JPS62161962A - Ｃｖｄ薄膜形成装置 - Google Patents

Ｃｖｄ薄膜形成装置

Info

Publication number
JPS62161962A
JPS62161962A JP303186A JP303186A JPS62161962A JP S62161962 A JPS62161962 A JP S62161962A JP 303186 A JP303186 A JP 303186A JP 303186 A JP303186 A JP 303186A JP S62161962 A JPS62161962 A JP S62161962A
Authority
JP
Japan
Prior art keywords
cvd
thin film
buffer
gas
reactor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP303186A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0532470B2 (enExample
Inventor
Katsumi Ooyama
勝美 大山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP303186A priority Critical patent/JPS62161962A/ja
Publication of JPS62161962A publication Critical patent/JPS62161962A/ja
Publication of JPH0532470B2 publication Critical patent/JPH0532470B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP303186A 1986-01-10 1986-01-10 Ｃｖｄ薄膜形成装置 Granted JPS62161962A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP303186A JPS62161962A (ja) 1986-01-10 1986-01-10 Ｃｖｄ薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP303186A JPS62161962A (ja) 1986-01-10 1986-01-10 Ｃｖｄ薄膜形成装置

Publications (2)

Publication Number Publication Date
JPS62161962A true JPS62161962A (ja) 1987-07-17
JPH0532470B2 JPH0532470B2 (enExample) 1993-05-17

Family

ID=11545943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP303186A Granted JPS62161962A (ja) 1986-01-10 1986-01-10 Ｃｖｄ薄膜形成装置

Country Status (1)

Country Link
JP (1) JPS62161962A (enExample)

Also Published As

Publication number Publication date
JPH0532470B2 (enExample) 1993-05-17

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