JPS6216573B2 - - Google Patents

Info

Publication number
JPS6216573B2
JPS6216573B2 JP54119885A JP11988579A JPS6216573B2 JP S6216573 B2 JPS6216573 B2 JP S6216573B2 JP 54119885 A JP54119885 A JP 54119885A JP 11988579 A JP11988579 A JP 11988579A JP S6216573 B2 JPS6216573 B2 JP S6216573B2
Authority
JP
Japan
Prior art keywords
crystal
recess
vibrating body
terminal board
crystal resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54119885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5643815A (en
Inventor
Kimio Aizawa
Takashi Nagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP11988579A priority Critical patent/JPS5643815A/ja
Priority to DE19803035088 priority patent/DE3035088A1/de
Priority to CA000360439A priority patent/CA1161943A/en
Priority to GB8030157A priority patent/GB2063558B/en
Publication of JPS5643815A publication Critical patent/JPS5643815A/ja
Publication of JPS6216573B2 publication Critical patent/JPS6216573B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0504—Holders or supports for bulk acoustic wave devices
    • H03H9/0509—Holders or supports for bulk acoustic wave devices consisting of adhesive elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/588—Membranes

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP11988579A 1979-09-18 1979-09-18 Quartz oscillator Granted JPS5643815A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP11988579A JPS5643815A (en) 1979-09-18 1979-09-18 Quartz oscillator
DE19803035088 DE3035088A1 (de) 1979-09-18 1980-09-17 Schwingquarzanordnung
CA000360439A CA1161943A (en) 1979-09-18 1980-09-17 Crystal oscillator device with one electrode at the mouth of a through-hole
GB8030157A GB2063558B (en) 1979-09-18 1980-09-18 Crystal oscillator device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11988579A JPS5643815A (en) 1979-09-18 1979-09-18 Quartz oscillator

Publications (2)

Publication Number Publication Date
JPS5643815A JPS5643815A (en) 1981-04-22
JPS6216573B2 true JPS6216573B2 (enEXAMPLES) 1987-04-13

Family

ID=14772635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11988579A Granted JPS5643815A (en) 1979-09-18 1979-09-18 Quartz oscillator

Country Status (4)

Country Link
JP (1) JPS5643815A (enEXAMPLES)
CA (1) CA1161943A (enEXAMPLES)
DE (1) DE3035088A1 (enEXAMPLES)
GB (1) GB2063558B (enEXAMPLES)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0059447B1 (en) * 1981-02-28 1985-05-15 Kinseki, Ltd. Piezoelectric oscillator device
JPS59189713A (ja) * 1983-04-11 1984-10-27 Toko Inc 発振子およびその製造方法
GB2146839B (en) * 1983-07-27 1987-04-01 Nihon Dempa Kogyo Co Piezoelectric resonator

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417504Y2 (enEXAMPLES) * 1975-04-21 1979-07-05
JPS53118391U (enEXAMPLES) * 1977-02-28 1978-09-20

Also Published As

Publication number Publication date
CA1161943A (en) 1984-02-07
DE3035088A1 (de) 1981-04-02
GB2063558B (en) 1984-01-25
GB2063558A (en) 1981-06-03
JPS5643815A (en) 1981-04-22

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