1986-01-20 | リニアパルスモ−タ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62166764A true JPS62166764A (ja) | 1987-07-23 |
| JPH0363308B2 JPH0363308B2 (cg-RX-API-DMAC7.html) | 1991-09-30 |
Family
ID=11721561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP948686A Granted JPS62166764A (ja) | 1986-01-20 | 1986-01-20 | リニアパルスモ−タ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62166764A (cg-RX-API-DMAC7.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01162777U (cg-RX-API-DMAC7.html) * | 1988-04-28 | 1989-11-13 | ||
| US7239050B2 (en) * | 2003-03-28 | 2007-07-03 | Tokyo Seimitsu Co., Ltd. | Uniaxial drive unit and surface shape measuring apparatus using the same |
-
1986
- 1986-01-20 JP JP948686A patent/JPS62166764A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01162777U (cg-RX-API-DMAC7.html) * | 1988-04-28 | 1989-11-13 | ||
| US7239050B2 (en) * | 2003-03-28 | 2007-07-03 | Tokyo Seimitsu Co., Ltd. | Uniaxial drive unit and surface shape measuring apparatus using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0363308B2 (cg-RX-API-DMAC7.html) | 1991-09-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |