JPH0363308B2 - - Google Patents

Info

Publication number
JPH0363308B2
JPH0363308B2 JP948686A JP948686A JPH0363308B2 JP H0363308 B2 JPH0363308 B2 JP H0363308B2 JP 948686 A JP948686 A JP 948686A JP 948686 A JP948686 A JP 948686A JP H0363308 B2 JPH0363308 B2 JP H0363308B2
Authority
JP
Japan
Prior art keywords
movable element
weight
mover
pulse motor
linear pulse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP948686A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62166764A (ja
Inventor
Juichi Kurosawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pentax Corp
Original Assignee
Asahi Kogaku Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Kogaku Kogyo Co Ltd filed Critical Asahi Kogaku Kogyo Co Ltd
Priority to JP948686A priority Critical patent/JPS62166764A/ja
Publication of JPS62166764A publication Critical patent/JPS62166764A/ja
Publication of JPH0363308B2 publication Critical patent/JPH0363308B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Linear Motors (AREA)
JP948686A 1986-01-20 1986-01-20 リニアパルスモ−タ Granted JPS62166764A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP948686A JPS62166764A (ja) 1986-01-20 1986-01-20 リニアパルスモ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP948686A JPS62166764A (ja) 1986-01-20 1986-01-20 リニアパルスモ−タ

Publications (2)

Publication Number Publication Date
JPS62166764A JPS62166764A (ja) 1987-07-23
JPH0363308B2 true JPH0363308B2 (cg-RX-API-DMAC7.html) 1991-09-30

Family

ID=11721561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP948686A Granted JPS62166764A (ja) 1986-01-20 1986-01-20 リニアパルスモ−タ

Country Status (1)

Country Link
JP (1) JPS62166764A (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01162777U (cg-RX-API-DMAC7.html) * 1988-04-28 1989-11-13
JP4113991B2 (ja) * 2003-03-28 2008-07-09 株式会社東京精密 １軸駆動装置を用いた表面形状測定装置

Also Published As

Publication number Publication date
JPS62166764A (ja) 1987-07-23

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees