JPS62165384A - 半導体発光装置の製造方法 - Google Patents

半導体発光装置の製造方法

Info

Publication number
JPS62165384A
JPS62165384A JP61006754A JP675486A JPS62165384A JP S62165384 A JPS62165384 A JP S62165384A JP 61006754 A JP61006754 A JP 61006754A JP 675486 A JP675486 A JP 675486A JP S62165384 A JPS62165384 A JP S62165384A
Authority
JP
Japan
Prior art keywords
layer
active layer
light emitting
mesa structure
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61006754A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0213470B2 (enrdf_load_stackoverflow
Inventor
Toshihiro Kusuki
楠木　敏弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP61006754A priority Critical patent/JPS62165384A/ja
Publication of JPS62165384A publication Critical patent/JPS62165384A/ja
Publication of JPH0213470B2 publication Critical patent/JPH0213470B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Lasers (AREA)
  • Led Devices (AREA)
  • Weting (AREA)
JP61006754A 1986-01-16 1986-01-16 半導体発光装置の製造方法 Granted JPS62165384A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61006754A JPS62165384A (ja) 1986-01-16 1986-01-16 半導体発光装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61006754A JPS62165384A (ja) 1986-01-16 1986-01-16 半導体発光装置の製造方法

Publications (2)

Publication Number Publication Date
JPS62165384A true JPS62165384A (ja) 1987-07-21
JPH0213470B2 JPH0213470B2 (enrdf_load_stackoverflow) 1990-04-04

Family

ID=11646971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61006754A Granted JPS62165384A (ja) 1986-01-16 1986-01-16 半導体発光装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62165384A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015162500A (ja) * 2014-02-26 2015-09-07 三菱電機株式会社 半導体装置の製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0641584U (ja) * 1992-11-18 1994-06-03 方義 渡辺 腰掛けのついた風呂桶

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015162500A (ja) * 2014-02-26 2015-09-07 三菱電機株式会社 半導体装置の製造方法
US9153942B2 (en) 2014-02-26 2015-10-06 Mitsubishi Electric Corporation Method of manufacturing semiconductor device

Also Published As

Publication number Publication date
JPH0213470B2 (enrdf_load_stackoverflow) 1990-04-04

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term